KJ

check valve Socket: Without check valve 10 0.14 9 Series KKA6 (KKA6P-04M-1 + KKA6S-04M-1) Series KKA6 (KKA6P-04M-1 + KKA6S-04M-1) 0.12 8 0.10 7 Flow rate m3/min 6 0.08 Series KKA4 (KKA4P-02M-1 + KKA4S-02M-1) Series KKA4 (KKA4P-02M-1 + KKA4S-02M-1) 5 0.06 4 3 0.04 2 0.02 1 Series KKA3 (KKA3P-01M-1 + KKA3S-01M-1) Series KKA3 (KKA3P-01M-1 + KKA3S-01M-1) 0.00 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7

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7 6 7 17 Mounting Bracket Part No.

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 7 (0.7MPa), Connection Thread: 02M (R 1/4, M5 Female), Attachment: C (Clear Cover Non Removable, Wrench Tighten), Option: X2 (Nickel Plated)

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 7 (0.7MPa), Connection Thread: 01 (R 1/8), Attachment: C2 (Clear Cover Removable, Wrench Tighten), Option: X2 (Nickel Plated)

smcmaintenancepartslist

5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

air-filter-e

Specifications 5 Model 7 Note2) FGGLD Note 1) FGGLC Note 1) FGGLB Note 1) FGGSD Note 1) FGGSC Note 1) FGGSB Note 1) Number of elements 14 65 x L250 7 Note2) 21 65 x L250 7 Note2) 28 65 x L250 Stainless steel 304 Stainless steel 304 28 65 x L250 7 Note2) 14 65 x L250 7 Note2) 21 65 x L250 7 Note2) 65 x L500 65 x L750 65 x L1000 65 x L500 65 x L750 65 x L1000 Element size Cover Case O-ring

Air Preparation Equipment

Specifications 5 Model 7 Note2) FGGLD Note 1) FGGLC Note 1) FGGLB Note 1) FGGSD Note 1) FGGSC Note 1) FGGSB Note 1) Number of elements 14 65 x L250 7 Note2) 21 65 x L250 7 Note2) 28 65 x L250 Stainless steel 304 Stainless steel 304 28 65 x L250 7 Note2) 14 65 x L250 7 Note2) 21 65 x L250 7 Note2) 65 x L500 65 x L750 65 x L1000 65 x L500 65 x L750 65 x L1000 Element size Cover Case O-ring

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 10 (1.0MPa), Connection Thread: 02M (R 1/4, M5 Female), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Industrial Filters

-10-02M (Brass at wetted parts) G1 G2 Nil S L Stainless steel 304 G46-10-02-SRB (Stainless steel at wetted parts) None (with plug) FGF Please use the applicable pressure gauge depending on the fluid used.

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 10 (1.0MPa), Connection Thread: 02M (R 1/4, M5 Female), Attachment: C (Clear Cover Non Removable, Wrench Tighten), Option: X2 (Nickel Plated)

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 2 (0.2MPa), Connection Thread: 02M (R 1/4, M5 Female), Attachment: C (Clear Cover Non Removable, Wrench Tighten), Option: X2 (Nickel Plated)

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 4 (0.4MPa), Connection Thread: 02M (R 1/4, M5 Female), Attachment: C (Clear Cover Non Removable, Wrench Tighten), Option: X2 (Nickel Plated)

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 10 (1.0MPa), Connection Thread: 02M (R 1/4, M5 Female), Attachment: None, Option: X2 (Nickel Plated)

2

v Note 7) v Note 7) v Note 7) v Note 7) v Note 7) Note 1) Option is not assembled and supplied loose at the time of shipment.

Vacuum System Peripherals:

Air operated Nil Symbol Order of manifold (Station) 2 1 3 4 5 6 7 8 Applicable to only plug connector. Attached connector assembly with rectifier.

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 2 (0.2MPa), Connection Thread: 01 (R 1/8), Attachment: C2 (Clear Cover Removable, Wrench Tighten), Option: X2 (Nickel Plated)

CRB2/CRBU2/CRB1

L1 3 to 8 Y1 10 Y = 10 6(9Y) to (Y1.5) 3 to 14 9(14X) to (X1) X1 3 to 9 Y1.5 15 L2 = L4 = L1 = 15 7(10Y) to (Y1.5) 3 to 18 10(18X) to (X1.5) X1.5 3 to 10 Y1.5 20 L3 = 20 8(13Y) to (Y2) 3 to 20 10(20X) to (X1.5) X1.5 5 to 13 Y2 30 X = 30 9(15Y) to (Y4.5) 5 to 22 12(22X) to (X2) X2 7 to 15 Y4.5 40 E4 = E2 = Symbol: A15 Symbol: A14 Applicable to single vane type only A special end is machined

Compact 5-Port Solenoid Valve

PROFINET 3A M12 connector (4-pin, Socket, D-coded): 2 pcs. 7/8 inch connector (5-pin, Plug): 1 pc. 7/8 inch connector (5-pin, Socket): 1 pc.

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2 $3 #3 #5 #6 @0 #4 #7 !7 #2 @6 @7 Component Parts Note No.

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7 !8 !