Compact Cylinder with Lock Series CLQ

-15D -15D -15D -20D -20D -20D -20D -25D -25D -25D -25D -30D -30D -30D 10.5 -30D -35D -35D -35D 12.5 17 7 -35D -40D -40D -40D -40D -45D -45D -45D -45D -50D -50D -50D -50D -75D -75D -75D CDLQB25-5D -100D -100D -100D M10 x 125l x 130l x 135l x 140l x 145l x 150l x 155l x 160l x 165l x 190l x 215l -10D CDLQB40-10D CDLQB63-10D CDLQB100-10D -15D -15D -15D -15D -20D -20D -20D -20D -25D -25D -25D

CLQ

CLQB: Without Built-in Magnet CL CL1 Model C D Model C D Model C D Model C D Mounting bolt Mounting bolt Mounting bolt Mounting bolt CLQB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CLQB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CLQB32-10D CLQB50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CLQB63-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CLQB80-10D 55

Compact Cylinder with Lock Series CLQ

CLJ2 CLQB: Without Auto Switch CLM2 Cylinder model Cylinder model Cylinder model Cylinder model Mounting bolt size CLQB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CLQB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D Mounting bolt size Mounting bolt size CLQB50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CLQB63-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D Mounting

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

15D -20D -25D -30D -35D -40D -45D -50D CQSB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D 35 40 45 50 55 60 35 40 45 50 55 60 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 25 30 35 40 45 50 25 30 35 40 45 50 25 30 35 40 45 50 55 60 65 70 30 35 40 45 50 55 60 65 70 75 CQ-M3 x 35L x 40L x 45L x 50L x 55L x 60L CQ-M3 x 35L x 40L x 45L x 50L x 55L x 60L CQ-M5 x 35L x 40L x 45L

Smooth Cylinder/Low Speed Cylinder

CDQSXB20-30D CDQSXB12-5D 60 CQ-M5 x 60 L 30 CQ-M3 x 30 L 35D 10D 65 x 65 L 35 x 35 L 40D 15D 70 x 70 L 40 x 40 L 6.5 Example) CQ-M3x30 L 4 pcs. 6.5 45D 20D 75 x 75 L 45 x 45 L REA 50D 25D 80 x 80 L 50 x 50 L CDQSXB25-5D 30D Mounting bolt 40 55 x 55 L CQ-M5 x 40 L REB 10D CDQSXB16-5D 45 30 x 45 L CQ-M3 x 30 L 15D 10D 50 35 x 50 L x 35 L REC 20D 15D 55 40 x 55 L x 40 L 6.5 CY 25D 20D 60 45

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Standard Strokes Standard strokes (mm) Bore size (mm) 20 32 40 50 63 80 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 JIS symbol 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Double acting/Double rod 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25,

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Standard Strokes Bore size (mm) 20 32 40 50 63 80 100 Standard strokes (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Made to Order 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Page 34 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 JIS symbol 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30

Table of Contents

Pressure 0.6 MPa 35 30 External grip 0.5 MPa 0.5 MPa DGripping force (N) Gripping force (N) 30 25 25 20 20 15 15 0.4 MPa 0.4 MPa F 200.3 MPa 0.3 MPa 0.2 MPa 0.2 MPa 10 10 5 5 0 0 5 5 25 25 10 10 15 15 20 20 30 30 35 35 Gripping point L (mm) Gripping point L (mm) F F MHS3-25D MHS3-25D Internal grip 70 60 60 Pressure 0.6 MPa Pressure 0.6 MPa 50 50 Gripping force (N) Gripping force (N) 0.5

Table of Contents

) 48 (35) 44 (37) 47 (34) 43 (36) ZPY40 49 (35) 50 (37) 49 (35) 44 (38) 46 (38) ZPY50 ( ): Figures for female thread connections.

Compact Cylinder

-40 -45 -50 -60 -80 -100 -125 -150 C(D)55B25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B80-10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 C(D)55B40-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B50-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B63-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 7.2 11 9 Fix

Compact Cylinder

Mounting Bolt for C55 Model C D Mounting bolt Model C D Mounting bolt Model C D Mounting bolt C(D)55B20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B50-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B63-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B32-5 -

Secondary Batteries

Bore size Cylinder stroke (mm) 12 16 20 25 32 40 50 63 80 100 12 mm 16 mm 20 mm 25 mm 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm Built-in Magnet Cylinder Model 12, 16 20, 25 32, 40 50 to 100 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 If a built-in magnet cylinder without an auto switch is

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

RSQ Auto Switch Mounting Height (mm) RSG Auto switch model D-A7H D-A80H/F7 D-J79/F7W D-F7BAL D-J79W D-F79F D-F7NTL RS D-M9V D-M9WV D-M9AVL D-F7V D-F7WV D-F7BAVL D-A7 D-A80 D-A73C D-A80C D-J79C D-A9V D-A79W MI Bore size (mm) U U U U U U U U 12 16 20 32 40 50 17 19.5 23.5 23.5 22.5 23.5 29.5 26 29 25 25.5 25.5 24.5 25.5 31.5 28 31 27 27 29 31.5 32.5 38.5 35 38 34 30.5 32.5 35 36 42 38.5 41.5

1

d + Stroke + Adjustment 20 22.5 10 40 17 8 29 5 (47) 71 (81) 37 M22 x 1.5 C76 5 to 50 268 70 35 55 ZZ + 2 x Stroke + Adjustment (A: 25 mm, B: 50 mm) 27 26 14 38 24 6 35 7 (46.5) 78.5 (88.5) 36.5 Stroke 27 26 14 46 24 6 35 7 (56) 88 (98) 46 B + Stroke MH + Stroke C85 35 30 16 57 30 8 44 8 (58.5) 100.5 (110.5) 48.5 A + 2 x (Stroke) Series CS1 35 30 16 68 30 10 42 8 (62) 102 (112) 52 C95 10

ZR

MN MO Refer to Table (3) on page 13-3-35 regarding lead wire with connector part no.

ZX

Individual air supply port PV Individual air supply port PV Adapter D Adapter D M5 (or M6) Pitch = 21 Individual air supply port (PV port) M5 (or M6) Individual air supply port (PV port) Pitch = 21 M5 x 0.8 (or M6) Vacuum pad connection port (V port) (or M6) Vacuum pad connection port (V port) M5 x 0.8 M5 x 0.8 (or M6) Adsorption nozzle piping port 13-2-35 35 Series ZX Vacuum pad connection

Rotary Actuator

Combination between -XCl and -XCl Symbol Description Applicable shaft type Applicable size Combination S W X Y Z T J K -XC7 Reversed shaft V V V V V 50, 63, 80, 100 -XC7 -XC8 to -XC11 Change of rotation range V V V -XC8 to -XC11 -XC30 Changed to fluorine grease V V V V V V V V 30 to 100 S,W,X,T,J* S,W,Y* -XC30 -XC31 to -XC36 Change of rotation range and shaft rotation direction V V V

Vacuum Module Series ZX

ZX1-F Operating pressure range Operating temperature range Filtration efficiency Element Mass Standard accessory Vacuum to 0.5 MPa 5 to 50C 30 m PVF 35 g Bracket A (ZX1-OBA) Note) If not operated within the specified range of pressure and temperature, trouble may result.

Large Size Vacuum Module: Series ZR

(OUT1: Green, OUT2: Red) IP40 Operating: 0 to 50C, Stored: 10 to 60C (No freezing or condensation) Operating/Stored: 35 to 85% RH (No condensation) 1000 VAC for 1 minute between live parts and case 50 M or more between live parts and case (at 500 VDC Mega) 10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each 100 m/s2, in

Table of Contents

-X Centering can be done easily. 13 18 + Stroke 33 20Tolerance h9 8 Rod cover Data CDUJB8-15D 21 13.5 18 + Stroke 38 Compliant for clean room Clean Series 10 CDUJB10-20D 1011-Series CUJ 22 Two auto switches can be installed even for 4 mm strokes. CU Length is shortened by approx. 64% max. Volume is reduced by approx. 70% max.