Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Dimensions [mm] Model L A B n D E F G H Without lock With lock LEKFS25Em-100m 335.5 380.5 106 210 4 100 45 LEKFS25Em-200m 435.5 480.5 206 310 6 2 240 220 LEKFS25Em-300m 535.5 580.5 306 410 8 3 360 340 LEKFS25Em-400m 635.5 680.5 406 510 8 3 360 340 LEKFS25Em-500m 735.5 780.5 506 610 10 4 480 460 35 14 LEKFS Series Battery-less Absolute (Step Motor 24 VDC) Dimensions: In-line Motor LEKFS32E

MGP

/s 20 l = 100mm V = 400m/s MGPL12 to 25 5 MGPL12 to 25 5 25 25 25 25 25 25 Load weight m (kg) Load weight m (kg) 20 20 20 20 20 20 16 16 16 16 16 16 1 1 12 12 12 12 12 12 0.5 10 20 30 31 50 100 101 300 200 0.5 10 20 30 31 50 100 101 300 200 Stroke (mm) Stroke (mm) MGPL32 to 63 MGPL32 to 63 50 50 Load weight m (kg) Load weight m (kg) 63 63 50, 63 50 50 50, 63 50, 63 10 10 40 40 40 50, 63 40

MLGP

/s 32 l2 = 100mm, V = 400m/s MLGPL20, 25 MLGPL20, 25 4 4 25 25 25 25 25 25 Load weight m (kg) Load weight m (kg) Load weight m (kg) 20 20 20 20 20 20 1 10 30 31 100 101 1 10 30 31 100 101 200 200 300 300 Stroke (mm) Stroke (mm) MLGPL32 to 63 MLGPL32 to 63 20 20 63 50 50, 63 50, 63 Load weight m (kg) 50, 63 10 10 50, 63 40 40 40 40 50, 63 40 40 32 32 32 32 32 32 4 10 50 51 100 101 4 10 50

MLGP

/s 32 l2 = 100mm, V = 400m/s MLGPL20, 25 MLGPL20, 25 4 4 25 25 25 25 25 25 Load weight m (kg) Load weight m (kg) Load weight m (kg) 20 20 20 20 20 20 1 10 30 31 100 101 1 10 30 31 100 101 200 200 300 300 Stroke (mm) Stroke (mm) MLGPL32 to 63 MLGPL32 to 63 20 20 63 50 50, 63 50, 63 Load weight m (kg) 50, 63 10 10 50, 63 40 40 40 40 50, 63 40 40 32 32 32 32 32 32 4 10 50 51 100 101 4 10 50

BAR NOZZLE, 400M, OTHERS, IZS/IZF IONIZER, 22, IZSE30 NO SIZE RATING

BENDER TUBE NOZZLE, 400M, OTHERS, IZS/IZF IONIZER, 22, IZSE30 NO SIZE RATING

LONG NOZZLE, 400M, OTHERS, IZS/IZF IONIZER, 22, IZSE30 NO SIZE RATING

AC Servo Motor Driver (CC-Link Type)

Encoding system MRZI Transmission path format Bus format (conforming to EIA RS485) CC-Link Error control system CRC (X16+X12+X5+1) Connection cable CC-Link Ver.1.10-compliant cable (Shielded 3-core twisted pair cable) Transmission format Conforming to HDLC Remote station number 1 to 64 Communication speed 156Kbps 625Kbps 2.5Mbps 5Mbps 10Mbps (Note) Maximum overall cable length 1200m 900m 400m

AC Servo Motor Driver (CC-Link Type)

Encoding system MRZI Transmission path format Bus format (conforming to EIA RS485) CC-Link Error control system CRC (X16+X12+X5+1) Connection cable CC-Link Ver.1.10-compliant cable (Shielded 3-core twisted pair cable) Transmission format Conforming to HDLC Remote station number 1 to 64 Communication speed 156Kbps 625Kbps 2.5Mbps 5Mbps 10Mbps (Note) Maximum overall cable length 1200m 900m 400m

CC-Link-E

Baud rat e M axi m um ext ended cabl e l engt h 10M bps 100m 5M bps 160m 2. 5M bps 400m 625Kbps 900m 156Kbps 1200m I n t he abovem ent i oned, al l equi pm ent and cabl es are goods f or Ver. 1. 10. Pl ease i nqui re of t he CCLi nk soci et y about ot her connect i on and det ai l s.

Size: 25, Motor Mounting Position: R (Right Side Parallel), Motor Type: H (Battery-less Absolute, Step Motor 24 VDC), Lead, mm: A (Size 16: 10; Size 25: 12; Size 32: 16), Stroke: 400mm, Motor Option: without Option, Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: Ends Tapped, Body Bottom Tapped, Controller Position: B (Integrated Controller), Parallel Input: 5 (

ZP

Symbol Thread size ZP2-T3507W-B5 ZP2-T4010W-B5 ZP2-T5010W-B5 ZP2-T6010W-B5 ZP2-T4020W-B5 ZP2-T5020W-B5 ZP2-T6020W-B5 ZP2-T8020W-B5 ZP2-T4030W-B5 ZP2-T5030W-B5 ZP2-T6030W-B5 ZP2-T8030W-B5 T B5 M5 x 0.8 ZP2A-001 Pad material Pad size Symbol Material NBR Silicone rubber Urethane rubber FKM Conductive NBR Conductive silicone rubber Symbol Size 3.5 x 7 4 x 10 5 x 10 6 x 10 4 x 20 5 x 20 Symbol

ZP

Symbol Thread size ZP2-T3507W-B5 ZP2-T4010W-B5 ZP2-T5010W-B5 ZP2-T6010W-B5 ZP2-T4020W-B5 ZP2-T5020W-B5 ZP2-T6020W-B5 ZP2-T8020W-B5 ZP2-T4030W-B5 ZP2-T5030W-B5 ZP2-T6030W-B5 ZP2-T8030W-B5 T B5 M5 x 0.8 ZP2A-001 Pad material Pad size Symbol Material NBR Silicone rubber Urethane rubber FKM Conductive NBR Conductive silicone rubber Symbol Size 3.5 x 7 4 x 10 5 x 10 6 x 10 4 x 20 5 x 20 Symbol

ZP

ZP3B-T2AJ -B5 ZP3B-T2AK -B5 ZP3B-T2AJ3-B5 ZP3B-T2AJ6-B5 ZP3B-T2AJ10-B5 ZP3B-T2AK3-B5 ZP3B-T2AK6-B5 ZP3B-T2AK10-B5 ZP3-04UM ZP3-06UM ZP3-08UM ZP3-04B ZP3-06B ZP3-08B 7.1 8.3 10.2 7.0 8.3 10.2 7 M5 x 0.8 Width across flat 6 4 Width across flat 10 B 2 2 D A 1.4 M8 x 0.75 Width across flat 7 Dimensions (per stroke) A 24.5 31 41 B 11 14.5 20.5 D Model 3.5 ZP3B-T2A3-B5 ZP3B-T2A6-B5 ZP3B-T2A10-B5

Vacuum Pad

ZP3B-T2AJ -B5 ZP3B-T2AK -B5 ZP3B-T2AJ3-B5 ZP3B-T2AJ6-B5 ZP3B-T2AJ10-B5 ZP3B-T2AK3-B5 ZP3B-T2AK6-B5 ZP3B-T2AK10-B5 ZP3-04UM ZP3-06UM ZP3-08UM ZP3-04B ZP3-06B ZP3-08B 7.1 8.3 10.2 7.0 8.3 10.2 7 M5 x 0.8 Width across flat 6 4 Width across flat 10 B 2 2 D A 1.4 M8 x 0.75 Width across flat 7 Dimensions (per stroke) A 24.5 31 41 B 11 14.5 20.5 D Model 3.5 ZP3B-T2A3-B5 ZP3B-T2A6-B5 ZP3B-T2A10-B5

Vacuum Pad

ZP3B-T2AJ -B5 ZP3B-T2AK -B5 ZP3B-T2AJ3-B5 ZP3B-T2AJ6-B5 ZP3B-T2AJ10-B5 ZP3B-T2AK3-B5 ZP3B-T2AK6-B5 ZP3B-T2AK10-B5 ZP3-04UM ZP3-06UM ZP3-08UM ZP3-04B ZP3-06B ZP3-08B 7.1 8.3 10.2 7.0 8.3 10.2 7 M5 x 0.8 Width across flat 6 4 Width across flat 10 B 2 2 D A 1.4 M8 x 0.75 Width across flat 7 Dimensions (per stroke) A 24.5 31 41 B 11 14.5 20.5 D Model 3.5 ZP3B-T2A3-B5 ZP3B-T2A6-B5 ZP3B-T2A10-B5

Vacuum Pad

ZP3B-T2AJ -B5 ZP3B-T2AK -B5 ZP3B-T2AJ3-B5 ZP3B-T2AJ6-B5 ZP3B-T2AJ10-B5 ZP3B-T2AK3-B5 ZP3B-T2AK6-B5 ZP3B-T2AK10-B5 ZP3-04UM ZP3-06UM ZP3-08UM ZP3-04B ZP3-06B ZP3-08B 7.1 8.3 10.2 7.0 8.3 10.2 7 M5 x 0.8 Width across flat 6 4 Width across flat 10 B 2 2 D A 1.4 M8 x 0.75 Width across flat 7 Dimensions (per stroke) A 24.5 31 41 B 11 14.5 20.5 D Model 3.5 ZP3B-T2A3-B5 ZP3B-T2A6-B5 ZP3B-T2A10-B5

ZP

-(A8/A10/A14) ZPTmFm-(B5/B8/B01/N01/T01) u y y t t e e r r Component Parts No.

ZP

Symbol Thread size ZP2-T3507W-B5 ZP2-T4010W-B5 ZP2-T5010W-B5 ZP2-T6010W-B5 ZP2-T4020W-B5 ZP2-T5020W-B5 ZP2-T6020W-B5 ZP2-T8020W-B5 ZP2-T4030W-B5 ZP2-T5030W-B5 ZP2-T6030W-B5 ZP2-T8030W-B5 T B5 M5 x 0.8 ZP2A-001 Pad material Pad size Symbol Material NBR Silicone rubber Urethane rubber FKM Conductive NBR Conductive silicone rubber Symbol Size 3.5 x 7 4 x 10 5 x 10 6 x 10 4 x 20 5 x 20 Symbol

Vacuum Pad

Symbol Thread size ZP2-T3507W-B5 ZP2-T4010W-B5 ZP2-T5010W-B5 ZP2-T6010W-B5 ZP2-T4020W-B5 ZP2-T5020W-B5 ZP2-T6020W-B5 ZP2-T8020W-B5 ZP2-T4030W-B5 ZP2-T5030W-B5 ZP2-T6030W-B5 ZP2-T8030W-B5 T B5 M5 x 0.8 ZP2A-001 Pad material Pad size Symbol Material NBR Silicone rubber Urethane rubber FKM Conductive NBR Conductive silicone rubber Symbol Size 3.5 x 7 4 x 10 5 x 10 6 x 10 4 x 20 5 x 20 Symbol