Solid State Auto Switch:

[mm] (Reference value) 17 Weight 5.5 Most sensitive position [g] Auto switch model D-M9Nm-5 D-M9Pm-5 D-M9Bm-5 0.5 m (Nil) 7 6 Lead wire length 1 m (M) 13 11 3 m (L) 35 31 5 m (Z) 57 51 17-E683 D-M9m-5

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Model Cushion Bore size (mm) 6 10 16 Action Standard stroke (mm) Auto switch mounting Port size Lubrication Model Rubber Air 10-/21-CDU6 10-/21-CDU10 10-/21-CDU16 Relief type Vacuum suction type 5, 10, 15, 20, 25, 30 10-/21-CDU20 20 5, 10, 15, 20, 25, 30, 40, 50 10-/21-CDU25 25 Non-lube Double acting Single rod M5 x 0.8 6 10 16 11-/22-CDU6 11-/22-CDU10 11-/22-CDU16 5, 10, 15, 20, 25, 30

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Model Cushion Bore size (mm) 6 10 16 Action Standard stroke (mm) Auto switch mounting Port size Lubrication Model Rubber Air 10-/21-CDU6 10-/21-CDU10 10-/21-CDU16 Relief type Vacuum suction type 5, 10, 15, 20, 25, 30 10-/21-CDU20 20 5, 10, 15, 20, 25, 30, 40, 50 10-/21-CDU25 25 Non-lube Double acting Single rod M5 x 0.8 11-/22-CDU6 11-/22-CDU10 11-/22-CDU16 6 10 16 5, 10, 15, 20, 25, 30

Rotary Actuated Air Gripper MHR2, MDHR2/MHR3, MDHR3

Lead wire length symbols: 0.5 m Nil (Example) M9N 1 m M (Example) M9NM 3 m L (Example) M9NL 5 m Z (Example) M9NZ MA D491 Series MHR2/MDHR2 Model/Specifications Nominal size 20 10 15 30 Double acting Action Gripping force (N) (1) External grip 33 12 58 24 (Effective value) at 0.5 MPa Internal grip 34 12 59 25 Finger closing width (mm) Finger opening width (mm) 16 10 19 14 Opening/ Closing

Secondary Batteries

(Example) CDU20-25D 9091Standard stroke (mm) 6, 10, 16 20, 25, 32 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 40, 50 *Specifications and dimensions for the 90-series are the same as standard products. Applicable Auto Switches/Refer to pages 62 to 65 for further information on auto switches.

CU 6 6 Built-in magnet Bore size 6 10 16 20 25 32 6 mm 10 mm 16 mm 20 mm 25 mm 32 mm Port thread type Symbol Nil TN TF Type M5 x 0.8 Rc 1/8 NPT 1/8 G 1/8 Bore size ø6, ø10, ø16, ø20, ø25 ø32 ø32 ø32 30 Standard stroke (mm) ø6, ø10, ø16 ø20, ø25, ø32 5, 1

(Example): CDU20-25D Bore size 6, 10, 16, 20, 25 32 32 32 Type M5 x 0.8 Rc 1/8 NPT 1/8 G 1/8 Symbol D Double acting CU Nil TN TF CQS Standard stroke (mm) 6, 10, 16 20, 25, 32 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 40, 50 CQ2 RQ Applicable Auto Switches/Refer to pages 1263 to 1371 for further information on auto switches.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

CQ2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B63-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B80-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B100-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D M3 x 25l x 30l x 35l x 40l x 45l x 50l M3 x 25l x 30l x 35l x 40l x 45l x 50l

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

CQ2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B63-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B80-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B100-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D M8 x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 125l x 150l M10

CQ2

CQ2B80-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B100-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D 6.5 14.5 9 5 15 7.5 7.5 9.5 15.5 12.5 2.3-5 Series CQ2 Construction Component

RS2H-OM0045P

DC AC 0.5 1 3 5 () (M) (L) (Z) M9NV M9N IC 3 NPN 5V 3 PNP M9PV M9P 12V 2 12V M9BV M9B M9NWV M9NV IC 3 PNP M9PWV M9PW 3 NPN 5V 12V 2 2 12V M9BWV M9BW 24V M9NAV M9NA IC 3 PNP M9PAV M9PA PLC 3 NPN 5V 12V 2 2 12V M9BAV M9BA 2 2 P3DW 3 NPN A96V A96 IC 12V 100V A93V A93 2 24V 5V 100V A90V A90 IC PLC 12V 0.5m D-M9N M 1m D-M9NM L 3m D-M9NL Z 5m D-M9NZ 1 17 - 7-2. -1516

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

Lead wire length symbols: 0.5 m Nil (Example) M9N 1 m M (Example) M9NM 3 m L (Example) M9NL 5 m Z (Example) M9NZ Note) When using the 2-color indicator type, please make the setting so that the indicator is lit in red to ensure the detection at the proper position of the air gripper. 530 MHR3/MDHR3 Series Rotary Actuated Air Gripper 3-Finger Type Model/Specifications Nominal size 15 10 Action

MHR2/MDHR2

Lead wire length symbols: 0.5 m Nil (Example) M9N 1 m M (Example) M9NM 3 m L (Example) M9NL 5 m Z (Example) M9NZ MA D491 Series MHR2/MDHR2 Model/Specifications Nominal size 10 15 20 30 Double acting Action Gripping force (N) (1) 12 33 58 24 External grip (Effective value) at 0.5 MPa Internal grip 12 34 59 25 Finger closing width (mm) Finger opening width (mm) 10 16 19 14 Opening/ Closing

ISO Cylinder: Standard Double Acting, Single/Double Rod Series C96 ø32, ø40, ø50, ø63, ø80, ø100, ø125

D-M9BM, M9NM, M9PM type (product of 1 m in length of the lead wire) are applicable from the shipment in May, 2008. 18 Series C96 Specifications Bore size (mm) 32 40 63 100 125 50 80 Action Double acting Fluid Air 1.5 MPa Proof pressure 1.0 MPa Max. operating pressure 0.05 MPa Min. operating pressure Ambient and fluid temperature Without auto switch: 20 to 70C With auto switch: 10 to 60C Lubrication

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

Lead wire length symbols: 0.5 m Nil (Example) M9N 1 m M (Example) M9NM 3 m L (Example) M9NL 5 m Z (Example) M9NZ Note) When using the 2-color indicator type, please make the setting so that the indicator is lit in red to ensure the detection at the proper position of the air gripper. 530 MHR3/MDHR3 Series Rotary Actuated Air Gripper 3-Finger Type Model/Specifications Nominal size 15 10 Action

Angular Style Air Gripper Series MHC2/MHCA2/MHCM2

Nil) 1 (M) 3 (L) Applicable load Pre-wired connector Type Special function Electrical entry 5 (Z) DC AC Perpendicular In-line M9NV M9PV M9BV M9N M9P M9B 3-wire (NPN) 3-wire (PNP) 2-wire 5 V, 12 V Solid state switch IC circuit Relay, PLC 24 V 12 V Yes Grommet Lead wire length symbols: Auto switches marked with are made to order specification. 0.5 m Nil (Example) M9N 1 m M (Example) M9NM

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

M (Example) M9NM 3 m . L (Example) M9NL 5 m . Z (Example) M9NZ Refer to page 889 for the applicable auto switch list. 799

MHC2-6/MHCA2-6

) 1 (M) 3 (L) Applicable load Pre-wired connector Type Special function Electrical entry 5 (Z) DC AC In-line Perpendicular M9NV M9PV M9BV M9N M9P M9B 3-wire (NPN) 3-wire (PNP) 2-wire 5 V, 12 V Solid state switch IC circuit Relay, PLC 24 V 12 V Grommet Yes Lead wire length symbols: Auto switches marked with are made to order specification. 0.5 m Nil (Example) M9N 1 m M (Example) M9NM

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

M (Example) M9NM 3 m . L (Example) M9NL 5 m .

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

4 6 P NC 21 25 TB 16 20 UA M8 x 1.25 UB 16 20 8H9 10H9 VA Model MHSL3-100D MHSL3-125D Rc 1/4 (G 1/4, NPT 1/4) Rc 3/8 (G 3/8, NPT 3/8) +0.036 0 +0.036 0 0 -0.043 0 -0.052 +0.036 0 +0.036 0 8H9 18h9 10H9 22h9 M10 x 1.5 M10 x 1.5 XA XB 6 8 VB 6 8 WA WB 4 6 Model MHSL3-100D MHSL3-125D +0.036 0 +0.036 0 +0.087 0 +0.100 0 8H9 102H9 10H9 130H9 594 Series MHSL3 Parallel Style Air Gripper/3-Finger

Table of Contents

SB, counterbore depth SC P .C.D.R (Mounting hole) Auto switch mounting groove positions (4 locations) MHS3-100D MHS3-125D 10 10 10 10 40 40 40 40 5 6.4 5 10 6.4 13 90 12 5 15 7 90 (mm) I G 63 84 FZ 10 12 FX 59 74 FY 54 68 CA 18 23.5 EC 28 30 EO 40 46 DC 66 82 DO 78 98 M 4 6 B 134 166 K 15 21 AC 6 8 J 38 52 AA 96 122 AB 90 114 NA 34 40 L +0.036 0 +0.036 0 NB Model MHS3-100D MHS3-125D CB 30.6