CQS

Model C D 25 30 25 30 25 30 30 35 Mounting bolt M3 x 25l x 30l M3 x 25l x 30l M5 x 25l x 30l M5 x 30l x 35l CQSB12-5S -10S CQSB16-5S -10S CQSB20-5S -10S CQSB25-5S -10S Example) Bolt M3 x 25l 4 pcs. 6.5 Single acting, Spring return Single acting, Spring extend 6.5 Mounting bolt 6.5 Mounting bolt 8.5 Single Acting, Spring Extend Model C D 25 30 25 30 25 30 30 35 Mounting bolt M3 x 25l x 30l

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D-A90V OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT () Blue (g) Weight D-A93V D-A96 D-A96V D-A90 D-A90V D-A93 D-A93V Model 8 8 Lead wire length: 0.5 m 6 6 6 6 LED Brown (Red) OUT (+) Brown Contact protection box CD-P11 CD-P12 41 41 Lead wire length: 3 m 30 30 30 30 Resistor Reed switch Zener diode Dimensions OUT () Blue D-A90, D-A93, D-A96 Blue (Black) D-A96V DC (+)

CQS

Mounting bolt M3 X 25l X 30l M3 X 25l X 30l M5 X 25l X 30l M5 X 30l X 35l Model C D 25 30 25 30 25 30 30 35 CQSB125S 10S CQSB165S 10S CQSB205S 10S CQSB25-5S 10S 6.5 6.5 6.5 8.5 Single acting/Spring extend Mounting bolt M3 X 25l X 30l M3 X 25l X 30l M5 X 25l X 30l M5 X 30l X 35l Model C D 25 30 25 30 25 30 30 35 CQSB125T 10T CQSB165T 10T CQSB205T 10T CQSB255T 10T 6.5 6.5 6.5 8.5 Note) The

Compact Cylinder Series CQS

D 30 35 30 35 35 40 40 45 C CDQSB12-5S -10S CDQSB16-5S -10S CDQSB20-5S -10S CDQSB25-5S -10S M3 x 30L x 35L M3 x 30L x 35L M5 x 35L x 40L M5 x 40L 45L 6.5 6.5 Single acting, Spring return Single acting, Spring extend 6.5 Mounting bolt Mounting bolt 8.5 Single Acting, Spring Extend Cylinder model Mounting bolt size C D 30 35 30 35 35 40 40 45 CDQSB12-5T -10T CDQSB16-5T -10T CDQSB20-5T -10T

CATALOG

21 61 ASV410F-03-10S 10 R(PT)3/8 17 23.3 18.5 24 85.2 77.7 83.2 75.7 52.8 45.3 36.7 30.4 21 23 63 ASV510F-02-10S 10 R(PT)1/4 17 23.3 18.5 30 90.2 84.2 88.2 82.2 55.6 49.6 39.8 33.8 21 23 69 T H R E A D S E A L ASV510F-02-12S 12 R(PT)1/4 17 25.7 20.9 30 91.8 85.8 89.8 83.8 55.6 49.6 39.8 33.8 22 24 74 ASV510F-03-10S 10 R(PT)3/8 17 23.3 18.5 30 90.2 84.2 88.2 82.2 55.6 49.6 41.8 35.5 21 23

As the CDQ2B32-30DMZ-M9BW is a cylinder with 2 auto switches, be sure to order 2 D-M9BW auto switches if 2 are needed.

Free Mount Cylinder Series CU

Note 4) ( ) in column W is the dimensions of D-A93.

A

25 1.66 PS-03 8.94 25 20.2 24V/48V/100V AC/DC D-A80 D-A80H 2 Wire No 100V -0.076 ~ -0.04 9.53 0.74 41 1.66 PS-04 8.94 32, 40 36.2 Reed Switch D-A73C Yes 24V -0.076 ~ -0.05 12.7 1 50 1.9 PS-05 11.89 50, 63 44.2 D-A80C No 24V 24V -0.117 ~ -0.065 19.05 1.17 64 2.73 PS-08 17.89 80 56.2 D-A79W Yes 24V -0.117 ~ -0.065 22.23 1.17 72 2.73 PS-10 20.85 100 64.2 D-A90 2 Wire 24V/48V/100V AC/DC No D-A93

Parallel Style Air Gripper Series MHZ

MHZ2-25S/MHZL2-25S MHZ2-6S/MHZA2-6S 4 80 Pressure 0.7 MPa Pressure 0.7 MPa Gripping force (N) Gripping force (N) 0.6 MPa 3 60 F 0.6 MPa 0.5 MPa 0.5 MPa 2 40 0.4 MPa 0.4 MPa 0.3 MPa 1 20 0.3 MPa 0.25 MPa F 0 10 20 30 0 20 40 60 80 100 Gripping point L (mm) Gripping point L (mm) External Grip MHZ2-10S/MHZL2-10S MHZ2-32S MHZA2, MHZ2, MHZL2 12 250 Pressure 0.7 MPa 10 Pressure 0.7 MPa 200 0.6

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D-A90(V)/D-A93(V)/D-A96(V) Direct Mounting Style .

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

D-A90, A90V OUT () Brown Contact protection box CD-P11 CD-P12 Reed switch (g) Mass OUT () Blue D-A90 D-A90V D-A93 D-A93V D-A96 D-A96V Model D-A93, A93V 6 6 6 6 8 8 0.5 3 Lead wire length (m) LED Brown OUT (+) Brown 30 30 30 30 41 41 Contact protection box CD-P11 CD-P12 Resistor Dimensions (mm) Reed switch Zener diode D-A90/D-A93/D-A96 OUT () Blue 2 2.8 4.5 Blue 2.7 4 24.5 (22) D-A96, A96V

XG_-OMV0028

Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 : ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4., 5. 6. ,, 2 - / 1 1.5 () [] 3 - 1. 50mm336mm -6 Pa 10 MPa 0.450.6 -10 Pam 3/sec O :FKM 6.510 O :Kalrez R 4079 6.510 -9 Pam 3/sec -8 Pam 3/sec O :FKM 6.510 0.1MPa(abs) O :Kalrez R 4079 6.510 -7 Pam 3/sec -11 Pam 3/sec 6.510 5150() 560() s 0.61 *2 (D-A93

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

High Vacuum Slit Valve

Opening size 50336 : H 50mm,W 336mm Valve type 2 : Standard Cassette 3 : Half MESC Cassette The number of axes and sealing type 1 : axes and bellows Valve size 3 : for 300mm wafer Model of high vacuum slit valve Auto switch and connector Symbol Auto switch Connector NIL Not provided Not provided A D-A93 Lead wire length : 0.5m C Multi connector (C016 30C006 100 12 : AMP) (2 pcs in total,

Parallel Seal Type Slit Valve

Auto switch and the connector Parallel seal type slit valve Symbol Auto switch Connector Nil A Lead wire: 0.5m Multiple connector(AMP) *C016 30D006 100 12 made by AMP is recommended for the connector (female type) C D-A93 (2pcs) D-sub connector *CDE-9SF05 made by HIROSE ELECTRIC CO.,LTD. is recommended for the connector (female type). F 5 - 3.

Slit Valve

Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE

Magnet: D (Built-in), Mounting: B (Through Hole [Standard]), Bore Size: 32mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 10mm, Action: S (Single Acting, Spring Return)

Magnet: Built-in, Mounting: Through Hole [Standard], Bore Size: 32mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 10mm, Action: Single Acting, Spring Return, Body Option: -, Auto Switch Groove: -, Mounting Bolt: -, Rod End Bracket: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet: D (Built-in), Mounting: B (Through Hole, Both Ends Tapped), Bore Size: 20mm, Stroke: 10mm, Action: S (Single Acting Spring Return), Option: Standard (Rod End Female Thread), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M

Magnet: D (Built-in), Mounting: B (Through Hole, Both Ends Tapped), Bore Size: 12mm, Stroke: 10mm, Action: S (Single Acting Spring Return), Option: Standard (Rod End Female Thread), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M