Free Mount Cylinder Series CU R QA Q GC GB E MM GA D J C 2.8 A Width across flats L 2-P through A1 H E 4-T counter bore 0.5 B S Z (mm) S Z T QA R Q A A1 P GB MM B C D E GA L J H GC Bore size 5 30 40 50 5 10 15 20 25 30 40 50 15 20 25 10 4.5 2 16 12 9 4 20 16 12 11 5.5 4.5 26 20 40 32 8 6 30 27 6 5 16 14 19 16 22 19 21.5 19 116 126 135 145 M6 x 1.0 M5 x 0.8 14 12.5 40 36.5 81 72.5 86 77.5 91 82.5 96 87.5 101 92.5 106
Clean gas filter TS-1500 0.17m 15l/min Measuring instrument Minimum measurable particle diameter Suction flow rate Clean gas filter Hitachi Electronics Engineering Co. Ltd.
Clean gas filter TS-1500 0.17m 15l/min Measuring instrument Minimum measurable particle diameter Suction flow rate Clean gas filter Hitachi Electronics Engineering Co. Ltd.
Alarm Sequence Setting range : On, Off Indicated content : Use of temp. upper/lower limit alarm U p p e r / L o w e r T e m p . A l a r m S e q u e n c e M O D E < O f f sequence(Ex. : Off) Function : Determines whether or not temp. upper/lower limit alarm is output when power is turned on.
Clean gas filter TS-1500 0.17m 15l/min Measuring instrument Minimum measurable particle diameter Suction flow rate Clean gas filter Hitachi Electronics Engineering Co. Ltd.
Clean gas filter TS-1500 0.17m 15l/min Measuring instrument Minimum measurable particle diameter Suction flow rate Clean gas filter Hitachi Electronics Engineering Co. Ltd.
During Auto tuning Auto tuning failure A T 1 E R R 1 9 P V < 2 3 . 0 C # 1 A T F a i l u r e A u t o T u n i n g M O D E S h u t O f f C a n c e l : A T k e y <4> External sensor sampling cycle setting: Mode indication External Sensor Sampling Cycle. Default value: 180 sec. Setting range 10 to 999 sec.
Clean gas filter TS-1500 0.17m 15l/min Measuring instrument Minimum measurable particle diameter Suction flow rate Clean gas filter Hitachi Electronics Engineering Co. Ltd.
2 r w e i !0 !5 t u y MDHR2 q !4 !3 o @0 !2 !1 !9 w !8 i !6 i !7 e r !5 !0 t y u Component Parts Component Parts Description Material Description Material Note No. q w e r t y No. !1 !2 !3 !4 !5 !6 !7 !8 !
www.stevenengineering.com A C T U AT O R S P R O D U C T S E L E C T O R PA G E 1.1 VA LV E S P R O D U C T S E L E C T O R PA G E 2.1 F L O W C O N T R O L E Q U I P M E N T P R O D U C T S E L E C T O R PA G E 3.1 F I T T I N G S A N D T U B I N G P R O D U C T S E L E C T O R PA G E 4.1 A I R P R E PA R AT I O N P R O D U C T S E L E C T O R PA G E 5.1 VA C U U M P R O D U C T S E L E
THREE-PORT VALVES FIVE-PORT VALVES D I R E C T A C T I N G VT S E R I E S (S E E V A LV E S E C T I O N) V A C U U M V E R S I O N SY B O D Y P A R T E D (S E E V A LV E S E C T I O N) H O W T O O R D E R VT S E R I E S H O W T O O R D E R SY S E R I E S VT3 V Refer to series VT307/327 P O R T W AY SY 20 X20 S I Z E 07 17 25 S I Z E E N T E R A S S TA N D A R D P A R T F O R E X T E R N
MLGPL (Ball bushing bearing) Dimensions A, DB, E: MLGPM (Slide bearing) A E A E Bore size (mm) 131 141.5 144.5 Bore size (mm) 115 128 131 DB DB st 50 50 < st 200 200 < st 350 200 < st 350 20 25 25 st 50 50 < st 200 74 89 84 st 50 50 < st 100 100 < st 200 200 < st 350 16 20 20 st 50 50 < st 100 100 < st 200 200 < st 350 74 89 84 40 50 63 40 50 63 31 34.5 29.5 174 196 199 36
MLGPL (Ball bushing bearing) Dimensions A, DB, E: MLGPM (Slide bearing) A E A E Bore size (mm) 131 141.5 144.5 Bore size (mm) 115 128 131 DB DB st 50 50 < st 200 200 < st 350 200 < st 350 20 25 25 st 50 50 < st 200 74 89 84 st 50 50 < st 100 100 < st 200 200 < st 350 16 20 20 st 50 50 < st 100 100 < st 200 200 < st 350 74 89 84 40 50 63 40 50 63 31 34.5 29.5 174 196 199 36
Bore size (mm) a b c d e b a 6.5 8.5 11 10.5 13.5 17.8 5.5 7.5 10 4 4.5 7 11 13.5 18.5 40 50 63 Note 2) For intermediate strokes, dimensions A, B, C, E, WA, and WB will be the same as the longer of the standard strokes. c d e MLGPM, MLGPL common dimensions (mm) IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA Extension locking Retraction locking ID IE IH J K L IB 100
Bore size (mm) a b c d e b a 6.5 8.5 11 10.5 13.5 17.8 5.5 7.5 10 4 4.5 7 11 13.5 18.5 40 50 63 Note 2) For intermediate strokes, dimensions A, B, C, E, WA, and WB will be the same as the longer of the standard strokes. c d e MLGPM, MLGPL common dimensions (mm) IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA Extension locking Retraction locking ID IE IH J K L IB 100
t e 2 ) 1 pcs. 15 D-P3DW(A) 2 pcs. 15 1 pc. 5 N o t e 2 ) N o t e 4 ) 2pcs.
YU-03 J E T1 B 2-D through 2-O counter bore (mm) Bore size (mm) B D E J M O Part no. Joints 12 7 25 9 34 11.5, depth 7.5 YB-03 32, 40 K ( across flats) 12 9 32 11 42 14.5, depth 8.5 YB-05 50, 63 H (with locking) 16 11 38 13 52 18, depth 12 YB-08 80 d2 d1 19 14 50 17 62 21, depth 14 YB-10 100 L UT Weight (g) Bore size (mm) C UA RS W T1 T2 V Part no.
Bore size (mm) 32, 40 50, 63 T2 T1 M F E D B Part No.
D E ZPY02U 2 4 6 8 Applicable tube O.D.