Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 10 (1.0MPa), Connection Thread: 02M (R 1/4, M5 Female), Attachment: C2 (Clear Cover Removable, Wrench Tighten), Option: X2 (Nickel Plated)

Clean Regulator

Refer to back page 50 for Safety Instructions and pages 387 to 391 for Precautions on every series. 0 to 0.2 G46-2-02-SRB G46-4-02-SRA 0 to 0.4 G46-4-02-SRB MPa G46-7-02-SRA Caution Selection 0 to 0.7 G46-7-02-SRB G46-10-02-SRA 0 to 1.0 1) Avoid use in locations with strong pressure pulsation or vibration.

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 7 (0.7MPa), Connection Thread: 02M (R 1/4, M5 Female), Attachment: C2 (Clear Cover Removable, Wrench Tighten), Option: X2 (Nickel Plated)

smcmaintenancepartslist

Model Option Bracket assembly Note 1) AR10 AR25(K) AR20(K) AR30(K) AR40(K) AR40(K)-06 AR50(K) AR60(K) AR30P-270AS AR30P-260S AR40P-270AS AR40P-260S AR50P-270AS Note 2) AR20P-270AS AR20P-260S AR10P-270AS AR10P-260S G27-10-R1 AR25P-270AS AR25P-260S G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L Note 3) Note 3) Set nut G46-10-02 G46-2-02 G46-10-02-L G46-2-02-L GC3-10AS [GC3P-010AS (Pressure gauge

Table of Contents

Model Description AC10B G27-10-R1 G27-10-R1 (3) AD17 Y100 AC25B G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD38N (7) AC30B G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD38N (7) AC40B G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48N (7) AC40B-06 G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48N (7) AC50B G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48N (7) AC55B G46-10-02 GC3-10AS G46-2-02 GC3-2AS

air-filter-e

Four hexagonal bolts are used for 1 filter. 261 Industrial Filter Series FGG P.466 1 Replacement Procedure is Replacement Parts and Seal List A How to Order FGG S B 20 B N 002 Symbol Option Pressure gauge type None (with plug) G46-10-02M (Brass at wetted parts) G46-10-02X3 (Stainless steel at wetted parts) Material Nil G1 G2 Symbol O-ring NBR FKM Body Stainless steel 304 Stainless steel 304

Air Preparation Equipment

Four hexagonal bolts are used for 1 filter. 261 Industrial Filter Series FGG P.466 1 Replacement Procedure is Replacement Parts and Seal List A How to Order FGG S B 20 B N 002 Symbol Option Pressure gauge type None (with plug) G46-10-02M (Brass at wetted parts) G46-10-02X3 (Stainless steel at wetted parts) Material Nil G1 G2 Symbol O-ring NBR FKM Body Stainless steel 304 Stainless steel 304

Industrial Filters

-10-02M (Brass at wetted parts) Material G1 G2 Nil O-ring NBR FKM Symbol Body Stainless steel 304 Stainless steel 304 G46-10-02-SRB (Stainless steel at wetted parts) None (with plug) S L Please use the applicable pressure gauge depending on the fluid used.

Table of Contents

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

KJ

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

2

Model Section Type Round type Standard G27-10-R1 G36-10-01 G46-10-01 0.02 to 0.2 MPa setting G27-10-R1 G36-4-01 G46-4-01 Round type (with color zone) Standard G36-10-01-L G46-10-01-L 0.02 to 0.2 MPa setting G36-4-01-L G46-4-01-L Square embedded type Note 2) Standard GC3-10AS [GC3P-010AS (Pressure gauge cover only)] 0.02 to 0.2 MPa setting GC3-4AS [GC3P-010AS (Pressure gauge cover only

Vacuum System Peripherals:

8, R 10, R 10, R 10, R 6 8 10 4 6 KM11 6, 10 One-touch fitting One-touch fitting 1 4 3 8 KM12 6, 10 One-touch fitting Rc KM13 3 One-touch fitting One-touch fitting KM11 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 4 One-touch fitting R male thread KM12 KM14 3 One-touch fitting KM15 KM15 3 One-touch fitting One-touch fitting rod KM16 KM14 KM16 One-touch fitting 3 One-touch fitting KM13 Miniature fittings

No more element replacement!

How to Order 0 N FNR10 10 Size Port size Symbol 0 1 1.1 l Symbol Capacity Applicable model Port size 10 Rc1 FN11l1 FN11l2 1.8 l Seal material Symbol N V NBR Material FKM Specifications FNR100V-10 FNR101N-10 FNR101V-10 Model FNR100N-10 1.1 l Tank capacity 1.8 l Port size Rc1 Bowl & Cover Stainless steel 304 Material O-ring FKM FKM NBR NBR Weight 1.5 kg 1.9 kg FN11l1l (Element l 250) FN11l2l

Table of Contents

9 10 10 11 D-C7 D-C80 10 15 50 50 + 45 (n2) D-B5/B64 8 10 13 4 8.5 9 14 4.5 9 10 14 5 10 10 14 6 9.5 11 17 6.5 10.5 11 16 6.5 10.5 11 18 7 11 9 10 9 10 10 11 11 11 9 10 10 11 RZQ 15 + 45 ( ) n2 2 D-H7 D-H7W D-H7BAL D-H7NF D-B59W 13 (n = 2, 4, 6, ) D-H7/H7NF/H7W/H7BAL 4 10 15 60 60 + 45 (n2) MI W S D-H7C 7 D-A3/A44 D-G39/K39 8 CEP1 D-C73C D-C80C D-H7C 10 15 65 9 9 9 15 + 50 ( ) n2 2 65

Display Pressure: 10 (1.0MPa), Connection Thread: 02M (R 1/4, M5 Female), Grade: SRA (Precision Cleaning, Clean Room M5.5), Attachment: C (Clear Cover Non Removable, Wrench Tighten)

Table of Contents

Set the mounting band perpendicularly to cylinder tube. 20 50 63 80 100 25 32 40 D-B7/B80 8 10 9 10 10 11 D-B73C/B80C D-C7/C80 8 10 9 10 10 11 D-C73C/C80C 8 10 9 10 10 11 D-B5/B64 11 11 MX Mounting correctly Mounting incorrectly 13 13 14 14 14 17 D-B59W 18 16 D-G79/K79 8 10 9 10 10 11 Auto Switch Mounting Bracket Part No.

Table of Contents

Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 Operation 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Caution

Display Pressure: 10 (1.0MPa), Connection Thread: 01 (R 1/8), Grade: SRA (Precision Cleaning, Clean Room M5.5), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Material: S (Body: Stainless Steel 304; Gasket/O-ring: NBR), Element Length: A (ℓ250), Port Size R: 10 (1), Element Type: H [Fiber (Honeycomb), Cotton Material], Nominal Filtration Accuracy: 10 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only, Pressure Gauge: G1 [G46-10-02M (Brass at Wetted Parts)]

Material: S (Body: Stainless Steel 304; Gasket/O-ring: NBR), Element Length: A (ℓ250), Port Size R: 10 (1), Element Type: P (Paper, Cotton Material), Nominal Filtration Accuracy: 10 μm, Element Seal Material: N (NBR), Pressure Gauge: G1 [G46-10-02M (Brass at Wetted Parts)]