Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Model Cushion Bore size (mm) 6 10 16 Action Standard stroke (mm) Auto switch mounting Port size Lubrication Model Rubber Air 10-/21-CDU6 10-/21-CDU10 10-/21-CDU16 Relief type Vacuum suction type 5, 10, 15, 20, 25, 30 10-/21-CDU20 20 5, 10, 15, 20, 25, 30, 40, 50 10-/21-CDU25 25 Non-lube Double acting Single rod M5 x 0.8 6 10 16 11-/22-CDU6 11-/22-CDU10 11-/22-CDU16 5, 10, 15, 20, 25, 30

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Model Cushion Bore size (mm) 6 10 16 Action Standard stroke (mm) Auto switch mounting Port size Lubrication Model Rubber Air 10-/21-CDU6 10-/21-CDU10 10-/21-CDU16 Relief type Vacuum suction type 5, 10, 15, 20, 25, 30 10-/21-CDU20 20 5, 10, 15, 20, 25, 30, 40, 50 10-/21-CDU25 25 Non-lube Double acting Single rod M5 x 0.8 11-/22-CDU6 11-/22-CDU10 11-/22-CDU16 6 10 16 5, 10, 15, 20, 25, 30

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Mounting bolt Spring Return Spring Extend D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 Model C Mounting bolt Model C Mounting bolt CQ2B12-5S -10S CQ2B16-5S -10S CQ2B20-5S -10S CQ2B25-5S -10S CQ2B32-5S -10S CQ2B40-5S -10S CQ2B50-10S -20S CQ2B12-5T -10T CQ2B16-5T -10T CQ2B20-5T -10T CQ2B25-5T -10T CQ2B32-5T -10T CQ2B40-5T -10T CQ2B50-

CQ2

Model C Mounting bolt Model C Mounting bolt D 35 40 40 45 40 45 40 45 40 45 45 50 55 65 D 40 45 40 45 40 45 40 45 40 45 45 50 55 65 CDQ2B12-5S -10S CDQ2B16-5S -10S CDQ2B20-5S -10S CDQ2B25-5S -10S CDQ2B32-5S -10S CDQ2B40-5S -10S CDQ2B50-10S -20S CDQ2B12-5T -10T CDQ2B16-5T -10T CDQ2B20-5T -10T CDQ2B25-5T -10T CDQ2B32-5T -10T CDQ2B40-5T -10T CDQ2B50-10T -20T M3 X 35 l X 40 l M3 X 40 l X 45 l

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Mounting bolt Spring Return Spring Extend Model C Mounting bolt Model C Mounting bolt D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 CQ2B12-5S -10S CQ2B16-5S -10S CQ2B20-5S -10S CQ2B25-5S -10S CQ2B32-5S -10S CQ2B40-5S -10S CQ2B50-10S -20S CQ2B12-5T -10T CQ2B16-5T -10T CQ2B20-5T -10T CQ2B25-5T -10T CQ2B32-5T -10T CQ2B40-5T -10T CQ2B50-

NCQ2/CQ2

CQP2B12-5T -10T CQP2B16-5T -10T CQP2B20-5T -10T CQP2B25-5T -10T CQP2B32-5T -10T CQP2B40-5T -10T CQP2B50-10T -20T CQP2B12-5S -10S CQP2B16-5S -10S CQP2B20-5S -10S CQP2B25-5S -10S CQP2B32-5S -10S CQP2B40-5S -10S CQP2B50-10S -20S CQ-M3 x 25L 6.5 6.5 CQ-M3 x 25L 5 5 CQ-M5 x 25L 7.5 7.5 CQ-M5 x 30L 9.5 9.5 CQ-M5 x 30L 9 9 CQ-M5 x 35L 7.5 7.5 CQ-M6 x 45L x 55L 12.5 12.5 170 Series CQP2 Mounting

Compact Cylinder

(N) Single Acting, Spring Return Single acting, Spring return C D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 Spring reaction force (N) Second First Bore size (mm) Stroke (mm) CQP2B12-5S -10S CQP2B16-5S -10S CQP2B20-5S -10S CQP2B25-5S -10S CQP2B32-5S -10S CQP2B40-5S -10S CQP2B50-10S -20S CQ-M3 x 25L x 30L CQ-M3 x 25L x 30L CQ-M5 x 25L x 30L CQ-M5 x 30L x 35L CQ-M5 x 30L x 35L CQ-M5 x 35L x

IZx-OMT0049

in depth from ionizer to work piece [mm] Installation distance in widthfrom ionizer to work piece [mm] 50 50 100 100 0.5s 0.5s 150 150 200 200 1s 2s 1s 2s 250 250 5s 5s 300 300 5-4.

AC Servo Motor Driver

ON ABS transfer mode OFF (ABSM) (Pin 17) 5s ON ABS request (ABSR) (Pin 18) OFF Signal is not turned ON ON ABS transmission data ready OFF (ABST) (Pin 25) Yes AL.E5 warning No 2) ABS request ON-time time-out check (applied to 32-bit ABS data in 2-bit units checksum) If the ABS request signal is not turned OFF by the programmable PC or PLC...etc within 5s after the ABS transmission data ready

Magnet: D (Built-in Magnet), Bore Size: 20 mm, Port Thread: Bores 6~25: M5, Bore 32: Rc 1/8, Stroke: 5 mm, Action: S (Single Acting Spring Return)

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 5, Cylinder Operation Method: Single Acting, Spring Return, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.13～0.7, Cushion: Rubber cushion, Port thread

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 5, Cylinder Operation Method: Single Acting, Spring Return, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.13～0.7, Cushion: Rubber cushion, Port thread

Compact Cylinder Series CQS

D 30 35 30 35 35 40 40 45 C CDQSB12-5S -10S CDQSB16-5S -10S CDQSB20-5S -10S CDQSB25-5S -10S M3 x 30L x 35L M3 x 30L x 35L M5 x 35L x 40L M5 x 40L 45L 6.5 6.5 Single acting, Spring return Single acting, Spring extend 6.5 Mounting bolt Mounting bolt 8.5 Single Acting, Spring Extend Cylinder model Mounting bolt size C D 30 35 30 35 35 40 40 45 CDQSB12-5T -10T CDQSB16-5T -10T CDQSB20-5T -10T

CQS

Model C D 25 30 25 30 25 30 30 35 Mounting bolt M3 x 25l x 30l M3 x 25l x 30l M5 x 25l x 30l M5 x 30l x 35l CQSB12-5S -10S CQSB16-5S -10S CQSB20-5S -10S CQSB25-5S -10S Example) Bolt M3 x 25l 4 pcs. 6.5 Single acting, Spring return Single acting, Spring extend 6.5 Mounting bolt 6.5 Mounting bolt 8.5 Single Acting, Spring Extend Model C D 25 30 25 30 25 30 30 35 Mounting bolt M3 x 25l x 30l

rep-modular-e

Pressure Control Equipment Regulator O-ring Exploded view Body A Clip Industrial Filters 449 Series ARM5A/5B/5S Replacement Procedure of Diaphragm 2 2.

smcmaintenancepartslist

Pressure Control Equipment Regulator O-ring Exploded view Body A Clip Industrial Filters 449 Series ARM5A/5B/5S Replacement Procedure of Diaphragm 2 2.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

Pressure Control Equipment Regulator O-ring Exploded view Body A Clip Industrial Filters 449 Series ARM5A/5B/5S Replacement Procedure of Diaphragm 2 2.

Secondary Batteries

(Example) CDU20-25D 9091Standard stroke (mm) 6, 10, 16 20, 25, 32 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 40, 50 *Specifications and dimensions for the 90-series are the same as standard products. Applicable Auto Switches/Refer to pages 62 to 65 for further information on auto switches.

CU 6 6 Built-in magnet Bore size 6 10 16 20 25 32 6 mm 10 mm 16 mm 20 mm 25 mm 32 mm Port thread type Symbol Nil TN TF Type M5 x 0.8 Rc 1/8 NPT 1/8 G 1/8 Bore size ø6, ø10, ø16, ø20, ø25 ø32 ø32 ø32 30 Standard stroke (mm) ø6, ø10, ø16 ø20, ø25, ø32 5, 1

(Example): CDU20-25D Bore size 6, 10, 16, 20, 25 32 32 32 Type M5 x 0.8 Rc 1/8 NPT 1/8 G 1/8 Symbol D Double acting CU Nil TN TF CQS Standard stroke (mm) 6, 10, 16 20, 25, 32 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 40, 50 CQ2 RQ Applicable Auto Switches/Refer to pages 1263 to 1371 for further information on auto switches.

LV50-OMQ0002

Do not use the product with a corrosive fluid or a fluid with an electric conductivity of less than 5S/cm. Do not use the product with a fluid which may corrode the fluid contact part or a fluid with a low electric conductivity, such as pure water or oil. Make sue that foreign matter is not allowed in the detection passage.