Bore Size: 15mm, Port Thread: M thread (ø10, ø15) Rc threads (ø25), Piping: Left Side Centralized Piping, Stroke: 300mm, Adjuster: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Bore Size: 15mm, Port Thread: M thread (ø10, ø15) Rc threads (ø25), Piping: L (Left Side Centralized Piping), Stroke: 450mm, Adjuster: A (Both Sides: 25mm Adjusting), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

Bore Size: 15mm, Port Thread: M thread (ø10, ø15) Rc threads (ø25), Piping: L (Left Side Centralized Piping), Stroke: 150mm, Adjuster: A (Both Sides: 25mm Adjusting), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

Bore Size: 15mm, Port Thread: M thread (ø10, ø15) Rc threads (ø25), Piping: L (Left Side Centralized Piping), Stroke: 250mm, Adjuster: Both Sides Standard, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

Bore Size: 15mm, Port Thread: M thread (ø10, ø15) Rc threads (ø25), Piping: Left Side Centralized Piping, Stroke: 450mm, Adjuster: Both Sides: 25mm Adjusting, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Bore Size: 15mm, Port Thread: M thread (ø10, ø15) Rc threads (ø25), Piping: Left Side Centralized Piping, Stroke: 150mm, Adjuster: Both Sides: 25mm Adjusting, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: -, Number: -

50, Table Surface Treatment: [Anodize] Hard Anodize, Operating Pressure(MPa): 0.2 to 0.7, Environment: General Purpose, Maximum Load(kg): 5, Operating Speed(mm/s): 50～500, Allowable Static Moment MA(N⋅m): 1.5, Allowable Static Moment MB(N⋅m): 3, Allowable Static Moment MC(N⋅m): 1.5, Connection Diameter: M5, Piping Format: Left-side centralized piping, Port Screw Type: M, Auto Switches: A93

Bore Size: 15mm, Port Thread: M thread (ø10, ø15) Rc threads (ø25), Piping: L (Left Side Centralized Piping), Stroke: 300mm, Adjuster: Both Sides Standard, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal

Bore Size: 15mm, Port Thread: M thread (ø10, ø15) Rc threads (ø25), Piping: L (Left Side Centralized Piping), Stroke: 300mm, Adjuster: Both Sides Standard, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: L (3m)

Bore Size: 15mm, Port Thread: M thread (ø10, ø15) Rc threads (ø25), Piping: Left Side Centralized Piping, Stroke: 300mm, Adjuster: Both Sides Standard, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Bore Size: 15mm, Port Thread: M thread (ø10, ø15) Rc threads (ø25), Piping: Left Side Centralized Piping, Stroke: 300mm, Adjuster: Both Sides Standard, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

1

Type M10/M11 manifold At 300 mm/s 4, 6, 8 fittings are connectable. 32 At 300 mm/s Existing 6, 8, 10, 12 fittings are connectable. Valve size Valve size 50 50 DOWN DOWN Existing At 300 mm/s Possible to drive cylinders Up to 50 Valve size Valve size 63 63 DOWN DOWN (80 at 100 mm/s) Existing Possible to drive cylinders Up to 63 80 Page 30 (125 at 100 mm/s) Sub-plate newly added!

Table of Contents

200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max.

Table of Contents

the speed of 300 mm/s.

Air Cylinder Series CM2

Up to 400 6.8 3.2 102 131 133 142 to 400 Up to 300 Up to 300 4 4 8 7 9 9 41 111 19 10 9 40 37 60 75 30 14 10 40 40 60 40 112 120 122 47 28 40 55 20 25 6.8 3.2 102 135 Up to 300 Up to 450 137 146 to 450 Up to 300 Up to 300 4 4 8 7 9 9 41 113 19 10 9 40 37 60 75 30 14 10 40 40 60 40 114 122 124 47 28 40 55 20 25 6.8 3.2 104 137 Up to 300 Up to 450 139 148 to 450 Up to 300 Up to 300 5 4 7

High Vacuum Angle Valve

Uniform baking temperature 108 300 10.6 300 138 315 18.5 800 Common to all series.

Magnetically Coupled Rodless Cylinder

50 mm 50, 63 63 mm Standard Stroke Bore size (mm) Standard stroke (mm) Maximum available stroke (mm) 300 6 50, 100, 150, 200 500 10 15 20 50, 100, 150, 200, 250, 300 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 1000 1500 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 3000 32 40 3000 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 5000 63 Note 1)

Table of Contents

300 100 MI W S 100 300 Speed (mm/s) Speed (mm/s) Speed (mm/s) 300 300 CEP1 Max. 500 mm/s of high speed transfer is possible.

Air Cylinder

9 14 133 142 Up to 300 8 10 32 32 52 36 108 116 118 25 Up to 450 47 4 6.8 28 102 3.2 40 55 20 8 25 135 Up to 450 Up to 300 40 37 7 4 60 75 41 111 Up to 300 9 10 19 30 9 14 137 146 Up to 300 9 10 40 40 60 40 112 120 122 32 Up to 450 47 4 6.8 28 104 3.2 40 55 20 8 25 137 Up to 450 Up to 300 40 37 7 4 60 75 41 113 Up to 300 9 10 19 30 9 14 139 148 Up to 300 9 10 40 40 60 40 114 122 124 40

ISO Cylinder

301 to 400 401 to 500 20 20 8 36 22 6 M8 x 1.25 71 84 96 109 134 159 25 22 10 36 22 8 M10 x 1.25 74 87 99 112 137 162 187 Auto Switch Made to Order Bore size Stroke Item Reference (Wh) 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 12.5 25 37.5 50 75 100 23.5 10.5 51 64 76 89 114 139