Cooling Capacity: 030 (30 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: S (Pump Inverter Type), Option: CNYZ (C+N+Y+Z)

Cooling Capacity: 030 (30 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: S (Pump Inverter Type), Option: CDNWYZ (C+D+N+W+Y+Z)

Cooling Capacity: 30 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: C+N

Cooling Capacity: 30 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: C+N+Y+Z

Cooling Capacity: 30 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: C+D+N+W+Y+Z

Cooling capacity: 2 kW, 8 kW, 15 kW, and 30 kW, Temperature stability: ±0.3 °C, Ideal for ordinary temperature and high temperature processes, Thermo-chiller, Tap/Deionized water, THERMO CHILLER, WATER COOLED, 733, 90 lb

Cooling capacity: 2 kW, 8 kW, 15 kW, and 30 kW, Temperature stability: ±0.3 °C, Ideal for ordinary temperature and high temperature processes, Thermo-chiller, Tap/Deionized water, THERMO CHILLER, WATER COOLED, 733, 90 lb

Cooling capacity: 2 kW, 8 kW, 15 kW, and 30 kW, Temperature stability: ±0.3 °C, Ideal for ordinary temperature and high temperature processes, Thermo-chiller, Tap/Deionized water, THERMO CHILLER, WATER COOLED, 733, 90 lb

Cooling Capacity: 030 (30 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: S (Pump Inverter Type)

Cooling Capacity: 30 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: -

2

(C) Dimensions (mm) Applicable air dryer Port size Rc A B C Weight (kg) D E Part no.

Series AK1000

Option Material Code Specification Standard High inlet pressure (Max. inlet pressure 3000 psig (20.7 MPa)) 5) Ports Diaphragm Nozzle Code Body Brass Poppet No code Material Code S, SH V V V V B S SH Ports 316 SS Hastelloy C-22 Hastelloy C-22 B 316 SS HR Hastelloy C-22 2P 3P 4PL 5PC Refer to the following porting configurations.

Process Gas Diaphragm Valve

Applicable Fluid Process Gas Molecular Formula Process Gas Molecular Formula Boron11 Trifluoride Chlorine 11BF3 Cl2 Argon Chlorine Trifluoride Ar ClF3 Arsine Carbon Monoxide AsH3 CO Boron Trichloride Carbon Dioxide CO2 BCl3 Boron Trifluoride Germane BF3 GeH4 Halocarbon114 Hydrogen C2ClF4 H2 Halocarbon115 Hydrogen Sulfide C2ClF5 H2S Halocarbon116 Hydrogen Selenide H2Se C2F6 Acetylene Hydrogen

Cooling Capacity: 030 (30 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: S (Pump Inverter Type), Option: NY (N+Y)

Cooling Capacity: 030 (30 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: S (Pump Inverter Type), Option: DN (D+N)

Cooling Capacity: 030 (30 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: S (Pump Inverter Type), Option: N (NPT Fitting)

Cooling Capacity: 030 (30 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: S (Pump Inverter Type), Option: NYZ (N+Y+Z)

Cooling Capacity: 030 (30 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: S (Pump Inverter Type), Option: NZ (N+Z)

Cooling Capacity: 030 (30 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: S (Pump Inverter Type), Option: Z (Circulating Fluid Automatic Recovery)

Cooling Capacity: 030 (30 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: S (Pump Inverter Type), Option: NWZ (N+W+Z)