Table of Contents

] 60 60 11 2, 3 24 [23] 2n-Rc 1/2, 3/4 20 91 179 L1 L2 9 (Electrical entry) (A, B port) R5.5 Manual override (Non-locking) D side 21 B B B B Manual override (Non-locking) n A A A B B B A A A A 3 1 2 2 P = 51 (Pitch) 1 3 6 [2] n Stations R 1 1/2 250 105.5 Stations 176.5 D side 209 AMC810-14 Exhaust cleaner (Option) 250 135 D side mounting 125 U side External pilot port 194 135 Rc 1/8 125

LEC-OM071xx

125> 100% + (125 0.4) = 50% Therefore, the monitor output voltage is 0.5 time as high. 125> 100% + (125 0.4) =150% Therefore, the monitor output voltage is 1.5 times as high.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

B B B B TM SZ 5.4 16.5 VP4 L1 30.5 L2 S0700 38 VQ 1 2 3 4 5 6 7 8 n Stations D side U side VQ4 VQ5 VQC 123.5 SMC SMC SMC SMC SMC VQZ 88.5 B B B B B B B B SQ 47 37.5 A A A A A A A A VFS 2 11.5 9 37.5 28 42 4(A), 2(B) port 2n x Rc 1/8, 1/4 VFR EX123: 2 x G 1/2 EX124: 4 x G 1/2 Use a dripproof plug assembly (AXT100-B04A) for the unused conduit port (G 1/2).

VFS

Tightening torque for terminal: 0.6 Nm Series VFS4000/5000 Model Terminal block marking A + A side A side A A side A side B + B VFS 100 VFS 200 VFS4 00 VFS5 00 4 5 4 5 B side B side 3 4 3 4 A side A side B side B side Applicable terminal: 1.25-3.5M, 1.25Y-3L, 1.25Y-3M There is no polarity.

2

For AC10-A For AC20-B For AC25-B For AC30-B For AC40-B For AC40-06-B For AC50-B For AC55-B For AC60-B For AC10A-A For AC20A-B For AC30A-B For AC40A-B For AC40A-06-B For AC50A-B For AC60A-B For AC10B-A For AC20B-B For AC25B-B For AC30B-B For AC40B-B For AC40B-06-B For AC50B-B For AC55B-B For AC60B-B For AC20C-B For AC25C-B For AC30C-B For AC40C-B For AC40C-06-B For AC20D-B For AC30D-B

IDU/IDF

B 220V Dryer Capacity Model A Part No.

AC Servo Motor Driver (Pulse input type/Positioning type ）

B-phase 0 A-phase A-phase B-phase B-phase 1 _ _ x _ Encoder output pulse setting selection 0h Refer to app. 15 for details.

VZ1000

Type 21P Single base/B mount Common SUP/Common EXH 3 to 12 stations Valve Rc 1 8 M5 x 0.8 Model Manifold type P(SUP), R(EXH) Valve stations A, B port location 1(P), 3(R) port 4(A), 2(B) port Port size Valve (1) effective area (mm2) (Cv factor) 1 4: 0.48, 4 3: 0.85 VZ1120 Socket: 26 pins MIL, with strain relief (Conforming to MIL-C-83503) Applicable flat ribbon cable connector Internal wiring

Manifold Specifications

Series VZ1000 Manifold Specifications Manifold Standard Manifold Specifications Type 20 Single base/B mount Common SUP/Common EXH 2 to 20 stations Valve Rc 1 8 M5 x 0.8 Model Manifold type P(SUP)/R(EXH) Valve stations A, B port location VK VZ VF 1(P), 3(R) port 4(A), 2(B) port Port size Valve Note) effective area (mm2) VFR VZ1120 1 4: 0.48, 4 3: 0.85 VP4 Note) Value at manifold base mounted

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

A b . A b . A PLCetc Axis Axis Axis No. 1 No. 2 No. 3 "b01" is displayed on axis No. 1, "Ab." is displayed on axis No. 2 and later. PC or PLCetc Controller After PC or PLCetc reset 0 1 b b . A b . A One axis is connected per reset.

LEC-OM07605CN

b . A b . A b . A 1 2 3 1 b012 Ab. 0 1 b b . A b .

Electric Actuator/Slider Type

5 A-A t y @2 C B e @1 !0 C B r w C-C B-B !4 !2 Body Table !3 Component Parts No. Description Material Note No.

42

Connector location on U side (FU) 3.5 163 10.7 47 106 71.7 9 9 U side 27 Manual override n X 12 12 2 B 4 A 8 2 B 4 A A A B A B A B A B A B A 7 SMC SMC SMC SMC SMC SMC SMC A A A A A A A B B B 2 B 4 A Indicator light 6 2 B 4 A 5 L2 L1 2 B 4 A 4 B B 2 B 4 A 3 2 B 4 A 2 P = 25 2 B 4 A 1 50.5 44 X Stations 38 27 Connector location on D side (FD) 11.7 16.2 139.9 (Single) 43.2 49.7 D side 148.9

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

A B !

7ND9071en

R K05 Omron D2VW-5, 3 A 250 V AC, 0.4 A 125 V DC, 5 A 30 V DC. Temperature range: -40 to +85 C / -40 to +185 F. Not applicable to 6. sign "X", "X7", "Z", "U" and "E4". Omron D2VW-01, gold plated contacts, 100 mA 30 V DC / 125 V AC. Temperature range: -40 to +85 C / -40 to +185 F. Not applicable to 6. sign "X", "X7", "Z", "U" and "E4".

VZ3000

Gasket DXT192-10-5 (Use caution to the orientation.) 3-3-30 5 Port Solenoid Valve Base Mounted Series VZ3000 Flow Characteristics/Weight Flow characteristics (1) Port size Valve model Type of actuation Weight (g) 1 4/2 (P A /B) 4, 2 (A, B) 1, 5, 3 (P , EA, EB) 4/2 5/3 (A/B EA/EB) b C [dm3/(sbar)] Cv C [dm3/(sbar)] Cv b Grommet 125 (75) 170 (120) Single Double Closed center Exhaust center

Manifold Specifications

Series VZ3000/Body Ported Manifold Specifications Manifold Standard Manifold Specifications Type 20 Single base/B mount Common SUP/Common EXH 2 to 20 stations Valve Rc 1 8 Model Manifold type P(SUP)/R(EXH) Valve stations 4(A), 2(B) port location Port size 1(P), 3/5(R) port 4(A), 2(B) port M5 x 0.8, C4, C6 Flow Characteristics Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B R) Port size

(Or None in the Case of No Switch), Valve Voltage: 1 (100VAC 50/60HZ), Solenoid Style: 2 Position Single, Valve Type: D (DIN Connector), Cylinder Rod Motion: B (Normally Extended)

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 45, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～50, End Locking: No, Valves: Presence, Operating Pressure(MPa): 0.15～0.9, Cushion: With cushions on both sides, Specification

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 75, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～50, End Locking: No, Valves: Presence, Operating Pressure(MPa): 0.15～0.9, Cushion: With cushions on both sides, Specification