smcmaintenancepartslist

Model Option Bracket assembly Note 1) AR10 AR25(K) AR20(K) AR30(K) AR40(K) AR40(K)-06 AR50(K) AR60(K) AR30P-270AS AR30P-260S AR40P-270AS AR40P-260S AR50P-270AS Note 2) AR20P-270AS AR20P-260S AR10P-270AS AR10P-260S G27-10-R1 AR25P-270AS AR25P-260S G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L Note 3) Note 3) Set nut G46-10-02 G46-2-02 G46-10-02-L G46-2-02-L GC3-10AS [GC3P-010AS (Pressure gauge

air-filter-e

Four hexagonal bolts are used for 1 filter. 261 Industrial Filter Series FGG P.466 1 Replacement Procedure is Replacement Parts and Seal List A How to Order FGG S B 20 B N 002 Symbol Option Pressure gauge type None (with plug) G46-10-02M (Brass at wetted parts) G46-10-02X3 (Stainless steel at wetted parts) Material Nil G1 G2 Symbol O-ring NBR FKM Body Stainless steel 304 Stainless steel 304

Air Preparation Equipment

Four hexagonal bolts are used for 1 filter. 261 Industrial Filter Series FGG P.466 1 Replacement Procedure is Replacement Parts and Seal List A How to Order FGG S B 20 B N 002 Symbol Option Pressure gauge type None (with plug) G46-10-02M (Brass at wetted parts) G46-10-02X3 (Stainless steel at wetted parts) Material Nil G1 G2 Symbol O-ring NBR FKM Body Stainless steel 304 Stainless steel 304

Precision Clean Regulator

PVQ IN-233-863+G46--01M-SRB G46--01-SRB VY1 VBA VBAT Specifications AP100 Connection port size M5, Rc 1/8 Fluid Air, N2, CO2, Ar Proof pressure MPa 1.5 Maximum operating pressure MPa 1.0 Low pressure type Regulating pressure 0.005 to 0.2 High pressure type range MPa 0.01 to 0.4 Ambient and fluid temperature (C) 0 to 60 Fluid consumption L/min (ANR) Note) 0.5 or less Sensitivity 0.3% of full

Vacuum System Peripherals:

8, R 10, R 10, R 10, R 6 8 10 4 6 KM11 6, 10 One-touch fitting One-touch fitting 1 4 3 8 KM12 6, 10 One-touch fitting Rc KM13 3 One-touch fitting One-touch fitting KM11 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 4 One-touch fitting R male thread KM12 KM14 3 One-touch fitting KM15 KM15 3 One-touch fitting One-touch fitting rod KM16 KM14 KM16 One-touch fitting 3 One-touch fitting KM13 Miniature fittings

Precision Clean Regulator SRP Series

PVQ IN-233-863+G46--01M-SRB G46--01-SRB VY1 VBA VBAT Specifications AP100 M5, Rc 1/8 Connection port size Air, N2, CO2, Ar Fluid 1.5 Proof pressure MPa 1.0 Maximum operating pressure MPa Low pressure type 0.005 to 0.2 Regulating pressure High pressure type 0.01 to 0.4 range MPa Ambient and fluid temperature (C) 0 to 60 Fluid consumption L/min (ANR) Note) 0.5 or less Sensitivity 0.3% of full

No more element replacement!

(Stroke) IN OUT (125) (102) C B A Rc1 DRAIN 195 (270) Dimensions (mm) A B C D Model Bore size (Nominal size B) FN11l1 FN11l2 610 (730) (844) 20 Rc1 860 (1000) (1134) 40 9 Low Maintenance Filter Series FN1/FN4 Dimensions: FN4 330 0 90 270 225 180 Pressure gauge port size Rc1/4 G46-15-02M Head end cylinder port Rc3/8 Rod end cylinder port Rc3/8 (Manual lock release) Dustproof cover Unlocking

Water Regulator

Model Pressure range *1 Indication unit Connection thread Note MPa Port size 01 Rc1/8 02 Rc1/4 R1/8 R1/4 G46-7-02-SRB 0 to 0.7 R1/4 G46-10-02-SRB 0 to 1.0 G46-4-01 to 02-SRB 0 to 0.4 MPa Set pressure range: 0.05 to 0.69 MPa 02 WR110 X215 *1: Do not apply more pressure than the max. pressure displayed. It may cause a malfunction.

Water Regulator

Model Pressure range *1 Indication unit Connection thread Note MPa Port size 01 Rc1/8 02 Rc1/4 R1/8 R1/4 G46-7-02-SRB 0 to 0.7 R1/4 G46-10-02-SRB 0 to 1.0 G46-4-01 to 02-SRB 0 to 0.4 MPa Set pressure range: 0.05 to 0.69 MPa 02 WR110 X215 *1: Do not apply more pressure than the max. pressure displayed. It may cause a malfunction.

Clean Air Module

-4-01-SRB 2-color display digital pressure switch 10-ISE series 332 Applications Applications Air-blow HAA HAW AT IDF IDU IDF FS N2 blow to prevent lead frame oxidation, N2 blow to prevent detection camera blur Prevents traces of water droplets.

Material: S (Body: Stainless Steel 304; Gasket/O-ring: NBR), Element Length: C [ℓ750 (ℓ250 x 3)], Port Size R: 10 (1), Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 20 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only, Pressure Gauge: G1 [G46-10-02M (Brass at Wetted Parts)]

Material: S (Body: Stainless Steel 304; Gasket/O-ring: NBR), Element Length: C [ℓ750 (ℓ250 x 3)], Port Size R: 20 (2), Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 1 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only, Pressure Gauge: G1 [G46-10-02M (Brass at Wetted Parts)]

Material: S (Body: Stainless Steel 304; Gasket/O-ring: NBR), Element Length: C [ℓ750 (ℓ250 x 3)], Port Size R: 20 (2), Element Type: H [Fiber (Honeycomb), Cotton Material], Nominal Filtration Accuracy: 50 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only, Pressure Gauge: G1 [G46-10-02M (Brass at Wetted Parts)]

Material: S (Body: Stainless Steel 304; O-ring: NBR), Element Length: C [ℓ750 (ℓ250 x 3)], Element Type: B (Sintered Metal, Bronze Material), Nominal Filtration Accuracy: 1 μm, Element Seal Material: N (NBR), Option: G1 (G46-10-02M, Brass at Wetted Parts)

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 10 (1.0MPa), Connection Thread: 02M (R 1/4, M5 Female), Attachment: C (Clear Cover Non Removable, Wrench Tighten), Option: X2 (Nickel Plated)

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 10 (1.0MPa), Connection Thread: 02M (R 1/4, M5 Female), Attachment: C (Clear Cover Non Removable, Wrench Tighten)

Material: Body: Stainless Steel 304; Gasket/O-ring: NBR, Element Length: C [ℓ750 (ℓ250 x 3)], Port Size R: 2, Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 1 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only, Pressure Gauge: G1 [G46-10-02M (Brass at Wetted Parts)]

Material: Body: Stainless Steel 304; Gasket/O-ring: NBR, Element Length: C [ℓ750 (ℓ250 x 3)], Port Size R: 2, Element Type: H [Fiber (Honeycomb), Cotton Material], Nominal Filtration Accuracy: 50 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only, Pressure Gauge: G1 [G46-10-02M (Brass at Wetted Parts)]

Material: Body: Stainless Steel 304; O-ring: NBR, Element Length: C [ℓ750 (ℓ250 x 3)], Element Type: Sintered Metal, Bronze Material, Nominal Filtration Accuracy: 1 μm, Element Seal Material: NBR, Option: G46-10-02M, Brass at Wetted Parts

Display Pressure: 2 (0.2MPa), Connection Thread: 02M (R 1/4, M5 Female), Grade: SRB (General Degreasing, Production Line), Attachment: C (Clear Cover Non Removable, Wrench Tighten)