CQ2

145 50 55 60 65 70 75 80 85 90 125 150 C' D' 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 120 145 CQ2KB12-5D -10D -15D -20D -25D -30D CQ2KB16-5D -10D -15D -20D -25D -30D CQ2KB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQ2KB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQ2KB32-5D -10D -15D -20D -

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt D 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 130 155 75 80 85 90 95 100 105 110 115 140 165 D Model C Model C Model C D 35 40 45 50 55 65 40 45 50 55 60 65 40 45 50 55 60 65 70 75 80 85 40 45 50 55 60 65 70 75 80 85 Mounting bolt Mounting bolt Mounting bolt CDQ2B12-5D -10D -15D -20D -25D -30D CDQ2B16-5D -10D -15D -20D -25D -30D CDQ2B20-5D -10D -15D -20D

Compact Cylinder

CDQP2B12-5D -10D -15D -20D -25D -30D CDQP2B16-5D -10D -15D -20D -25D -30D CDQP2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQP2B25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D 40 45 50 55 60 65 70 75 80 85 110 135 45 50 55 60 65 70 75 80 85 90 115 140 55 60 65 70 75 80 85 90 95 120 145 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 130 155 75 80 85 90 95 100

NCQ2/CQ2

(mm) FD FT FV FX FZ A 33 43 39.5 49.5 40.5 50.5 B A B 50 60 56.5 66.5 58.5 68.5 5 to 50 75, 100 5 to 50 75, 100 10 to 50 75, 100 32 60 43 5.5 8 48 56 65 M FV 40 66.5 49.5 5.5 8 54 62 72 FT L 4 x FD FX FZ 50 68.5 50.5 6.6 9 67 76 89 B + Stroke High Lateral Load A + Stroke Bore size (mm) Stroke range (mm) L L1 M 5 to 50 75, 100 5 to 50 75, 100 10 to 50 75, 100 32 17 38.5 34 40 17 38.5 40 L1

Compact Cylinder Series CQS

C D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 C D 55 60 65 70 75 80 35 40 45 50 55 60 65 70 75 80 Cylinder model Mounting bolt size Cylinder model Mounting bolt size CQSWB12-5D -10D -15D -20D -25D -30D CQSWB16-5D -10D -15D -20D -25D -30D CQSWB20-5D -10D -15D -20D CQSWB20-25D -30D -35D -40D -45D -50D CQSWB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D M3 x 30L x 35L x 40L x 45L x

CQS

Model C D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 C' D' 35 40 45 50 55 60 35 40 45 50 55 60 40 45 50 55 60 65 70 75 80 85 45 50 55 60 65 70 75 80 85 90 Mounting bolt Mounting bolt CDQSKB12-5D -10D -15D -20D -25D -30D CDQSKB16-5D -10D -15D -20D -25D -30D CDQSKB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQSKB25-5D -10D -15D -20D

Table of Contents

center : VQ7-8-FJG-D pressure center: VQ7-8-FIG-D 180.5 175.5 175.5 82.5 93 98 93 82.5 56(71) 56(71) 56(71) 56(71) 16(20)(B port) 16(20)(A port) 16(20)(B port) 16(20)(A port) Manual override Manual override A B PB A B PB 75(86) 62(72) 75(86) 62(72) 50 38 38 50 B B PA R1 R2 P Indicator light PA Indicator light R1 R2 P 49(64) 49(64) Mounting hole 2-6.5 Mounting hole 2-6.5 49(64) 49(64) G1/

1

Manifold overall length Manifold overall length Approx. 29% reduced SY5000 manifold SY5000 3 stations SY3000 manifold SY3000 4 stations Mixed manifold SY5000 3 stations SY3000 4 stations For serial transmission EX260 A B A B A B A B A B A B A B A B A B A 14 A B A 14 A B A 14 A B A 14 A B A 14 A B A 14 Installation space A A A A A A A A B B B B B B B B 12 B 12 B 12 B 12 B 12 B 12 B 136.7 mm

Smooth Cylinder/Low Speed Cylinder

B A B LS 46 56 53.5 63.5 63 73 20 30 23.5 33.5 29 39 72.2 82.2 85 95 98 108 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 63 82.2 43.5 30 18 56 11 LH LY Special cap bolt 80 95 63.5 33.5 53.5 20 13 100 73 39 108 53.5 22 13 LT LG LX LZ 4 x LD Y X Y X LS + Stroke Bore size (mm) Stroke range (mm) LT LH Y LZ LG X LX LY A + Stroke 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 63 3.2

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

) 60 11 60 Non plug-in type: VV5FR5-10Station 1Bore size U side 2.3 (Lead wire electrical entry) Manual override (Non-locking) 21 R5.5 B B B B A A A A B B B n A A A B B B B A A A A 3 L2 L1 P = 51 11 11 71.5 (Pitch) P=51 (Pitch) 2 6 [2] 1 71.5 2n x 1/2, 3/4 Stations (A, B port) 24 [23] 20 70 [71.5] 2n x 1/2 28 58 114 91 105.5 176.5 209 9 D side 179 Bottom ported: VV5FR5-10Station 2Port size

2

For AC10-A For AC20-B For AC25-B For AC30-B For AC40-B For AC40-06-B For AC50-B For AC55-B For AC60-B For AC10A-A For AC20A-B For AC30A-B For AC40A-B For AC40A-06-B For AC50A-B For AC60A-B For AC10B-A For AC20B-B For AC25B-B For AC30B-B For AC40B-B For AC40B-06-B For AC50B-B For AC55B-B For AC60B-B For AC20C-B For AC25C-B For AC30C-B For AC40C-B For AC40C-06-B For AC20D-B For AC30D-B

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

40.5 63 PE 126.5 101 A A A A A SETTINGS 119.5 119.5 SV 1 0 R1 EA EB MOD/NET PWR MODEL SQ (SI No.EX124-SDN1) 150.5 158 SMC P R2.7 SYJ R2 B B B B B TM SZ 5.4 16.5 VP4 L1 30.5 L2 S0700 38 VQ 1 2 3 4 5 6 7 8 n Stations D side U side VQ4 VQ5 VQC 123.5 SMC SMC SMC SMC SMC VQZ 88.5 B B B B B B B B SQ 47 37.5 A A A A A A A A VFS 2 11.5 9 37.5 28 42 4(A), 2(B) port 2n x Rc 1/8, 1/4 VFR EX123: 2 x

VFS

(sbar)] 6.0 0.20 1.4 7.0 0.20 1.8 1 4/2 (P A/B) Cv Non plug-in type: 6 stations (Manifold base) VV5FS5-10-061-04 1 (2 position single) VFS5110-5D 5 (3 position exhaust center) VFS5410-5D 1 (Individual EXH center) VVFS5000-R-04-2 1 VV5FS5 C [dm3/(sbar)] b Cv 4/2 5/3 (A/B R1/R2) Port size: Rc 1/2, 3/4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-

VFR

wire electrical entry) P EB EA 31 50 67 81 37 37 43 6-Rc 3/4 61 103 (P , EA, EB port) 72 [ ] = A, B port Rc 3/4 Formula for manifold weight M = 0.911n + 1.621 (kg) n: Station 144 (72) 60 11 60 Non plug-in type: VV5FR5-10Station 1Bore size U side 2.3 (Electrical entry) Manual override (Non-locking) 21 R5.5 B B B B A A A A B B B n A A A B B B B A A A A 3 L2 L1 P = 51 11 11 71.5 (Pitch) P =

Free Mount Cylinder

With auto switch Without auto switch With auto switch Bore size (mm) 15 10 5 15 10 5 15 10 5 15 10 5 6 67 62 52 67 62 52 57 52 47 57 52 47 42 42 9 8 10 80 65 55 80 65 55 65 55 50 65 55 50 45 45 9 8 16 94 79 69 84 69 59 69 59 54 59 49 44 49 39 9 8 20 90 75 65 80 65 55 75 65 60 65 55 50 55 45 9 8 25 96 81 71 86 71 61 81 71 66 71 61 56 61 51 11 10 32 100 85 75 90 75 65 85 75 70 75 65 60 65

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

-15D -20D -25D -30D -35D -40D -45D -50D CDQSB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D 40 45 50 55 60 65 40 45 50 55 60 65 45 50 55 60 65 70 75 80 85 90 50 55 60 65 70 75 80 85 90 95 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 CQ-M3 x 40L x 45L x 50L x 55L x 60L x 65L CQ-M3 x 40L x 45L x 50L x 55L x 60L x 65L CQ-M5 x 45L x 50L x

Compact Hydraulic Cylinder

mm stroke For 100 mm stroke For 125 mm stroke For 150 mm stroke For 75 mm stroke For 100 mm stroke For 125 mm stroke For 150 mm stroke For 175 mm stroke 32 40 50 63 80 100 Dimensions CHmKGBm-m-XC63 Stroke Bore size (mm) 55, 60, 65, 70 80, 85, 90, 95 105, 110, 115, 120 130, 135, 140, 145 155, 160, 165, 170 Dimensions A B A B A B A B A B 32 141 131 166 156 191 181 216 206 40 150 140 175

Hydraulic

U B A Approx. U A B D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7F D-F7NTL D-F7BAL SMC SMC Approx. U Approx. U Approx. U SMC SMC Approx. U A B B A Approx. U D-A73C D-A80C D-J79C B A A B Approx.

Compact Hydraulic Cylinder

U B A CHA B A Related Products D-F7 D-F7W D-J79 D-J79W D-A7 D-A7H D-A8 D-A8H D-F7V D-F7WV D-F7BA D-F7BAV D-F7NT D-F79F D-J79C D-A73C D-A80C 32 to 100 DApprox. U B A Approx.

Free Mount Cylinder Series CU

JIS B 8370: General rules for pneumatic equipment. JIS B 8361: General rules for hydraulic equipment. JIS B 9960-1: Safety of machinery Electrical equipment of machines. (Part 1: General requirements) JIS B 8433-1993: Manipulating industrial robots Safety. etc. 2) Labor Safety and Sanitation Law, etc. Caution: Operator error could result in injury or equipment damage.