Specifications: E (Oil-free, External parts copper-free), Display Pressure: K1 (-100 to 100 kPa), Connection Thread: 02 (R 1/4)

Type: Pressure Monitor, Sensor, Monitor Structure: Integrated, Output Method: Analog, Pipe Port Type: [Threads] Male thread, Plumbing Thread Type: [Rc (R)] R, Pressure Resistant(kPa): 100, Operating Temperature Range(°C): 18～28, Response Differential(kPa): ±3, Pipe Connection Direction: Back, Plumbing Thread Nominal: [1/8] 1/8, Rated Pressure Range(kPa): -100 to 100, Compatible Fluid: Air

Specifications: E (Oil-free, External parts copper-free), Display Pressure: K1 (-100 to 100 kPa), Connection Thread: 01 (R 1/8)

Type: Pressure Monitor, Sensor, Monitor Structure: Integrated, Output Method: Analog, Pipe Port Type: [Threads] Male thread, Plumbing Thread Type: [Rc (R)] R, Pressure Resistant(kPa): 100, Operating Temperature Range(°C): 18～28, Response Differential(kPa): ±3, Pipe Connection Direction: Back, Plumbing Thread Nominal: [1/4] 1/4, Rated Pressure Range(kPa): -100 to 100, Compatible Fluid: Air

Specifications: None, Display Pressure: K1 (-100 to 100 kPa), Connection Thread: 02 (R 1/4), Option: None, Attachment: C2 (Clear Cover w/Protrusion, is Removable, Wrench Flats Protrude)

1

VM230U-02-08A VM-08A 110 g Red VM220-02-30RA VM230-02-30RA VM220U-02-30RA VM230U-02-30RA VM-30AR 58 g Black VM220-02-30BA VM230-02-30BA VM220U-02-30BA VM230U-02-30BA VM-30AB Green VM220-02-30GA VM230-02-30GA VM220U-02-30GA VM230U-02-30GA VM-30AG Yellow VM220-02-30YA VM230-02-30YA VM220U-02-30YA VM230U-02-30YA VM-30AY Push button (Mushroom) Red VM220-02-32RA VM230-02-32RA VM220U-02-32RA VM230U

Compact 5-Port Solenoid Valve

02 2 stations Double wiring*1 Symbol Stations Note 02 2 stations Double wiring*1 12 12 stations 02 2 stations Specified layout*2 (Up to 24 solenoids available) 12 12 stations 02 2 stations Specified layout*2 (Up to 24 solenoids available) 24 24 stations 24 24 stations *1 Indicate the sizes on the manifold specification sheet in the case of CM. * The JSY1000 manifold pitch for C2 and C4

ZP

(Pad diameter: 20 mm or less) ZP T 02 U N A5 From p. 33 p. 115 p. 117 From p. 121 With adapter ZP T 02 U N J 6 B3 A8 From p. 43 p. 116 p. 118 From p. 124 With buffer q w e r t y u i Flat type q Vacuum inlet direction w Pad diameter t Buffer stroke 02 2 16 16 04 4 20 20 06 6 25 25 08 8 32 32 10 10 40 40 13 13 50 50 e Material Nil Pad unit T Vertical R Lateral (With One-touch fitting) Y Lateral

Micro Mechanical Valve Series VM1000

VM230U-02-08A VM-08A 110 g Red VM220-02-30RA VM230-02-30RA VM220U-02-30RA VM230U-02-30RA VM-30AR 58 g Black VM220-02-30BA VM230-02-30BA VM220U-02-30BA VM230U-02-30BA VM-30AB Green VM220-02-30GA VM230-02-30GA VM220U-02-30GA VM230U-02-30GA VM-30AG Yellow VM220-02-30YA VM230-02-30YA VM220U-02-30YA VM230U-02-30YA VM-30AY Push button (Mushroom) Red VM220-02-32RA VM230-02-32RA VM220U-02-32RA VM230U

Series SV

-12 400 200 70% 50% 10% 0 800 MB 80 600 Stroke mm AS5000-02 AS420-02 400 200 0 AN300 -KM12 T1209 800 MB 100 600 Stroke mm AS5000-02 AS420-02 400 200 0 800 CS1 125 600 Stroke mm AS5000-02 AS420-02 400 200 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details regarding different conditions

SV

specifications Double wiring specifications Double wiring specifications 09 02 04 02 12 02 04 02 9 stations 4 stations 12 stations 4 stations 2 stations 2 stations 2 stations 2 stations (2) (2) (2) (2) Specified layout (Up to 8 solenoids possible.)

ZP3

Form w 1 Material e r Vacuum inlet Connection thread N S U F GN GS HS 04 06 08 UM 02 10.8 7 2 1.4 KQ2H02-M5N C2 04 14.7 8 4 2.5 KQ2H04-M5N ZP3 Y B3 02 10.8 7 2 1.4 KQ2H02-M5N 04 14.7 8 4 2.5 KQ2H04-M5N 06 10 6 KQ2H06-M5N Vacuum inlet: One-touch fitting 10 13 16 Applicable tubing O.D.

ZL3-OM00801

-01-X56 (kPa ) GZ33-K1K-01-X56 (inHg/psi ) * *inHg/psi 8 ZL3 ZL3-AD3-A 19 No.ZL3-OM00801-A 8. 8.1 ZL3 12 1 22 3(0.760.84Nm) (ZL3-SE1-A) 1 2 8.2 ZL6 ZL6 P6 8.3 1) 2) 3)2 4) 5kPa 5) 6) 7) 20 No.ZL3-OM00801-A 9. 9.1 ZL3 ZL3M ZL3H [mm] 1.9 1.5 [MPa] 0.35 0.50 *1 -91 -93 [MPa] 280 [L/min(ANR)] + *2 300 [L/min(ANR)] 150 135 [MPa] 0.20.6 [] -550() 2] *2 20 [m/s 2] *3 100

7.4

) 22.8 10.5 7.4 58.5 39.7 41.8 9.2 22 28.5 22.9 20.4 10.5 8 8 3 x C2, C4, N1, N3 <1(P), 5(EA), 3(EB) port> C2: 2 One-touch fitting C4: 4 One-touch fitting N1: 1/8" One-touch fitting N3: 5/32" One-touch fitting 8.7 With plug connector/light, built-in silencer S0716S-mM(O)-m 16.7 2-Position Double/4-Position Dual 3-Port Grommet: S07 6-mG-m 2 A B C 8 2 x 3.2 5.3 2 x C2, C4, N1, N3 <4(A), 2

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

P, E port location U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) Pilot type Internal pilot External pilot Nil R Valve stations Series 10-SV1000 Series 10-SV2000 P: Flat ribbon cable 26 pins PH: Flat ribbon cable 10 pins P: Flat ribbon cable 26 pins PH: Flat ribbon cable 10 pins 02 02 02 02 2 stations 2 stations 2 stations 2 stations Double wiring

Fieldbus System

Symbol Stations Note 02 2 stations P, E port entry Double wiring Note 1) U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) 16 02 16 stations 2 stations Note 2) Specified layout: Indicate the wiring specifications on the manifold specification sheet.

Table of Contents

1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-01-01-01 ZH05DL-01-01-01 ZH07DS-01-01-01 ZH07DL-01-01-01 ZH10DS-01-01-01 ZH10DL-01-01-01 ZH13DS-01-02-02 ZH13DL-01-02-02 ZH15DS-02-03-03 ZH15DL-02-03-03 12 31.5 28.5 7.8 17 24 12 31.5 28.5 17 24 12 31.5 29.5 17 24 12 31.5 29.5 17 24 14 33.5 33 20 28 14 33.5 33 20 28 17 36.5 38.5 22 30 17 36.5 38.5 22 30 7.8 7.8 7.8 9.6 9.6 10.7 10.7 Rc 1 8 Rc

Smooth Cylinder/Low Speed Cylinder

NT-02 NT-03 NT-04 13 15.0 12.5 M8 x 1.25 5 M10 x 1.25 17 19.6 16.5 6 M14 x 1.5 22 25.4 21.0 8 2 x LD Mounting Nut Applicable pin part no. Part no.

7ND9071en

Connections 1/4 NPT (S, C1, C2), converts also ND91_ connections to1/4 NPT. RC03 H127093 Cable assembly remote mount sensor cable 30 m, angle connector D3 D3B As D3 but two pressure gauges with connections 1/4 NPT (S, C2).

Type: Pressure Monitor, Sensor, Monitor Structure: Integrated, Output Method: Analog, Pipe Port Type: [Threads] Male thread, Plumbing Thread Type: [Rc (R)] R, Pressure Resistant(kPa): 100, Operating Temperature Range(°C): 18～28, Response Differential(kPa): ±3, Pipe Connection Direction: Back, Plumbing Thread Nominal: [1/8] 1/8, Rated Pressure Range(kPa): -100 to 100, Compatible Fluid: Air