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w No. q w e r t y u i o !

VQ7-6/7-8

How to Find the Flow Rate (at air temperature of 20C) Subsonic flow when P1 + 0.1013 < 1.89 (P2 + 0.1013) Q = 226S P(P2 + 0.1013) Sonic flow when P1 + 0.1013 1.89 (P2 + 0.1013) Q = 113S (P1 + 0.1013) Q: Air flow rate [l/min (ANR)] S: Effective area (mm) P: Differential pressure (P1-P2) [MPa] P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] Correction for different air temperatures

Applicable Tubing: ø 2 Connection Thread: M3, M5 Made to Order (Refer to page 193 for details.) Miniature Fittings M Series

(O.D.) 3.2 4 2 / 1.2 M-32F-2 M-04F-2 17.7 18 13.7 14 7.5 8.5 2.4 2.9 4 0.9 12.7 2.5 q w e r M2 E Component Parts Material C3604 C3604 NBR No. 1 2 3 4 Description Sleeve Body Seal Cassette Note Electroless nickel plated Electroless nickel plated D C POM, Stainless steel 304 Applicable tubing M1 Applicable tubing B A Plug-in Reducer: M-32R-2, M-04R-2 Applicable tubing O.D. / I.D.

Table of Contents

0 t t r i w e r i u w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!

VS7-6

VQC VS7-6-FHG--Q VS7-6-FJG--Q VS7-6-FPG--Q SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7 ( ): In case of direct manual override style. 1.19-5 VS7-6 With Sub-plate/Dimensions VS7-6-FG-SPort size of sub-plate -Q VS7-6-FG-DPort size of sub-plate -Q VS7-6-FHGPort size of sub-plate -Q VS7-6-FJGPort size of sub-plate -Q VS7-6-FPGPort size of sub-plate -Q ( ): In case of direct manual override style. 1.19

Vacuum Ejector Series ZM

ZM131H-K5LZ (-Q) ZM051H-K5LZ-E15 (-Q) ZM131H-K5LZ-E15 (-Q) ZM071H-K5LZ (-Q) ZM131M-K5LZ (-Q) ZM071H-K5LZ-E15 (-Q) ZM131M-K5LZ-E15 (-Q) ZM101H-K5LZ (-Q) ZM101H-K5LZ-E15 (-Q) 987 Series ZM Model Nozzle dia.

VQ7-6/7-8

0 t t r i w e r i u w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!

VQ7-6/7-8

0 t t r i u w y e q r i w e q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!0 t r i w y e q o Replacement Parts (For valve) Description VQ7-8-FG-SVQ7-8-FG-DVQ7-8-FPG-DVQ7-8-FG-S-R VQ7-8-FG-D-R VQ7-8--D-R VQ7-8--DNumber q w e r t y u i o !

T

Tube TKS q Socket adapter Hook w 2. Rotate the TKS in the arrow direction while pushing it. Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3. Strip the outer layer until the cut end of the tubing strikes the end surface inside the stripper.

Area: Japan, Asia, Australia, Stations: 7 Stations, AB Port: 04R (1/2, Right), Air Release Valve: w/o Air Release Valve, PR Port: 04D (1/2, Bottom), Silencer: None, Voltage: w/o Air Release Valve, Q: Q (CE Approval)

Area: Japan, Asia, Australia, Stations: 2 Stations, AB Port: 04R (1/2, Right), Air Release Valve: E (Air Release Valve), PR Port: 04U (1/2, Top), Silencer: None, Voltage: 3 (24VDC), Q: Q (CE Approval)

Miniature Tubing & Miniature Fittings

(mm) Fitting size D 3.2 4 Weight g B C E F A Model M-32R-2 M-04R-2 36 36.5 31 .5 32 0.9 0.7 0.8 2 x 1 .2 20.5 4 Parts list Note Electroless nickel plated Electroless nickel plated Material Brass Brass PP No. 1 2 3 Description Sleeve Studded body Stem Applicable fitting size D Applicable tubing 3 2 1 C F D E B A 3 World Wide QS\E Support...

Miniature Tubing & Miniature Fittings Series TU/M

(mm) Fitting size D 3.2 4 Weight g B C E F A Model M-32R-2 M-04R-2 36 36.5 31 .5 32 0.9 0.7 0.8 2 x 1 .2 20.5 4 Parts list Note Electroless nickel plated Electroless nickel plated Material Brass Brass PP No. 1 2 3 Description Sleeve Studded body Stem Applicable fitting size D Applicable tubing 3 2 1 C F D E B A 3

MFLD, ISO SIZE 2, 4/5 PORT SOLENOID VALVE

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

F 4 T 10 9 Silencer box 2(B), 4(A) port size Air release valve None With silencer box Nil 3/8 (Right side) 1/2 (Right side) 3/8 (Left side) 1/2 (Left side) 3/8 (Bottom) 1/2 (Bottom) Mixed 03R None With air release valve Nil SB 04R E 03L Thread type 04L 03Y Rc G NPTF Nil 04Y F 1(P), 3(R2), 5(R1) port size T 1/2 (Down side) 1/2 (Up side) 1/2 (Both sides) 3/4 (Down side) 3/4 (Up side) 3/4 (

1/2andquot;ASP630F-04R 1/2Rc 1/4----------------

1/2andquot;ASP630F-04R 1/2Rc 1/4----------------

1/2andquot;ASP630F-04R 1/2Rc 1/4----------------

1/2andquot;ASP630F-04R 1/2Rc 1/4----------------

Stations: 3 Stations, AB Port: 04R (1/2, Right), Thread: T (NPTF), Control: None, PR Port: 04D (1/2, Bottom), PR Thread: T (NPTF)