Body Size: 2, Set Pressure: 0 (0.02 to 0.2 MPa), Exhaust Direction: 0 (Bottom Exhaust), Thread: Rc, Port Size: 02 (1/4), Option: B (w/Bracket), Semi-standard: R (Flow Direction: Right to Left)

Body Size: 2, Set Pressure: 0.02 to 0.2 MPa, Exhaust Direction: Bottom Exhaust, Thread: Rc, Port Size: 1/4, Option: w/Bracket, Semi-standard: Flow Direction: Right to Left

Series VS

(A) + 14 (A) + PIN 2 PIN 2 12 (B) + 12 (B) + PIN 2 PIN 2 PIN 3 PIN 3 COMMON COMMON PIN 3 PIN 3 PIN 3 PIN 3 COMMON COMMON COMMON COMMON COMMON COMMON PIN 3 PIN 3 PIN 4 PIN 4 14 (A) + 14 (A) + 12 (B) + 12 (B) + PIN 4 PIN 4 12 (B) + 12 (B) + PIN 4 PIN 4 14 (A) + 14 (A) + PIN 4 PIN 4 NOT USED NOT USED X17 X17 PIN 1 PIN 1 X6 X6 PIN 1 PIN 1 NOT USED NOT USED X53 X53 14 (A) + 14 (A) + PIN 1 PIN

VS 8-2/VS 8-4

Regarding a vacuum switch valve and a vacuum release valve If a non-vacuum valve is installed in the middle of piping system having a vacuum, the vacuum condition will not be maintained. Use a valve designed for use under vacuum condition. 10.

VQ7-6/7-8

Rc1/4 Rc3/8 Bottom Note) When equipped with control unit, 1 or 2 stations are used for mounting. 6 Series VQ7-6 DIN Connector Type VV71-100 80 2n-Rc1/4, 3/8 100 80 9 37 9 23 14 U side 15 R4.5 Manual override Indicator light R4.5 53.5 P=43 9 9 53.5 P=43 20 9 23 38 B B B B B B B B B SMC SMC SMC A PA PA PA PA A A A A B A L1 L2 L2 L1 B A B SMC A B A 4n-Rc1/4, 3/8 (ports A, B) PA L side R side

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

P = 43 PA 23 A A B B 14 12 A PA PA L1 L2 L2 L1 B B B 14 12 A A A A B 14 A A PA B B (2n 1/8) 4n-1/4, 3/8 2, 4 port PA L-side R-side L-side R-side D-side D-side 89 3 89 16 141 (Single) 141 (Single) 55 44 186 (Double) 186 (Double) 196 (3 position) 196 (3 position) 77.5 Bottom ported M12 connector L: Dimensions n: Stations 141.5 L n 1 Formula 2 3 4 5 6 7 8 9 10 121 5 1 12 14 PA PB 107 L1 = 43n

Body Size: 2, Set Pressure: 0 (0.02 to 0.2 MPa), Exhaust Direction: 0 (Bottom Exhaust), Thread: Rc, Port Size: 02 (1/4), Option: G (Round Type Pressure Gauge), Semi-standard: None

Body Size: 2, Set Pressure: 0 (0.02 to 0.2 MPa), Exhaust Direction: 0 (Bottom Exhaust), Thread: Rc, Port Size: 02 (1/4), Option: BG (B + G), Semi-standard: None

Body Size: 2, Set Pressure: 0 (0.02 to 0.2 MPa), Exhaust Direction: 0 (Bottom Exhaust), Thread: F (G), Port Size: 02 (1/4), Option: BG (B + G), Semi-standard: None

Body Size: 2, Set Pressure: 0 (0.02 to 0.2 MPa), Exhaust Direction: 0 (Bottom Exhaust), Thread: F (G), Port Size: 02 (1/4), Option: B (w/Bracket), Semi-standard: None

Body Size: 2, Set Pressure: 0 (0.02 to 0.2 MPa), Exhaust Direction: 0 (Bottom Exhaust), Thread: Rc, Port Size: 02 (1/4), Option: None, Semi-standard: None

Body Size: 2, Set Pressure: 0 (0.02 to 0.2 MPa), Exhaust Direction: 0 (Bottom Exhaust), Thread: F (G), Port Size: 02 (1/4), Option: None, Semi-standard: None

Body Size: 2, Set Pressure: 0.02 to 0.2 MPa, Exhaust Direction: Bottom Exhaust, Thread: Rc, Port Size: 1/4, Option: Round Type Pressure Gauge, Semi-standard: None

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Standard, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Relief, Reverse Flow Function (Relief): No, Supply Side Connection Type: Rc, Supply Side, Connection Diameter: 1/4, Flow Direction: [Right] From Left to Right, Control Side Connection Type: Rc, Control Side

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Standard, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Relief, Reverse Flow Function (Relief): No, Supply Side Connection Type: Rc, Supply Side, Connection Diameter: 1/4, Flow Direction: [Right] From Left to Right, Control Side Connection Type: Rc, Control Side

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Standard, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Relief, Reverse Flow Function (Relief): No, Supply Side Connection Type: G, Supply Side, Connection Diameter: 1/4, Flow Direction: [Right] From Left to Right, Control Side Connection Type: G, Control Side

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Standard, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Relief, Reverse Flow Function (Relief): No, Supply Side Connection Type: G, Supply Side, Connection Diameter: 1/4, Flow Direction: [Right] From Left to Right, Control Side Connection Type: G, Control Side

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Standard, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Relief, Reverse Flow Function (Relief): No, Supply Side Connection Type: G, Supply Side, Connection Diameter: 1/4, Flow Direction: [Right] From Left to Right, Control Side Connection Type: G, Control Side

Table of Contents

wire electrical entry) P EB EA 31 50 67 81 37 37 43 6-Rc 3/4 61 103 (P , EA, EB port) 72 [ ] = A, B port Rc 3/4 Formula for manifold weight M = 0.911n + 1.621 (kg) n: Station 144 (72) 60 11 60 Non plug-in type: VV5FR5-10Station 1Bore size U side 2.3 (Electrical entry) Manual override (Non-locking) 21 R5.5 B B B B A A A A B B B n A A A B B B B A A A A 3 L2 L1 P = 51 11 11 71.5 (Pitch) P =

VQ7-6/7-8

VZ 9 PA A B VF B A VFR PA A B VP4 L1 L2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B A A PA VZS A B SMC VFS PA A VS4 B VQ7 PA A L side R side (2n-1/8) EVS 38 D side VFN 3 68.5 (A, B port) 4n-1/4, 3/8 16 120.5 (Single) 44 155 (3 position) 145 (Double) 55 77.5