Basic type / Direct mount type Series CY3B/CY3R

Cushion Stroke Stroke (mm) 25 30 Model CYP15 CYP32 Allowable load mass mv (kg) Maximum operating pressure Pv (MPa) Model 1 5 0.3 CYP15 CYP32 1254 Clean Rodless Cylinder Series CYP 15, 32 How to Order CYP 15 Y7BW 200 Number of auto switches Nil S n Clean room rodless cylinder 2 pcs. 1 pc. n pcs.

CYP

Allowable load mass mv (kg) Maximum operating pressure Pv (MPa) Model Cushion stroke Stroke (mm) 25 30 1 5 0.3 Model CYP15 CYP32 CYP15 CYP32 13 14 Series CYP Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage. These instructions indicate the level of potential hazard by a label of "Caution", "Warning" or "Danger".

CYPSeries

Allowable load mass mv (kg) Maximum operating pressure Pv (MPa) Model Cushion stroke 1 5 0.3 Model CYP15 CYP32 Stroke (mm) 25 30 CYP15 CYP32 1MPa = 145 psi 1 kg = 2.2046 lb 1Nm = 0.7375 ftlb 1in = 25.4mm 16 17 Series CYP Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

CYPSeries

Allowable load mass mv (kg) Maximum operating pressure Pv (MPa) Model Cushion stroke 1 5 0.3 Model CYP15 CYP32 Stroke (mm) 25 30 CYP15 CYP32 1MPa = 145 psi 1 kg = 2.2046 lb 1Nm = 0.7375 ftlb 1in = 25.4mm 16 17 Series CYP Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

Magnetically Coupled Rodless Cylinder

Allowable load mass mv (kg) Maximum operating pressure Pv (MPa) Cushion Stroke Model Stroke (mm) 25 30 1 5 0.3 Model CYP15 CYP32 CYP15 CYP32 8-17-6 Clean Room Rodless Cylinder Series CYP 15, 32 How to Order MX CYP 15 Z73 200 MTS MY Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Allowable load mass mv (kg) Maximum operating pressure Pv (MPa) Cushion Stroke Model Stroke (mm) 25 30 1 5 0.3 Model CYP15 CYP32 CYP15 CYP32 8-17-6 6 Clean Room Rodless Cylinder Series CYP 15, 32 How to Order MX CYP 15 Z73 200 MTS MY Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

Slider Type Ball Screw Drive/11-LEFS Series

[mm] Dimensions Model L A B n D E Without lock With lock 11-LEFS32l-50l 332 384 56 180 4 11-LEFS32l-100l 382 434 106 230 4 11-LEFS32l-150l 432 484 156 280 4 11-LEFS32l-200l 482 534 206 330 6 2 300 11-LEFS32l-250l 532 584 256 380 6 2 300 11-LEFS32l-300l 582 634 306 430 6 2 300 11-LEFS32l-350l 632 684 356 480 8 3 450 11-LEFS32l-400l 682 734 406 530 8 3 450 11-LEFS32l-450l 732 784 456

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Model L A B n D E F LEFS25lll-50l 210.5 56 160 4 20 LEFS25lll-100l 260.5 106 210 4 LEFS25lll-150l 310.5 156 260 4 LEFS25lll-200l 360.5 206 310 6 2 240 LEFS25lll-250l 410.5 256 360 6 2 240 LEFS25lll-300l 460.5 306 410 8 3 360 LEFS25lll-350l 510.5 356 460 8 3 360 LEFS25lll-400l 560.5 406 510 8 3 360 LEFS25lll-450l 610.5 456 560 10 4 480 LEFS25lll-500l 660.5 506 610 10 4 480 LEFS25lll-

Clean Rodless Cylinder Series CYP

5.4 9.5 8 4 9.5 12.5 4H9 6.5 45 19.5 8.5 8.5 23 38.6 44 27 19.5 M6 x 1 10 21 +0.030 0 CYP32 8.6 6H9 13 12 14 6 25 8.5 75 39 19 19 39 64.9 73.5 49.5 39 M10 x 1.5 12 20 LD LW MM M N L P PA PB Q QW R T TA TB W WA WB Y Z Model CYP15 5.6 69 M4 x 0.7 6 4.5 67 M5 x 0.8 25 60 105 48 45 23 13 18 69 32 17 2.5 118 CYP32 8.6 115 M6 x 1 8 7.5 90 Rc 1/8 50 100 138 87 79.5 29 17 22 115 46 27 3.5 155 Note

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LEL25MT-100l-l LEL25MT-200l-l LEL25MT-300l-l LEL25MT-400l-l LEL25MT-500l-l LEL25MT-600l-l LEL25MT-700l-l LEL25MT-800l-l LEL25MT-900l-l LEL25MT-1000l-l LEL25LT-100l-l LEL25LT-200l-l LEL25LT-300l-l LEL25LT-400l-l LEL25LT-500l-l LEL25LT-600l-l LEL25LT-700l-l LEL25LT-800l-l LEL25LT-900l-l LEL25LT-1000l-l With motor cover 272.5 372.5 472.5 572.5 672.5 772.5 872.5 972.5 1072.5 1172.5 292.5 392.5

FGX-OM-N027

Maximum operating flow 400L/min Content 0.023m3(23L) 0.035m3(35L) Weight 13kg 16kg Applicable standards None Material Polyester Nominal filtration rating 5102550100m Depends on the element filtration (Symbol of filtration). Element Element exchange deifferental pressure proof 0.1MPa Others) The outer surface of the body is finished with surface treatment equivalent to No.2D(*1).

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Solenoid Valve (with M Connector) Conforming to ISO 15407-1 , , ISO 15407-1 Interface Large capacity Size 01 (EVS1-01) and Size 02 (EVS1-02) Interface conforms to ISO 15407-1 Flow rate Cylinder driving size EVS1-01 (Size: 01) EVS1-02 (Size: 02) 100 80 1000L/min (ANR) 400L/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Light weight Size 01 (3-position): 0.26kg Size 02 (3-position

AF800/900

Do NOT make upward piping. qFloat style auto drain (N.O.) 1)Use compressor with capacity more than 3.7kw{400L/min (ANR)}. 2)Set pressure more than 0.1MPa wFloat style auto drain (N.C.) 1)Compressor can be used even if energy is under 3.7kw. 2)Set pressure more than 0.15MPa wFloat style auto drain (N.C.) DO NOT pipe upwards. 1.4-13

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P-EX01-2A Solenoid Valve (with M Connector) Conforming to ISO 15407-1 , , ISO 15407-1 Interface Large capacity Size 01 (EVS1-01) and Size 02 (EVS1-02) Interface conforms to ISO 15407-1 Flow rate Cylinder driving size EVS1-01 (Size: 01) EVS1-02 (Size: 02) 100 80 1000L/min (ANR) 400L/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Light weight Size 01 (3-position): 0.26kg Size 02

Mechanically Jointed Rodless Cylinder Series MY1

Additional mass per each 25 mm of stroke Bore size (mm) Basic mass Symbol Specifications Type A and B L unit mass LH unit mass H unit mass XC67 NBR rubber lining in dust seal band D50 30.62 0.87 0.17 0.62 0.93 1.24 63 41.69 1.13 0.17 1.08 1.62 2.16 -X Calculation: (Example) MY1HT50-400L Basic mass 30.62 kg Additional mass 0.87/25 st L unit mass 0.62 kg Cylinder stroke 400 st 30.62 + 0.87

IDX-OM-W038

D 5 3-4 IDH Series 52 5. 1 IDX-OM-W038 . 6 6.1 IDH4-10 IDH4-20 IDHA4-23 IDH6-10 IDH6-20 IDHA6-23 1),2) 100500L/min (ANR) 200800L/min (ANR) 540 0.31.0MPa 1535 (85%) 1530 0.150.85MPa 0.15MPa 400L/min (ANR) 600L/min (ANR) 0.7MPa 35 30 30 3) 10 4) 0.1 0.5 () 5) AC100V AC200V AC230V AC100V AC200V AC230V 50/60Hz 50/60Hz 50/60Hz 50/60Hz 50/60Hz 50/60Hz 4.2A 2.1A 2.1A 9.4A 4.8A

Antibacterial Filter (5μm) Antibacterial Filter (0.1μm) Odor Removal Filter Bacteria Removal Filter

Standard specification Body size 30 40 Port size 1/4, 3/8 1/4, 3/8, 1/2 Fluid Air, Nitrogen, Carbon dioxide gas (gas) HF2-BFA, HF2-BFB, HF2-BFC -5 to 60oC (23 to 140oF) (With no freezing) Ambient and fluid temperature HF2-BFD 5 to 45oC (41 to 113oF) Proof pressure 1.5MPa (225psi) Maximum operating pressureNote1) 1.0MPa (150psi) Rated flow Note2) 400L/min(ANR) 800L/min(ANR) HF2-BFA 5m (filtration

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 , , ISO 15407-1 Interface Large capacity Size 01 (EVS1-01) and Size 02 (EVS1-02) Interface conforms to ISO 15407-1 Flow rate Cylinder driving size EVS1-01 (Size: 01) EVS1-02 (Size: 02) 100 80 1000L/min (ANR) 400L/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Light weight Size 01 (3-position): 0.26kg Size 02 (3-position

Battery-less

direction of return to origin has changed Dimensions [mm] Model L A B n D E F Without lock With lock LEFS25El-50l 285.5 330.5 56 160 4 20 LEFS25El-100l 335.5 380.5 106 210 4 LEFS25El-150l 385.5 430.5 156 260 4 LEFS25El-200l 435.5 480.5 206 310 6 2 240 LEFS25El-250l 485.5 530.5 256 360 6 2 240 LEFS25El-300l 535.5 580.5 306 410 8 3 360 LEFS25El-350l 585.5 630.5 356 460 8 3 360 LEFS25El-400l

MY1

Type A and B L unit LH unit H unit 50 30.62 (67.5) 0.87 (1.92) 0.17 (0.37) 0.62 (1.37) 0.93 (2.10) 1.24 (2.73) 63 41.69 (91.9) 1.13 (2.49) 0.17 (0.37) 1.08 (2.38) 1.62 (3.57) 2.16 (4.76) Calculation method Example: MY1HT50-400L Basic weight 30.62kg Additional weight 0.87/25mm stroke L unit weight 0.62kg Cylinder stroke 400mm 30.62 + 0.87 x 400 25 + 0.62 x 2 = approx. 45.8 83 Series