Water Regulator

Model Pressure range *1 Indication unit Connection thread Note MPa Port size 01 Rc1/8 02 Rc1/4 R1/8 R1/4 G46-7-02-SRB 0 to 0.7 R1/4 G46-10-02-SRB 0 to 1.0 G46-4-01 to 02-SRB 0 to 0.4 MPa Set pressure range: 0.05 to 0.69 MPa 02 WR110 X215 *1: Do not apply more pressure than the max. pressure displayed. It may cause a malfunction.

Precision Clean Regulator

PVQ IN-233-863+G46--01M-SRB G46--01-SRB VY1 VBA VBAT Specifications AP100 Connection port size M5, Rc 1/8 Fluid Air, N2, CO2, Ar Proof pressure MPa 1.5 Maximum operating pressure MPa 1.0 Low pressure type Regulating pressure 0.005 to 0.2 High pressure type range MPa 0.01 to 0.4 Ambient and fluid temperature (C) 0 to 60 Fluid consumption L/min (ANR) Note) 0.5 or less Sensitivity 0.3% of full

2

Model Section Type Round type Standard G27-10-R1 G36-10-01 G46-10-01 0.02 to 0.2 MPa setting G27-10-R1 G36-4-01 G46-4-01 Round type (with color zone) Standard G36-10-01-L G46-10-01-L 0.02 to 0.2 MPa setting G36-4-01-L G46-4-01-L Square embedded type Note 2) Standard GC3-10AS [GC3P-010AS (Pressure gauge cover only)] 0.02 to 0.2 MPa setting GC3-4AS [GC3P-010AS (Pressure gauge cover only

Precision Clean Regulator SRP Series

PVQ IN-233-863+G46--01M-SRB G46--01-SRB VY1 VBA VBAT Specifications AP100 M5, Rc 1/8 Connection port size Air, N2, CO2, Ar Fluid 1.5 Proof pressure MPa 1.0 Maximum operating pressure MPa Low pressure type 0.005 to 0.2 Regulating pressure High pressure type 0.01 to 0.4 range MPa Ambient and fluid temperature (C) 0 to 60 Fluid consumption L/min (ANR) Note) 0.5 or less Sensitivity 0.3% of full

Clean Air Module

-4-01-SRB 2-color display digital pressure switch 10-ISE series 332 Applications Applications Air-blow HAA HAW AT IDF IDU IDF FS N2 blow to prevent lead frame oxidation, N2 blow to prevent detection camera blur Prevents traces of water droplets.

Industrial Filters

-10-02M (Brass at wetted parts) Material G1 G2 Nil O-ring NBR FKM Symbol Body Stainless steel 304 Stainless steel 304 G46-10-02-SRB (Stainless steel at wetted parts) None (with plug) S L Please use the applicable pressure gauge depending on the fluid used.

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 10 (1.0MPa), Connection Thread: 01 (R 1/8), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Display Pressure: 2 (0.2MPa), Connection Thread: 01 (R 1/8), Grade: SRB (General Degreasing, Production Line), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Display Pressure: 4 (0.4MPa), Connection Thread: 01 (R 1/8), Grade: SRB (General Degreasing, Production Line), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Display Pressure: 7 (0.7MPa), Connection Thread: 01 (R 1/8), Grade: SRB (General Degreasing, Production Line), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 2 (0.2MPa), Connection Thread: 01 (R 1/8), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 4 (0.4MPa), Connection Thread: 01 (R 1/8), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 7 (0.7MPa), Connection Thread: 01 (R 1/8), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 2 (0.2MPa), Connection Thread: 01 (R 1/8), Attachment: C2 (Clear Cover Removable, Wrench Tighten), Option: X2 (Nickel Plated)

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 7 (0.7MPa), Connection Thread: 01 (R 1/8), Attachment: C2 (Clear Cover Removable, Wrench Tighten), Option: X2 (Nickel Plated)

Operating Pressure(MPa): -, Drain Outlet: -, Pressure Unit: Name plate and bowl caution plate units: psi, ºF, Custom-made Specifications: None, Nominal of pipe flange: -, Element length: 500, Element type: Fiber (Honeycomb), Element materials: Polypropylene, Element seal materials: Non asbestos, Nominal filtration accuracy: -, Pressure gauge accessories: G46-10-02-SRB (liquid contact part

Operating Pressure(MPa): -, Drain Outlet: -, Pressure Unit: Name plate and bowl caution plate units: psi, ºF, Custom-made Specifications: None, Nominal of pipe flange: -, Element length: 750, Element type: Fiber, Element materials: Polypropylene, Element seal materials: Non asbestos, Nominal filtration accuracy: -, Pressure gauge accessories: G46-10-02-SRB (liquid contact part: SUS), Compatible

Operating Pressure(MPa): -, Drain Outlet: Drain guide 1/8, Pressure Unit: Name plate and bowl caution plate units: psi, ºF, Custom-made Specifications: None, Nominal of pipe flange: -, Element length: 500, Element type: Fiber, Element materials: Polypropylene, Element seal materials: Non asbestos, Nominal filtration accuracy: -, Pressure gauge accessories: G46-10-02-SRB (liquid contact part

Operating Pressure(MPa): -, Drain Outlet: With drain cock, Pressure Unit: Name plate and bowl caution plate units: psi, ºF, Custom-made Specifications: None, Nominal of pipe flange: -, Element length: 250, Element type: Fiber, Element materials: Polypropylene, Element seal materials: Non asbestos, Nominal filtration accuracy: -, Pressure gauge accessories: G46-10-02-SRB (liquid contact part

Operating Pressure(MPa): -, Drain Outlet: With drain cock, Pressure Unit: Name plate and bowl caution plate units: psi, ºF, Custom-made Specifications: None, Nominal of pipe flange: -, Element length: 1,000, Element type: Fiber (Honeycomb), Element materials: Polypropylene, Element seal materials: Non asbestos, Nominal filtration accuracy: -, Pressure gauge accessories: G46-10-02-SRB (liquid