42

X n VQ 1/2 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B A A A A A A A A B B B B B B B B 8 VQ 4/5 VQ 4/5 SMC SMC SMC SMC SMC SMC SMC 7 VQC 1/2 6 VQC 4/5 5 L2 L1 VQZ 4 SQ 3 VFS 2 P = 25 1 VFR 50.5 44 X Stations VQ7 12 38 27 Cable length (600 or 1500 mm) D side 96.3 47.7 11.7 43.2 178.5 (3-position) 49.7 58.2 96.2 Dimensions Formula: L1 = 25n + 63, L2 = 25n + 76 n: Stations (Maximum 16 stations) n L 1 2

5 Port Solenoid Valve

B B B 61 106 107.8 9 9 29.5 VQ 1/2 80 A A A A A 192.8 R1 5 R2 3 179 179 155 VQ 4/5 1 P PE VQC 1/2 29.5 B B B B B VQC 4/5 VQC 4/5 12 21 47.5 VQZ n 6 5 4 3 2 D side U side Stations 1 1/8" PE. port SQ 3/4" 1(P), 5(R1), 3(R2) port VFS 1/2" 3(R) port 3/8", 1/2" 4(A), 2(B) port VFR M5 x 0.8 Ground screw VQ7 117 B 2 B 2 B 2 B 2 B 2 B 2 B 2 77.7 3 1 69 55.5 53.7 45.5 12 X 4 A 4 A 4 A 4 A 4 A 4 A

Plug-in Unit

) A B A B A B A B A A A B 143 9 9 10 143 (32) (98.8) 10 163 101 Mounting hole for 2-M5, with input block only Input block SI unit n 1 2 3 4 5 6 7 Stations D-side 8 U-side Formulas: L1 = 25n + 106, L2 = 25n + 241 (For 1 input block.

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

) VQD 12 X n 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 8 A A A A A A A A B B B B B B B B 7 SMC SMC SMC SMC SMC SMC SMC 6 5 L1 L2 4 3 2 44 P = 25 50.5 P = 25 1 X Stations 12 38 26.5 Electrical entry on D side (LD) 37.5 10.2 12 91 D side 43.5 50.5 163 59 96.5 Dimensions Formula L1 = 25n + 63, L2 = 25n + 76 n: Station (Maximum 16 stations) L n 8 263 276 L1 L2 7 238 251 6 213 226 5 188 201 4 163 176 3

0.4

(B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e w q VQC1200 VQC1201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w VQC1301 VQC1401 VQC1300 VQC1400 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) VQC1500 VQC1501 r r (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

2n-Rc 1/4 4(A), 2(B) port VQ0 9 9 73 2-Rc 1/8 (External pilot port) VQ4 12 X n VQ5 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B B B B B B B B B A A A A A A A A 8 VQZ SMC SMC SMC SMC SMC SMC SMC 7 VQD 6 5 L2 L1 4 3 2 P = 25 P = 25 1 50.5 44 X Stations 12 38 26.5 Cable length (600 or 1500 mm) D side 37.5 10.2 12 106.5 43.5 178.5 50.5 59 96.5 Dimensions Formula L1 = 25n + 63, L2 = 25n + 76 n: Station (Maximum

1

port] Applicable tube O.D.: 4, 5/32" : 6, 1/4" : 8, 5/16" (Station n) (Station 1)-(91.3) 1 P 1 P 76.9 (69.7) 2 B 2 B 2 B 2 B 2 B E 3/5 E 3/5 4 A 4 A 4 A 4 A 4 A Note 1) These figures show the SS5Y5-12F2-05D.

Fieldbus System

B: Locking type (Tool required) 2-position double (Metal) 4-position dual 3-port valve (B) 2(B) 4(A) 2(B) (A)4 Note) B (R1)5 1 (P) 3(R2) 1(P) 5(R1) 3(R2) N.O. N.O. 2 2-position double (Rubber) 4-position dual 3-port valve (C) 2(B) 4(A) 2(B) (A)4 C: Locking type (Manual) Note) C (R1)5 1 (P) 3(R2) 1(P) 5(R1) 3(R2) N.C.

Fieldbus System

valve (A) (A) 4 (B) 2 (A) 4 (B) 2 Note) A 1 5 (R1) 3 (R2) 1 (P) 3 (R2) 5 (R1) 1 (P) N.C.

VQC

SUP block plate VVQ2000-16A EXH block plate VVQ2000-19A Port plug Note 1) A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B C4 (N3) With 4 (5/32") One-touch fitting Side port Cylinder port sizes Fill out in case of mixed sizes (CM/LM/NM).

5 Port Solenoid Valve, Series VQC

B SOL. B (+) () () (+) 4 4 SOL. A SOL. A Cable length (L) Part no. (+) () () (+) 5 5 Station 3 Station 3 SOL. B SOL. B 20P AXT100-FC20-1 AXT100-FC20-2 AXT100-FC20-3 26P AXT100-FC26-1 AXT100-FC26-2 AXT100-FC26-3 (+) () () (+) 6 6 SOL. A SOL. A 1.5m 3m 5m (+) () () (+) 7 7 Station 4 Station 4 SOL. B SOL. B (+) () () (+) 8 8 SOL. A SOL. A (+) () () (+) 9 9 Station 5 Station 5 SOL. B SOL.

Table of Contents

1 1 5 3 3 5 3 5 Regulating port B Regulating port P Regulating port A Caution Part No.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Double Double Double Double Double Double Double Single Single Single Single Single Single Single Single Single Single SI unit SI unit A B A B A B A B A B A B A B A B A B A B A A A A B A A B A 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 0 1 2 3 7 8 4 5 9 11 6 10 11 Mixed wiring is available as an option. Use the manifold specification sheet to specify this.

VFS

Tightening torque for terminal: 0.6 Nm Series VFS4000/5000 Model Terminal block marking A + A side A side A A side A side B + B VFS 100 VFS 200 VFS4 00 VFS5 00 4 5 4 5 B side B side 3 4 3 4 A side A side B side B side Applicable terminal: 1.25-3.5M, 1.25Y-3L, 1.25Y-3M There is no polarity.

Digital Flow Switches

0 e 1 New PFA Body 2 New PFA Sensor 3 Super PFA Tube 4 PPS Housing A 5 PPS Housing B 6 PPS Housing C 7 POM Bushing 8 PPS Cap 9 FKM Gasket 10 FKM O-ring 11 Stainless steel 304 Thread 12 PVC Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !

Low Differential Pressure Sensor

P-1 = A (A B) / 4 H-1 = (A B) / 2 A = Maximum pressure value B = Minimum pressure value For low differential pressure For low pressure For compound pressure PSE533 PSE543 PSE563 For positive pressure For vacuum Pressure range C Display calibration function This function eliminates slight differences in the output values and allows uniformity in the numbers displayed.

Pressure Sensor

For example, when the output voltage is 1 to 5[V], the F.S. will be 5-1 = 4[V]. (Reference: 1%F.S. = 4 0.01 = 0.04[V]) F.S. (full span/full scale) O The resistance value of a component between the voltage outputting element and the output line at the output of the analogue voltage output.

Table of Contents

50 3-5 depth 10 +0.02 0 16h9 0 0.043 (A, B, C common view) Misc.

Shock Absorbers and Rate Controls

Pod l{unb.r ttlodel (Re0 (A $ (D Weighl(oz.) 5(l{l0xl M98921058 0t 0.l[{(8) 0.i5 n/A 0.63 0.5 S(ltll2xl [,r95588058 0rM0.r5M(Bl 0.15 N/A 0.63 0.5 seth-10 |\193935057 {rrl0rM.r5{B)1.00 /A 0.7t 1.0 5(e/6-l8 l\,194950199 (LR)0tM.35{B) 1.00 N/A 0.69 1.0 5Cq1-ft M92646057 (rRl0Erd.5(81 1.50 N/A t.00 2.0 S(l -l2xl M92587057 (LR)0ri$r.0(B) I t l N/A t.50 8.0 5(l %-12 9?

MHZ

B 5.7 7 9 12 C 2 2.5 4 5 MM M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 A 3 4 5 6 B 5.7 7 9 12 A 3 4 5 6 Model MHZL2-101 MHZL2-161 MHZL2-201 MHZL2-251 Model MHZL2-102 MHZL2-162 MHZL2-202 MHZL2-252 MHY MHW MRHQ Flat Type Fingers [3] Misc.