Microspeed Cylinder

thrust 392 392 Thrust N Thrust N Pressure converter 294 294 196 196 Pressure converter Regulator (IR2000) 98 98 Electro-pneumatic regulator (ITV) 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 Rear supply pressure MPa Rear supply pressure MPa Achieves stable low speed operation even at 0.5mm/s (1mm/s for 16 or smaller) Operates smoothly with minimal stick-slip CJ2XB10-60 CQSXB20

CJ2X/CUX/CQSX/CQ2X/CM2X

CJ2XB10-60 CQSXB20-20D Average speed 0.85 mm/s Average speed 0.88 mm/s 2.0 Average speed 0.43 mm/s Average speed 0.43 mm/s 2.0 Speed (mm/s) Displacement (mm) Speed (mm/s) Displacement (mm) Acceleration curve Acceleration curve 0 0 Operating direction IN Operating direction OUT 2.0 2.0 Operating direction IN Operating direction OUT 60 40 Displacement waveform Displacement waveform 20 20 20

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New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2

Microspeed Cylinders CJ2X/CUX/CQSX/CQ2X/CM2X

Measuring conditions 10-CQSXB20-50D Chamber volume Purity of air supplied to chamber 15l Same quality as supply air Evaluation of air purity inside chamber 100 Particle concentration (particles/cf) Hitachi Electronics Engineering Corporation TS-6200 Min. measurable particle dia.: 0.1m Intake rate: 28.3l/min 10 Laser dust monitor 1 Sampling time: 5min Interval time: 55min Operation frequency

CJ2X/CUX/CQSX/CQ2X/CM2X

Rod side supply pressure: 0.025 MPa Rod side supply pressure: 0.025 MPa 686 686 REC Test cylinder Load converter 588 588 Theoretical thrust CX Theoretical thrust 490 490 Thrust (N) Thrust (N) Analyzing recorder Actual thrust Actual thrust 392 392 CY Pressure converter Measuring Conditions 10-CQSXB20-50D 294 294 MQQ M Chamber volume Purity of air supplied to chamber 15 l Same quality as supply

CJ2X/CUX/CQSX/CQ2X/CM2X

Rod side supply pressure: 0.025 MPa Rod side supply pressure: 0.025 MPa 686 686 REC Test cylinder Load converter 588 588 Theoretical thrust CX Theoretical thrust 490 490 Thrust (N) Thrust (N) Analyzing recorder Actual thrust Actual thrust 392 392 CY Pressure converter Measuring Conditions 10-CQSXB20-50D 294 294 MQQ M Chamber volume Purity of air supplied to chamber 15 l Same quality as supply

Table of Contents

Rod side supply pressure: 0.025 MPa Rod side supply pressure: 0.025 MPa 686 686 REC Test cylinder Load converter 588 588 Theoretical thrust CX Theoretical thrust 490 490 Thrust (N) Thrust (N) Analyzing recorder Actual thrust Actual thrust 392 392 CY Pressure converter Measuring Conditions 10-CQSXB20-50D 294 294 MQQ M Chamber volume Purity of air supplied to chamber 15 l Same quality as supply

Magnet: None, Mounting: B [Through Hole, Both Ends Tapped (Standard)], Bore Size: 20mm, Stroke: 20mm, Option: C (Rubber Bumper)

Magnet: None, Mounting: B [Through Hole, Both Ends Tapped (Standard)], Bore Size: 20mm, Stroke: 25mm

Magnet: None, Mounting: B [Through Hole, Both Ends Tapped (Standard)], Bore Size: 20mm, Stroke: 50mm

Magnet: None, Mounting: B [Through Hole, Both Ends Tapped (Standard)], Bore Size: 20mm, Stroke: 25mm, Option: C (Rubber Bumper)

Magnet: None, Mounting: B [Through Hole, Both Ends Tapped (Standard)], Bore Size: 20mm, Stroke: 10mm

Magnet: None, Mounting: B [Through Hole, Both Ends Tapped (Standard)], Bore Size: 20mm, Stroke: 30mm

Magnet: None, Mounting: B [Through Hole, Both Ends Tapped (Standard)], Bore Size: 20mm, Stroke: 50mm, Option: C (Rubber Bumper)

Magnet: None, Mounting: B [Through Hole, Both Ends Tapped (Standard)], Bore Size: 20mm, Stroke: 15mm

Magnet: None, Mounting: B [Through Hole, Both Ends Tapped (Standard)], Bore Size: 20mm, Stroke: 20mm

Magnet: None, Mounting: B [Through Hole, Both Ends Tapped (Standard)], Bore Size: 20mm, Stroke: 50mm, Option: M (Rod End Male Thread)

Magnet: None, Mounting: B [Through Hole, Both Ends Tapped (Standard)], Bore Size: 20mm, Stroke: 40mm, Option: M (Rod End Male Thread)

Magnet: None, Mounting: B [Through Hole, Both Ends Tapped (Standard)], Bore Size: 20mm, Stroke: 20mm, Option: Rubber Bumper, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet: None, Mounting: B [Through Hole, Both Ends Tapped (Standard)], Bore Size: 20mm, Stroke: 25mm, Option: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -