ZP

Applicable pad 4020W/5020W/6020W/8020W Applicable pad 3507W/4010W/5010W/6010W Applicable pad 4030W/5030W/6030W/8030W A-A A-A A-A (5) (5) (5) 14.8 8.8 6 1.5 A A A A A A 2 0.8 2 3.5 4 4 15 15 30 3 5 5 3 5 3 0.8 0.8 8.4 12.8 20.4 Note) R part has to be smooth with no corners.

ZP

Applicable pad 4020W/5020W/6020W/8020W Applicable pad 3507W/4010W/5010W/6010W Applicable pad 4030W/5030W/6030W/8030W A-A A-A A-A (5) (5) (5) 14.8 8.8 6 1.5 A A A A A A 2 0.8 2 3.5 4 4 15 15 30 3 5 5 3 5 3 0.8 0.8 8.4 12.8 20.4 Note) R part has to be smooth with no corners.

Vacuum Pad

P P For the release valve, select a 2/3 port valve with a low vacuum specification. Also, use a needle valve to regulate the release flow rate. During the adsorption and transfer of a workpiece, verification of the vacuum switch is recommended. In addition, visually verify the vacuum gauge when handling a heavy or a hazardous item.

Vacuum Pad

P P For the release valve, select a 2/3 port valve with a low vacuum specification. Also, use a needle valve to regulate the release flow rate. During the adsorption and transfer of a workpiece, verification of the vacuum switch is recommended. In addition, visually verify the vacuum gauge when handling a heavy or a hazardous item.

Vacuum Pad

P P For the release valve, select a 2/3 port valve with a low vacuum specification. Also, use a needle valve to regulate the release flow rate. During the adsorption and transfer of a workpiece, verification of the vacuum switch is recommended. In addition, visually verify the vacuum gauge when handling a heavy or a hazardous item.

Compact Hydraulic Cylinder

MA a A MA a Cushion adjustment screw Air release R (max.)

Hydraulic

MA a A MA a Air release R (max.)

Series VS

(A) + 14 (A) + PIN 2 PIN 2 12 (B) + 12 (B) + PIN 2 PIN 2 PIN 3 PIN 3 COMMON COMMON PIN 3 PIN 3 PIN 3 PIN 3 COMMON COMMON COMMON COMMON COMMON COMMON PIN 3 PIN 3 PIN 4 PIN 4 14 (A) + 14 (A) + 12 (B) + 12 (B) + PIN 4 PIN 4 12 (B) + 12 (B) + PIN 4 PIN 4 14 (A) + 14 (A) + PIN 4 PIN 4 NOT USED NOT USED X17 X17 PIN 1 PIN 1 X6 X6 PIN 1 PIN 1 NOT USED NOT USED X53 X53 14 (A) + 14 (A) + PIN 1 PIN

5 Port Solenoid Valve Series SV1000/2000/3000/4000

A A A A 90 B A B A B A B A Dimensions are the ones for SV1300--.

0.4

B A B A B A B A B A A LERR.

5 Port Solenoid Valve

SPR3: Max. 1.0 A SPR2: Max. 2.0 A SPR4: Max. 1.0 A SPR5: Max. 2.0 A SPR7: Max. 1.0 A SPR6: Max. 2.0 A SPR8: Max. 1.0 A SDN1: Max. 2.0 A SDN3: Max. 1.0 A SDN2: Max. 2.0 A SDN4: Max. 1.0 A SMJ1: Max. 2.0 A SMJ3: Max. 1.0 A SMJ2: Max. 2.0 A SMJ4: Max. 1.0 A Supplied current IP67 IP40 IP67 14 to 122F (10 to 50C) 35 to 85%RH (No condensation) 500 VAC for 1 minute between terminals and housing

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

3/5 3/5 4 A 4 A 4 A 4 A 2 B 2 B 2 B 2 B 2 B P 1 P 1 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.

Table of Contents

Turn cover A counterclockwise until it stops (approx. 45). 4. Install a new element on cover A and insert it into the case. Cover A Case Cover A Case O L L Element O-ring Window 5.

Fieldbus System

SPR3: Max. 1.0 A SPR2: Max. 2.0 A SPR4: Max. 1.0 A SPR5: Max. 2.0 A SPR7: Max. 1.0 A SPR6: Max. 2.0 A SPR8: Max. 1.0 A SDN1: Max. 2.0 A SDN3: Max. 1.0 A SDN2: Max. 2.0 A SDN4: Max. 1.0 A SMJ1: Max. 2.0 A SMJ3: Max. 1.0 A SMJ2: Max. 2.0 A SMJ4: Max. 1.0 A Supplied current IP67 IP40 IP67 14 to 122F (10 to 50C) 35 to 85%RH (No condensation) 500 VAC for 1 minute between terminals and housing

VQ7-6/7-8

Rc1/4 Rc3/8 Bottom Note) When equipped with control unit, 1 or 2 stations are used for mounting. 6 Series VQ7-6 DIN Connector Type VV71-100 80 2n-Rc1/4, 3/8 100 80 9 37 9 23 14 U side 15 R4.5 Manual override Indicator light R4.5 53.5 P=43 9 9 53.5 P=43 20 9 23 38 B B B B B B B B B SMC SMC SMC A PA PA PA PA A A A A B A L1 L2 L2 L1 B A B SMC A B A 4n-Rc1/4, 3/8 (ports A, B) PA L side R side

JIS Standard Hydraulic Cylinder

Hs D-A44 A A 49.5 Auto switch 376 Auto Switch Mounting CH2E/CH2F/CH2H Series Auto Switch Proper Mounting Positions CHQ D-G5/K59 D-G5W/K59W D-G59F/G5BA D-G5NT D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-F5/J59 D-F5W/J59W D-F59F/F5BA Note2) D-A9/A9V Bore size (mm) D-G39/K39 D-A5/A6 D-B5/B64 D-A3/A44 D-F5NT D-A59W D-B59W CHK CHN A A A A A A A A A A A 32 25 21.5 26.5 17 15 19 15.5 18.5 CHM 40 26 22.5

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

P = 43 PA 23 A A B B 14 12 A PA PA L1 L2 L2 L1 B B B 14 12 A A A A B 14 A A PA B B (2n 1/8) 4n-1/4, 3/8 2, 4 port PA L-side R-side L-side R-side D-side D-side 89 3 89 16 141 (Single) 141 (Single) 55 44 186 (Double) 186 (Double) 196 (3 position) 196 (3 position) 77.5 Bottom ported M12 connector L: Dimensions n: Stations 141.5 L n 1 Formula 2 3 4 5 6 7 8 9 10 121 5 1 12 14 PA PB 107 L1 = 43n

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

A A A A A A A 32 15 19 21.5 25.5 26.5 17 15.5 18.5 Note) 40 16 20 22.5 26.5 27.5 18 16.5 19.5 50 16 20 22.5 26.5 27.5 18 16.5 19.5 63 19 23 25.5 29.5 30.5 21 19.5 22.5 80 23 27 29.5 33.5 34.5 25 23.5 26.5 100 26 30 32.5 36.5 37.5 28 26.5 29.5 Note) D-A3/A44/G39/K39 cannot be mounted on 32 cylinders. 20 Series CH2E/CH2F/CH2G/CH2H Auto Switch Specifications Auto Switch Internal Circuits Reed

Vacuum Ejector Series ZM

a manifold.

Round Type Hydraulic Cylinder

D-C7/C80 D-H7/H7W/H7F/H7BA 8.5 Hs Hs 8.5 16 16 B Auto switch 29 A 26 A Auto switch B D-C73C/C80C D-H7C Hs 8.5 Hs Auto switch 16 16 B Auto switch 38.2 A A 36.7 B D-G5/K59/G5W/K59W/G5BA/G59F/G5NT D-B5/B64/B59W Hs Hs 12 Auto switch 12 24.5 24.5 A B A B Auto switch 33 6.5 33 D-A3/G39/K39 D-A4 Hs Auto switch 36 Hs 36 Auto switch B A B A 49 49.5 G 1/2 (applicable cable 6.8 to 11.5) G 1/2 (applicable