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Magnetically Coupled Rodless Cylinder/Direct Mount Type: Both Sides Piping Type Series CY3R

Magnetically Coupled Rodless Cylinder/Direct Mount Type: Both Sides Piping Type Series CY3R 6, 10, 15, 20 25, 32, 40, 50 63 Replacement Procedure is P.316 Construction Both sides piping type Actuators Modular F.R.L. Pressure Control Equipment Air Preparation Equipment Industrial Filters Replacement Procedure Actuators Modular F.R.L. Pressure Control Equipment Industrial Filters CY3R6 @4 @

Table of Contents

L M9NL Refer to page 12-13-1 for further information on auto switches. Auto switches marked with a "" are made upon receipt of order.

Free Mount Cylinder

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com D-A9V D-M9V D-F9WV 5 (7) ( ): Denotes the values of D-M9V, D-F9WV.

High Vacuum Angle Valve

Example) -M9NL !

Aluminum High Vacuum Angle Valve

Example) -M9NL !

NCG/CG1

M9NW M9NL M9NZ Since there are other applicable auto switches than listed, contact SMC for details.

MHZ

8 MHK Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MHS MHC Double acting/With fingers closed MHT MHY MHW MRHQ Misc. Component Parts DNo. Description Material Note No.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Solid state switches marked "" are produced upon receipt of order.

Table of Contents

, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 6000 63 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 Made to Order Specifications (For details, refer to page 10-21-1.)

Table of Contents

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com D-A9V D-M9V D-F9WV 5 (7) ( ): Denotes the values of D-M9V, D-F9WV.

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MHS MHC MHT MHY Ball bearing Rotary actuator MHW MRHQ Misc.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX D-X 20Data 8-8-1 2 Various auto switches available Travelling parallelism: 0.004 mm Parallelism: 0.02 mm High rigidity and high precision Cylinder is built into the rail of the linear guide.

NCQ8

L M9NL 197in (5 m) .

MXQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Repeatability Dimensions CX Model Height Width Parallelism Overall length Height tolerance MXQ12-30 MXS12-30 30 46 0.035 0.08 86 DSymmetric type is also standardized.

CE

Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Refer to page 10-12-16 for details on other applicable auto switches than listed above.

1

New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2