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New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2

NCQ2/CQ2

x 160L 6.5 7.5 10 -100DC-R -100DC-R C BQ2B50-10DC-R C BQ2B25-10DC-R 80 85 90 95 -15DC-R -20DC-R -25DC-R -50DC-R -75DC-R -15DC-R -20DC-R -25DC-R -50DC-R -75DC-R 8.5 12.5 7 -100DC-R -100DC-R C BQ2B63-10DC-R C BQ2B32-10DC-R 85 90 95 -15DC-R -20DC-R -25DC-R -50DC-R -75DC-R -15DC-R -20DC-R -25DC-R -50DC-R -75DC-R 9 14.5 -100DC-R -100DC-R C BQ2B80-25DC-R 15 -50DC-R C BQ2B100-25DC-R 15.5 -50DC-R

Compact Cylinder

ClBQ2B20-10DC-Hl -15DC-Hl -20DC-Hl -25DC-Hl -50DC-Hl -75DC-Hl -100DC-Hl ClBQ2B25-10DC-Hl -15DC-Hl -20DC-Hl -25DC-Hl -50DC-Hl -75DC-Hl -100DC-Hl ClBQ2B32-10DC-Hl -15DC-Hl -20DC-Hl -25DC-Hl -50DC-Hl -75DC-Hl -100DC-Hl ClBQ2B40-10DC-Hl -15DC-Hl -20DC-Hl -25DC-Hl -50DC-Hl -75DC-Hl -100DC-Hl ClBQ2B50-10DC-Hl -15DC-Hl -20DC-Hl -25DC-Hl -50DC-Hl -75DC-Hl -100DC-Hl ClBQ2B63-10DC-Hl -15DC-Hl -20DC-Hl

5

25DC 80 X80L 30DC 85 X85L 35DC 90 X90L 40DC 95 X95L 45DC 100 X100L 50DC 105 X105L 75DC 140 X140L -100DC 165 X165L CQ2YB10010DC 45 CQ-M5X45L 10DC 50 X50L 15DC 55 X55L 20DC 60 X60L 25DC 65 X65L 30DC 70 X70L 35DC 75 X75L 40DC 80 X80L 45DC 85 X85L 50DC 90 X90L 75DC 125 X125L -100DC 150 X150L CQ2YB5010DC 15 7.5 75 CQ-M10X75L 15DC 80 X80L 20DC 85 X85L 25DC 90 X90L 30DC 95 X95L 35DC 100 X100L 40DC

CQS

CQSBS12 5DC 10DC 15DC 20DC 25DC 30DC CQSBS16 5DC 10DC 15DC 20DC 25DC 30DC CQSBS20 5DC 10DC 15DC 20DC CQSBS20 25DC 30DC 35DC 40DC 45DC 50DC CQSBS25 5DC 10DC 15DC 20DC 25DC 30DC 35DC 40DC 45DC 50DC 6.5 6.5 6.5 8.5 6.5 Note) The appropriate plain washer must be used for through-hole.

CQS

Mounting bolt Mounting bolt D 35 40 45 50 55 60 35 40 45 50 55 60 40 45 50 55 Model C Model C D 60 65 70 75 80 85 45 50 55 60 65 70 75 80 85 90 CDQSBS12-5DC -10DC -15DC -20DC -25DC -30DC CDQSBS16-5DC -10DC -15DC -20DC -25DC -30DC CDQSBS20-5DC -10DC -15DC -20DC CDQSBS20-25DC -30DC -35DC -40DC -45DC -50DC CDQSBS25-5DC -10DC -15DC -20DC -25DC -30DC -35DC -40DC -45DC -50DC M3 x 35l x 40l x 45l

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

60 40 45 50 55 60 65 40 45 50 55 60 65 70 75 80 85 40 45 50 55 60 65 70 75 80 85 50 55 60 65 70 75 80 D' 85 90 95 120 145 45 50 55 60 65 70 75 80 85 90 115 140 55 60 65 70 75 80 85 90 95 120 145 60 65 70 75 80 85 90 95 100 125 150 D' 40 45 50 55 60 65 45 50 55 60 65 70 45 50 55 60 65 70 75 80 85 90 45 50 55 60 65 70 75 80 85 90 50 55 60 65 70 75 80 Model CDQ2KB12-5DC -10DC -15DC -20DC -25DC

CQ2

Mounting bolt CDQ2WB12-5DC -10DC -15DC -20DC -25DC -30DC CDQ2WB16-5D -10D -15D -20D -25D -30D CDQ2WB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQ2WB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D Mounting bolt CDQ2WB32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQ2WB40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQ2WB50-10D -15D -20D -25D -30D

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

70 75 80 85 90 Model C Model C D 65 70 75 80 85 90 95 100 105 130 155 70 75 80 85 90 95 100 105 110 135 160 80 85 90 95 100 105 110 115 120 145 170 Bolt CDQ2WB32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQ2WB40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQ2WB50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D Bolt CDQ2WB12-5DC -10DC -15DC -20DC -25DC

Microspeed Cylinder

thrust 392 392 Thrust N Thrust N Pressure converter 294 294 196 196 Pressure converter Regulator (IR2000) 98 98 Electro-pneumatic regulator (ITV) 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 Rear supply pressure MPa Rear supply pressure MPa Achieves stable low speed operation even at 0.5mm/s (1mm/s for 16 or smaller) Operates smoothly with minimal stick-slip CJ2XB10-60 CQSXB20

CJ2X/CUX/CQSX/CQ2X/CM2X

CJ2XB10-60 CQSXB20-20D Average speed 0.85 mm/s Average speed 0.88 mm/s 2.0 Average speed 0.43 mm/s Average speed 0.43 mm/s 2.0 Speed (mm/s) Displacement (mm) Speed (mm/s) Displacement (mm) Acceleration curve Acceleration curve 0 0 Operating direction IN Operating direction OUT 2.0 2.0 Operating direction IN Operating direction OUT 60 40 Displacement waveform Displacement waveform 20 20 20

Microspeed Cylinders CJ2X/CUX/CQSX/CQ2X/CM2X

Measuring conditions 10-CQSXB20-50D Chamber volume Purity of air supplied to chamber 15l Same quality as supply air Evaluation of air purity inside chamber 100 Particle concentration (particles/cf) Hitachi Electronics Engineering Corporation TS-6200 Min. measurable particle dia.: 0.1m Intake rate: 28.3l/min 10 Laser dust monitor 1 Sampling time: 5min Interval time: 55min Operation frequency

CJ2X/CUX/CQSX/CQ2X/CM2X

Rod side supply pressure: 0.025 MPa Rod side supply pressure: 0.025 MPa 686 686 REC Test cylinder Load converter 588 588 Theoretical thrust CX Theoretical thrust 490 490 Thrust (N) Thrust (N) Analyzing recorder Actual thrust Actual thrust 392 392 CY Pressure converter Measuring Conditions 10-CQSXB20-50D 294 294 MQQ M Chamber volume Purity of air supplied to chamber 15 l Same quality as supply

CJ2X/CUX/CQSX/CQ2X/CM2X

Rod side supply pressure: 0.025 MPa Rod side supply pressure: 0.025 MPa 686 686 REC Test cylinder Load converter 588 588 Theoretical thrust CX Theoretical thrust 490 490 Thrust (N) Thrust (N) Analyzing recorder Actual thrust Actual thrust 392 392 CY Pressure converter Measuring Conditions 10-CQSXB20-50D 294 294 MQQ M Chamber volume Purity of air supplied to chamber 15 l Same quality as supply

Table of Contents

Rod side supply pressure: 0.025 MPa Rod side supply pressure: 0.025 MPa 686 686 REC Test cylinder Load converter 588 588 Theoretical thrust CX Theoretical thrust 490 490 Thrust (N) Thrust (N) Analyzing recorder Actual thrust Actual thrust 392 392 CY Pressure converter Measuring Conditions 10-CQSXB20-50D 294 294 MQQ M Chamber volume Purity of air supplied to chamber 15 l Same quality as supply

Magnet: None, Mounting: B [Through Hole, Both Ends Tapped (Standard)], Bore Size: 20mm, Stroke: 20mm, Option: C (Rubber Bumper)

Magnet: None, Mounting: B [Through Hole, Both Ends Tapped (Standard)], Bore Size: 20mm, Stroke: 25mm

Magnet: None, Mounting: B [Through Hole, Both Ends Tapped (Standard)], Bore Size: 20mm, Stroke: 50mm

Magnet: None, Mounting: B [Through Hole, Both Ends Tapped (Standard)], Bore Size: 20mm, Stroke: 10mm

Magnet: None, Mounting: B [Through Hole, Both Ends Tapped (Standard)], Bore Size: 20mm, Stroke: 50mm, Option: CM (Rubber Bumper, Rod End Male Thread)