Release flow rate adjusting needle + + SMC SMC PD (PS 1(PV) PD) (PS 1(PV) PD) (PS 3(PV) PD) 61.5 A 50.50 60 PD PD PD 50.5 A PD 50 PE PE PE EXH 28.5 33 PS PS 7.5 PS 21.5 20.5 0.5 PS P PV PV PV 10 PV 20 5 Common EXH port (EXH.)1 1/8 (Rc, NPTF, G) 2.5 3 37.4 22.5 Pitch = 21 44 Common air pressure SUP port (PV) 1/8 (Rc, NPTF, G) Common pilot pressure SUP port (PS) 2 x M5 Common vacuum pressure
PD PD PD PD PE PE PS PS PS PS PS PS PS PS PE PE PD PD PD PD PE PE 962 Large Size Vacuum Module: Ejector System Series ZR Manifold/System Circuit Example When not using individual spacer When using individual spacer Ejector 1 Ejector 2 ZA ZX (PE) (PE) ZR ZM ZMA ZQ ZH ZU Individual Spacer ZR1-R1-1 ZL ZY PV: Air pressure supply port PS: Pilot pressure supply port PD: Release pressure supply
Common EXH port Common PS/PD ports Application ZZK2mA-Am1m Yes PS = PD Ejector common exhaust PV = PS = PD ZZK2mA-Am1m-D Yes PS PD Ejector common exhaust PV = PS PD Standard supply pressure 0 Ejector individual exhaust PV = PS = PD Supply pressure ZZK2mA-Am2m ZZK2mA-P2m None PS = PD Vacuum pump system PV PS = PD Operating Supply Pressure Caution Ejector individual exhaust PV = PS PD ZZK2mA-Am2m-D
Description 12 MGQ12-PS 16 MGQ16-PS 20 MGQ20-PS 25 MGQ25-PS 32 MGQ32-PS 40 MGQ40-PS 50 MGQ50-PS 63 MGQ63-PS 80 MGQ80-PS 100 MGQ100-PS !9 Seal kit Seal kit includes !9 to @2.
0 Piston seal CQ2B20V-PS CQ2B20R-PS 20 25 32 40 50 63 80 100 CQ2B20R-PS CQ2B25R-PS CQ2B32R-PS CQ2B40R-PS CQ2B50R-PS CQ2B63R-PS CQ2B80R-PS CQ2B100R-PS CQ2B20V-PS CQ2B25V-PS CQ2B32V-PS CQ2B40V-PS CQ2B50V-PS CQ2B63V-PS CQ2B80V-PS CQ2B100V-PS CQ2B25V-PS CQ2B25R-PS !1 Rod seal CQ2B32V-PS CQ2B32R-PS CQ2B40V-PS CQ2B40R-PS Set of left nos. !0, !1, !2. !
0 Piston seal CQ2B20V-PS CQ2B20R-PS 20 25 32 40 50 63 80 100 CQ2B20R-PS CQ2B25R-PS CQ2B32R-PS CQ2B40R-PS CQ2B50R-PS CQ2B63R-PS CQ2B80R-PS CQ2B100R-PS CQ2B20V-PS CQ2B25V-PS CQ2B32V-PS CQ2B40V-PS CQ2B50V-PS CQ2B63V-PS CQ2B80V-PS CQ2B100V-PS CQ2B25V-PS CQ2B25R-PS !1 Rod seal CQ2B32V-PS CQ2B32R-PS CQ2B40V-PS CQ2B40R-PS Set of left nos. !0, !1, !2. !
CH2G50B-PS CH2H50C-PS CH2H50B-PS Nos. @1 through #0 from the chart at left CH2E63C-PS CH2E63B-PS CH2F63C-PS CH2F63B-PS 63 CH2G63C-PS CH2G63B-PS CH2H63C-PS CH2H63B-PS CH2E80C-PS CH2E80B-PS CH2F80C-PS CH2F80B-PS 80 CH2G80C-PS CH2G80B-PS CH2H80C-PS CH2H80B-PS CH2E100C-PS CH2E100B-PS CH2F100C-PS CH2F100B-PS 100 CH2G100C-PS CH2G100B-PS CH2H100C-PS CH2H100B-PS Seal kit consists of items @1 through
SET button PS Use this button to switch the mode and set the set value.
MHSL32-PS MHSL25-PS MHSL20-PS MHSL16-PS !
tube gasket Holder gasket Cushion valve seal Cushion seal Piston gasket Magnet 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 CH2F50C-PS CH2F50B-PS 50 CH2G50C-PS CH2G50B-PS Nos. 21 through 30 from the chart at left CH2H50C-PS CH2H50B-PS CH2E63C-PS CH2E63B-PS CH2F63C-PS CH2F63B-PS 63 CH2G63C-PS CH2G63B-PS CH2H63C-PS CH2H63B-PS CH2E80C-PS CH2E80B-PS CH2F80C-PS CH2F80B-PS 80 CH2G80C-PS
Pump system + PV PS = PD Ejector individual exhaust + PV = PS PD ZZK2-A2-D ZZK2-P2-D PS PD None Pump system + PV PS PD When PS = PD, the common PS/PD ports on the end plate are used, PS port is equipped with one-touch fitting and PD port is plugged at the time of shipment from the factory.
CH2H50C-PS CH2E63C-PS CH2F63C-PS CH2G63C-PS CH2H63C-PS CH2E80C-PS CH2F80C-PS CH2G80C-PS CH2H80C-PS CH2E100C-PS CH2F100C-PS CH2G100C-PS CH2H100C-PS CH2E40B-PS CH2F40B-PS CH2G40B-PS CH2H40B-PS CH2E50B-PS CH2F50B-PS CH2G50B-PS CH2H50B-PS CH2E63B-PS CH2F63B-PS CH2G63B-PS CH2H63B-PS CH2E80B-PS CH2F80B-PS CH2G80B-PS CH2H80B-PS CH2E100B-PS CH2F100B-PS CH2G100B-PS CH2H100B-PS CH2F40B-PS CH2F40C-PS
CH2H50C-PS CH2E63C-PS CH2F63C-PS CH2G63C-PS CH2H63C-PS CH2E80C-PS CH2F80C-PS CH2G80C-PS CH2H80C-PS CH2E100C-PS CH2F100C-PS CH2G100C-PS CH2H100C-PS CH2E40B-PS CH2F40B-PS CH2G40B-PS CH2H40B-PS CH2E50B-PS CH2F50B-PS CH2G50B-PS CH2H50B-PS CH2E63B-PS CH2F63B-PS CH2G63B-PS CH2H63B-PS CH2E80B-PS CH2F80B-PS CH2G80B-PS CH2H80B-PS CH2E100B-PS CH2F100B-PS CH2G100B-PS CH2H100B-PS CH2F40B-PS CH2F40C-PS
CY1HT25-PS CY1HT32-PS Set of the above nos. @8, @9, #0, #1, #2, #3 Seal kit includes @8 to #3.
CY1HT25-PS CY1HT32-PS Set of the above nos. @8, @9, #0, #1, #2, #3 Seal kit includes @8 to #3.
CG1N25-PS CG1N32-PS CG1N40-PS CG1N50-PS CG1N63-PS CG1N80-PS CG1N100-PS Seal kit (Air cushion) CG1A20-PS CG1A25-PS CG1A32-PS CG1A40-PS CG1A50-PS CG1A63-PS CG1A80-PS CG1A100-PS Floating Joint JA20-8-125 JA30-10-125 JA30-10-125 JA40-14-150 JA63-18-150 JA63-18-150 JA80-22-150 JA100-26-150 Piston Rod Ball Joint KJ8D KJ10D KJ10D Piston Rod Nut NT-02 NT-03 NT-03 NT-04 NT-05 NT-05 NT-08 NT-10 Note
CG1N25-PS CG1N32-PS CG1N40-PS CG1N50-PS CG1N63-PS CG1N80-PS CG1N100-PS Seal kit (Air cushion) CG1A20-PS CG1A25-PS CG1A32-PS CG1A40-PS CG1A50-PS CG1A63-PS CG1A80-PS CG1A100-PS Floating Joint JA20-8-125 JA30-10-125 JA30-10-125 JA40-14-150 JA63-18-150 JA63-18-150 JA80-22-150 JA100-26-150 Piston Rod Ball Joint KJ8D KJ10D KJ10D Piston Rod Nut NT-02 NT-03 NT-03 NT-04 NT-05 NT-05 NT-08 NT-10 Note
CG1Q20-PS CG1Q25-PS CG1Q32-PS CG1Q40-PS CG1Q50-PS CG1Q63-PS CG1Q80-PS CG1Q100-PS Contents 20 25 32 40 50 63 80 100 Set of the nos. u, i, o, !