Cooling Capacity: 012 [1000/1200, (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option: MU (M+U)

Cooling Capacity: 012 [1000/1200, (50/60 Hz)], Cooling Method: W (Water-cooled), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option 1: M (Applicabe to DI Water Piping)

Cooling Capacity: 012 [1000/1200, (50/60 Hz)], Cooling Method: Air-cooled, Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option: M+U

Cooling Capacity: 012 [1000/1200, (50/60 Hz)], Cooling Method: Water-cooled, Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option 1: Applicabe to DI Water Piping, Option 2: -

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

40 32 5 40 CQM 5 4 3 25 32 CQ2 25 20 1 2 20 RQ 0.5 1 0 10 20 30 40 50 60 70 80 90 100 50 100 200 500 300 MU Maximum speed (mm/s) Stroke St (mm) D-X 20W (Mounting orientation: Horizontal) Data 7-6-151

CQ2

W/o auto switch W/ auto switch Bore size (mm) 5st 10 20 5st 10 20 A B L L1 43 48 53 58 7 28.5 32 40 50 49.5 54.5 59.5 64.5 7 28.5 57.5 67.5 67.5 77.5 8 33.5 Double clevis (mm) 5st 10 20 5st 10 20 5st 10 20 5st 10 20 5st 10 20 5st 10 20 A B CL Without auto switch A B CL With auto switch Bore (mm) 65 70 28 33 55 60 75 80 38 43 65 70 32 40 50 73.5 78.5 39.5 39.5 63.5 68.5 83.5 88.5 44.5 49.5

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

YA 03 YA-03 32, 40 42 6 16 6.8 18 6.5 10 MU YA-05 50, 63 50 8 20 9 20 6.5 12 Applicable air cylinder bore YA-08 80 62 10 25 11 26 8.5 16 D03 05 08 10 For 32, 40 For 50, 63 80 100 Mounting bracket YA-10 100 76 12 30 14 31 10.5 18 YA YB YU Type A mounting bracket -X Bore size (mm) U V W Weight (g) Part no.

Free Mount Cylinder Series CU

(mm) D-A9, D-A9V D-M9, D-M9W D-M9V, D-M9WV Bore size (mm) A B W A B W A B W 6 10 16 20 25 32 13.5 5.5 3.5 (1) 17.5 9.5 0.5 17.5 9.5 1.5 12.5 9.5 7.5 (5) 16.5 13.5 3.5 16.5 13.5 5.5 16 11.5 9.5 (7) 20 15.5 5.5 20 15.5 7.5 20 15 24 19 9 24 19 11 13 (10.5) 22.5 16 26.5 20 10.5 26.5 20 12.5 14.5 (12) 23.5 18.5 27.5 22.5 12.5 27.5 22.5 14.5 16.5 (14) Note 1) Figures in the table above are used

Compact Cylinder Series CQS

, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 12 16 20 25 CQM MU 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20, 25 30, 35, 40, 45, 50 Double rod CQSW 560 12 16 20 25 5, 10 Double acting Single acting Return/Extend CQS 567 12, 16 20, 25 Non-rotating Rod Single rod CQSK 575 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20, 25 30, 35, 40, 45, 50 Double rod CQSKW 582 Anti-lateral Load

CQS

Type/Without Auto Switch Graph (4) Anti-lateral Load Type/With Auto Switch D-X 25 Allowable lateral load W (N) Allowable lateral load W (N) Allowable lateral load W (N) 2025 Data 20 Caution 20 16 Snap Ring Installation/Removal 16 1.

CQS

D-F9BAL Symbol A B W HS CQ2 Double acting: single rod, Single acting: single rod/spring return, spring extend 4.5 3.5 14.5 16.5 12 MU Bore size (mm) 5 3 15 18.5 16 9 6.5 11.5 22 20 10 8.5 9.5 24 25 Long stroke 8 10 16.5 8 12 8.5 9.5 8.5 18.5 16 Bore size (mm) 12 15 22 3 20 13 17 1 24 25 Anti-lateral load 9 4 14 16.5 12 8.5 4.5 13.5 18.5 16 Bore size (mm) 12 8.5 9.5 22 20 13 10.5 7.5 24 25

Plate Cylinder

MU-D02 MU-D03 MU-D04 MU-D05 MU-D06 Size 25 32 40 50 63 8 10 10 14 14 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 8 10 10 14 14 CL 26 42 54 64 72 CR 5.3 6.4 8.4 10.5 13 CT 9.5 11 14 17 20 CX 9 11 13 16 16 CZ 8 10 10 14 16 DL 26 42 54 64 72 DR 5.3 6.4 8.4 10.5 13 DX 18 22 26 32 32 DY 9 11 13 16 16 DZ 8 10 10 14 16 DT 9.5 11 14 17 20 Applicable pin

MU

MU-C02 MU-C03 MU-C04 MU-C05 MU-C06 Part No.

mlu

Size Bracket 25 32 40 50 Note 1) MU-L02 MU-F02 MU-C02 MU-D02 MU-L03 MU-F03 MU-C03 MU-D03 MU-L04 MU-F04 MU-C04 MU-D04 MU-L05 MU-F05 MU-C05 MU-D05 Foot Flange Single clevis Double clevis Note 3) Note 1) When ordering foot brackets, order 2 pieces for each cylinder. Note 2) The parts included with each bracket are shown below.

MLU

MU-C02 MU-C03 MU-C04 MU-C05 Part no.

Plate Cylinder with Lock Series MLU

MU-C02 MU-C03 MU-C04 MU-C05 Part no.

MU

MU-D02 MU-D03 MU-D04 MU-D05 MU-D06 Bore (mm) 25 32 40 50 63 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 DZ 8 10 10 14 16 CZ 8 10 10 14 16 DY 9 11 13 16 16 CX 9 11 13 16 16 DX 18 22 26 32 32 CT 9.5 11 14 17 20 DT 9.5 11 14 17 20 CR 5.3 6.4 8.4 10.5 13 DR 5.3 6.4 8.4 10.5 13 CL 26 42 54 64 72 DL 26 42 54 64 72 Applicable pin CD-MU02 CD-MU03 CD-MU04

MU

MU-C02 MU-C03 MU-C04 MU-C05 MU-C06 Part no.

ZP

Dimensions ZP2-Z002 ZP2-Z003 40 20 0.1 0.2 A A 20 0.1 0.2 40 A A 20 40 A-A A-A w q q w 11 20 9 18 90 4 x 4 90 4 x 4 4 e e 5 5 () 12 () 4 x 2.4 1.8 1.5 4 x 2.4 1.5 0.9 20 9.4 Component Parts Component Parts Part no. Description No. ZP2-Z2A ZP2-Z2B ZP2-Z2C Material PTFE FKM Aluminum alloy Note Clear anodized Part no. Description No.

ZP

Dimensions ZP2-Z002 ZP2-Z003 40 20 0.1 0.2 A A 20 0.1 0.2 40 A A 20 40 A-A A-A w q q w 11 20 9 18 90 4 x 4 90 4 x 4 4 e e 5 5 () 12 () 4 x 2.4 1.8 1.5 4 x 2.4 1.5 0.9 20 9.4 Component Parts Component Parts Part no. Description No. ZP2-Z2A ZP2-Z2B ZP2-Z2C Material PTFE FKM Aluminum alloy Note Clear anodized Part no. Description No.