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1

Do not remove the seal cap. 5 Connector (Unused) EX600-ED2EX600-ED3w e r e r INDEX w 278 Series EX600 Dimensions SI Unit EX600-SPRA EX600-SDNA EX600-SMJ EX600-SEN EX600-SEC EX600-SPN 10.7 47 55.2 10.7 55.2 47 23.7 26 26 106 106 22 22 11.5 56.4 22.1 106.5 56.4 8 22.1 End Plate 42.5 5.5 EX600-ED2 EX600-ED3 26 85.1 5.5 20.5 20.5 8 90 8 90 106 106 30.35 13.2 30.35 56.6 36.65 30.2 73.6 56.6 13.2

High Vacuum Angle Valve

1 XGT 16 SYJ319XLAV16-90-2 SYJ519XLAV63-90-1 SYJ519XLAV63-90-1 25 40 50 63 80 100 160 XLAV CYV SYJ319XLAV16-90-2 SYJ3190(single) SYJ3290(double) XLCV16-90-1 XLFV SY3120--C4 (single) SY3220--C4 (double) XLCV XLGV Solenoid valve i Plate assembly o V114Initial exhaust solenoid valve !1 XLDV V114XLDV25-90-2 SYJ314XLDV40-90-2 Main exhaust solenoid valve !2 Plate assembly !

Secondary Batteries

90-CQ-F020 90-CQ-F025 90-CQ-F032 90-CQ-F040 90-CQ-F050 90-CQ-F063 90-CQ-F080 90-CQ-F100 91-CQ-F012 91-CQ-F016 91-CQ-F020 91-CQ-F025 90-CQ-F032 90-CQ-F040 90-CQ-F050 90-CQ-F063 90-CQ-F080 90-CQ-F100 90-CQ-L012 90-CQ-L016 90-CQ-L020 90-CQ-L025 90-CQ-L032 90-CQ-L040 90-CQ-L050 90-CQ-L063 90-CQ-L080 90-CQ-L100 91-CQ-L012 91-CQ-L016 91-CQ-L020 91-CQ-L025 90-CQ-L032 90-CQ-L040 90-CQ-L050 90-CQ-L063

Table of Contents

D-A90 cannot be mounted on Series MY1HT.

NCQ2/CQ2

70 75 80 85 90 95 100 55 60 65 70 75 80 85 90 95 100 125 150 D' Bolt part no.

Table of Contents

65 90 90 90 90 90 Q 171 221 271 321 371 421 471 521 S 27 52 77 102 127 152 177 202 SS 128 153 178 203 228 253 278 303 Z 155 205 255 305 355 405 455 505 ZZ 199 249 299 349 399 449 499 549 Model CXWL25-25 CXWL25-50 CXWL25-75 CXWL25-100 CXWL25-125 CXWL25-150 CXWL25-175 CXWL25-200 8-26-44 43 Series CXWL Slide Unit: Build-in Shock Absorber Slide Bearing Type 25 With End Lock: CXWL25Stroke/25

Compact Hydraulic Cylinder

, 8 ) 80 + 30 (n 2) (n = 2, 4, 6, 8 ) 90 + 30 (n 2) (n = 2, 4, 6, 8 ) D-A3m D-G39 D-K39 Different surfaces 100 + 100 (n 2) (n = 2, 4, 6, 8 ) 100 + 100 (n 2) (n = 2, 3, 4 ) Same surface 75 1 pc. 90 10 80 35 75 80 90 Different surfaces 55 75 80 90 Same surface 35 + 30 (n 2) (n = 2, 3, 4 ) 75 + 30 (n 2) (n = 2, 4, 6, 8 ) 90 + 30 (n 2) (n = 2, 4, 6, 8 ) 90 + 50 (n 2) (n = 2, 4, 6, 8 )

Aluminum High Vacuum Angle Valve

0 o 83 0.2 2-1 112 q 114 90 O-ring Part No.

Magnetically Coupled Rodless Cylinder

(V), D-A93 (V), D-A96 (V) Auto Switch Specifications Grommet Electrical entry direction: Side D-A90, D-A90V (without indicator light) D-A90, D-A90V Auto switch part no.

Free Mount Cylinder

Auto Switch Specifications Grommet Electrical entry : In-line PLC: Abbreviation for Programmable Logic Controller D-A90/D-A90V (without indicator light) D-A90/D-A90V Auto switch part no.

ISO Cylinder

A90V A90 V V IC circuit Relay, PLC 24 V 12 V 2-wire Yes C73C A73C V V V V Connector No 24 V or less C80C A80C V V V V IC circuit Diagnostic indication (2-color indicator) Grommet Yes A79W V V 1 Water resistant type auto switches can be mounted on the above models, but SMC cannot guarantee water resistance.

Compact Cylinder

45 50 55 60 65 70 75 80 85 90 50 55 60 65 70 75 80 85 90 95 120 145 45 50 55 60 65 70 75 80 85 90 115 140 55 60 65 70 75 80 85 90 95 120 145 60 65 70 75 80 85 90 95 100 125 150 85 90 95 120 145 45 50 55 60 65 70 75 80 85 90 115 140 55 60 65 70 75 80 85 90 95 120 145 60 65 70 75 80 85 90 95 100 125 150 CQ-M5 x 85L x 90L x 95L x 120L x 145L CQ-M5 x 45L x 50L x 55L x 60L x 65L x 70L x 75L x

Air Cylinder Series CM2

(When the allowable interval is specified for each cylinder series, use the indicated value.) 2) If the internal resistance of a light emitting diode causes a problem, select a switch without an indicator light (D-A6, A80, A80H, A90, A90V, C80, R80, 90, E80A, Z80).

Smooth Cylinder/Low Speed Cylinder

95 100 105 110 135 160 75 80 85 90 95 100 105 110 115 140 165 85 90 95 100 105 110 115 120 125 150 175 50 55 60 65 70 75 80 85 90 95 120 145 55 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 130 155 CQ-M5 x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 120L x 145L CQ-M5 x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 100L x 125L x 150L CQ-M6 x 65L

Table of Contents

MHC Model MHT Note) Opening/Closing stroke (mm) Cylinder bore (mm) Rotating angle () Weight (g) MHY Action Model MHW 306 90 MRHQ10D 4 10 305 180 MRHQ 593 90 MRHQ16D 6 16 Misc. 591 180 Double acting 1055 90 MRHQ20D 10 20 D1052 180 1561 90 20MRHQ25D 14 25 1555 180 307 90 MRHQ10S MRHQ10C 4 10 306 180 MRHQ16S MRHQ16C 594 90 6 16 592 180 Single acting 1060 90 MRHQ20S MRHQ20C 10 20 1057 180 1566

Air Cylinder

Port side 90 When port is facing upward 50 Pivot bracket (T-bracket) 50 90 Port side Port side Double clevis cylinder 2. Push the one-touch connecting pin into the cylinder body (Double clevis) until it clicks and is firmly fastened.