High Vacuum Angle Valve, XL Series

Note 1) Option specifications/Combinations This model has auto switch and K(DN) flange options, but high temperature/heater options are not available.

1

Note) Since the nuts are embedded in the SUP/EXH block. eEX600 SI unit EX600 wValve plate S 1 PR ZMV2 EX600 With mounting screws (2 pcs. of M4 x 6 and 2 pcs. of M3 x 8) Protocol Version Description When MJ, EN, EC or PN is selected When PR or DN is selected Symbol Description Symbol Nil A PR DN MJ EN EC PN PROFIBUS DP DeviceNet CC-Link EtherNet/IP Note) EtherCAT Note) PROFINET Note) rClamp

2

/A: Brass, N: Brass + Electroless nickel plated Bulkhead Connector: KQ2E H1 (Width across flats) H2 (Width across flats) L1 L2 Mounting hole M Effective area (mm2) Min. port size Applicable tubing O.D.

CM2

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Width across flats B3 e 9 l 9 f h ZZ + Stroke Boss-cut style Built-in One-touch fittings One-touch fitting port size P ZZ + Stroke H1 H G F E MM P ZZ B2 D H2 I A AL B1 K N NA NN S Bore size (mm) 0 0.033 0 0.033 0 0.033 0 0.039 20 41 8 13 20 116 8 18 5

High Vacuum Angle Valve

CYV Chemraz VMQ FKM for Plasma ULTIC ARMOR Example) XLCV-16-M9NA-1G-XAN1A UA4640 Note 1) Option specifications/Combinations This model has auto switch and K(DN) flange options, but high temperature/heater options are not available.

ZP

D-DN

ZP

H2 H2 L1 M1 M1 M1 D Pad side Pad side Pad side ZP2V-A01ZP2V-AN1ZP2V-A5ZP2V-A8ZP2V-AG1Vacuum generator side D Vacuum generator side M2 M2 L3 L2 H1 Vacuum generator side L2 L33 H1 M2 H1 (L4) (L4) No.0.8 No.0.8 (L4) No.0.8 H2 H2 L1 L1 L1 H2 M1 M1 M1 Pad side Pad side Pad side ZP2V-B01ZP2V-BN1ZP2V-BG1ZP2V-B5ZP2V-B61 The place at the vacuum generator side where the tool is applied. 2 The place

ZP

H2 H2 L1 M1 M1 M1 D Pad side Pad side Pad side ZP2V-A01ZP2V-AN1ZP2V-A5ZP2V-A8ZP2V-AG1Vacuum generator side D Vacuum generator side M2 M2 L3 L2 H1 Vacuum generator side L2 L33 H1 M2 H1 (L4) (L4) No.0.8 No.0.8 (L4) No.0.8 H2 H2 L1 L1 L1 H2 M1 M1 M1 Pad side Pad side Pad side ZP2V-B01ZP2V-BN1ZP2V-BG1ZP2V-B5ZP2V-B61 The place at the vacuum generator side where the tool is applied. 2 The place

SQ1000/2000

SS5Q1308 FD0 DN 00T P/R port in inch size SQ1000: 5/16" (N9) SQ2000: 3/8" (N11) 51 Series SQ1000/2000 How to Add Manifold Stations for SQ1000/SQ2000 1.

Aluminum High Vacuum Angle Valve

CYV Chemraz Example) XLCV-16-M9NA-1G-XAN1A VMQ FKM for Plasma ULTIC ARMOR Note 1) Option specifications/Combinations This model has auto switch and K(DN) flange options, but high temperature/heater options are not available.

CATALOG

Applicable Connection Model T H1 H2 L1 L2 Mounting M Minimum Tube OD Thread UNF (Width (Width Hole Hole Applicable Connection Model T (M) H1 H2 L1 L2 Mounting M Effective Tube OD mm Thread (Width (Width Hole Orifice (mm 2) Inch Rc(PT) Across Flats) Across Flats) Diameter Rc(PT) Across Flats)Across Flats) Nylon/Ureth 1/8 1/4 KQE01-35 1/2-20 17.46 17.46 31.5 15 14 15.5 2.5 3.2 14 KQE23-02 M12x1

SV

How to Order EX500 G DN 1 Communication protocol Applicable GW unit DN PR AB DeviceNet PROFIBUS-DP Remote I/O (RIO) DeviceNet PROFIBUS-DP Remote I/O (RIO) Nil -X1 Dimensions 148 EX500-GAB1-X1 VOLTAGE 24 VDC/200 mA INPUT/OUTPUT 64/64 IP CODE IP65 SERIAL NO.

Series SV

How to Order EX500 G DN 1 Applicable GW unit Communication protocol DeviceNet PROFIBUS-DP Remote I/O (RIO) DN PR AB DeviceNet PROFIBUS-DP Nil Remote I/O (RIO) -X1 Dimensions 148 E x 500-GAB1-X1 VOLTAGE 24VDC/200mA INPUT/OUTPUT 64/64 IP CODE IP65 SERIAL NO.

V

R T Metric (mm) 00T Imperial (Inch) S E R I E S VQ1000 7 Plug Lead unit/cassette type T Y P E O F M A N I F O L D DIN R A I L/ O P T I O N N o t e 1 )D DIN rail mounted type N With Nameplate N U M B E R O F S TAT I O N S N o t e 1 ) Manifold is of a DIN rail mounted type, and so suffix D should be indicated. 01 1 Station 16 16 Stations N o t e 2 ) When the N option is desired, write as DN

Cooling Capacity: 002 (2 kW), Type: 2 (Clean/DI Water)

Cooling Capacity: 2 kW, Type: Clean/DI Water, Pump Inverter Control: -, Option: -

Cooling Capacity: 002 (2 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: None, Option: C (Analog Communication)

Cooling Capacity: 002 (2 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: None, Option: N (NPT Fitting)

Cooling Capacity: 002 (2 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: None, Option: CY (C+Y)

Cooling Capacity: 002 (2 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: None, Option: NZ (N+Z)