High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

Compact Hydraulic Cylinder

Dimensions CHmKDBm-m-XC61m CHQ F with effective thread depth G CHKm Width across flats f CHN C CHM D d CHSm a CH2m Width across flats E b e g H CHA h + Stroke X with thread depth Y Note) J Related B + Stroke C Equipment Rod end male thread A + Stroke D-m A B C D d E F G H J X Y Bore size (mm) 20 53 43 10 12 11 10 M6 x 1 8 5.5 6.5 M6 x 1 12 25 56 45 11 14 13 12 M8 x 1.25 10 6.5 7.5 M6 x 1

Air Cylinder

-X Bore size B C GA LB NA WA S Z 10 15 17 7.5 16.5 21 14.4 66 122 16 18.3 20 7.5 23 21 14.4 67 123 Technical Data 69 CJ2W Series Flange (F) Stroke CJ2WF6 Z Mounting nut Piping port 2 x M5 x 0.8 Rod end nut NDh8 GA View E GA NN NN Cover surface C MM MM D 0 0.3 FB FY B FT 0 0.3 FZ FX 2 x FC Mounting hole NA S + Stroke Z + 2 x Stroke H + Stroke A F T A H F T NA B View E Stroke CJ2WF 10 16

NCQ2/CQ2

40 45 50 55 60 65 70 75 80 85 120 145 D D 35 40 45 50 55 60 65 70 75 80 115 C D 35 40 45 50 55 60 65 70 75 80 C Bolt part no.

Table of Contents

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

Table of Contents

0 r @4 e o t 16: 25 stroke MX 20, 25: 75 stroke or less !8 MTS !

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

Table of Contents

CX E A B C D D(mm) -X Model Applicable bore size A B C 12 15 25 D E F G H J M4 x 0.7 M4 x 0.7 M5 x 0.8 A B A B A B MY-S10 MY-S16 MY-S20 43.6 53.6 65.6 75 84 105 131 158 200 236 MY1B10 MY1B16 MY1B20 MY1B25 MY1B32 MY1B40 MY1B50 MY1B63 MY1B80 MY1B100 35 43 53 61 70 87 113 136 170 206 21 26 38 3.6 4.9 6.4 3.4 3.4 4.5 6.5 6.5 8 1.8 3 4 20Data A B MY-S25 50 8 5.5 35 M6 x 1 9.5 5 A B MY-S32 64

Compact Cylinder

D 35 40 45 50 55 60 65 70 75 80 115 140 45 50 55 60 65 70 75 80 85 120 145 50 55 60 65 70 75 80 85 90 125 150 D 55 60 65 70 75 80 85 90 95 130 155 65 70 75 80 85 90 95 100 105 140 165 Cylinder model C D 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 40 45 50 55 60 65 70 75 80 85 120 145 Mounting bolt part no. Cylinder model C Cylinder model C Mounting bolt part no.

Air Cylinder Series CM2

CD-S02 CD-S03 20, 25 32, 40 8 19.5 0.9 1.6 24.5 7.6 Type C 8 for axis B 10 29 1.15 1.35 34 9.6 Type C 10 for axis C D d Applicable bore size d H C B D Part no.

ISO Cylinder

set of a, b, c, e) (Screw: Stainless steel) BJ6-010S (A set of a, b, c, e) (Screw: Stainless steel) BJ6-012S (A set of a, b, c, e) (Screw: Stainless steel) BJ6-016S (A set of a, b, c, e) (Screw: Stainless steel) BM5-020S (A set of a, b, c, e) (Screw: Stainless steel) BM5-025S (A set of a, b, c, e) (Screw: Stainless steel) BM5-032S (A set of a, b, c, e) (Screw: Stainless steel) BM5-040S (A

Smooth Cylinder/Low Speed Cylinder

Cylinder model C D 50 55 60 65 70 75 35 40 45 50 55 60 65 70 75 80 D 30 35 40 45 50 55 30 35 40 45 50 55 30 35 40 45 Mounting bolt part no.

Air Cylinder

3 o e i !0 r !5 @0 !6 !4 @ A !7 !9 !8 @ B @ C Boss-cut Integrated clevis Spring extend t !2 u @1 y q !3 r !5 @0 !6 !0 i e o !4 !1 @ A !9 !8 @ B @ C !7 Boss-cut Integrated clevis Component Parts No.

Made to Order

(C) (C) (C) (C) (C) (C) Cushion valve CL1 1.

NCM

(F dimension=0.51") D Rod clevis C B A E J K L G F H (inch) Part no.

5

c, d, e) BMA3-040S (A set of b, c, d, e) BMA3-050S (A set of b, c, d, e) BMA3-063S (A set of b, c, d, e) RZQ Switch bracket (Resin) Transparent (Nylon) Note 1) Auto switch a e White (PBT) b Switch holder d Auto switch mounting screw c Auto switch mounting band * Band (c) is mounted so that the projected part is on the internal side (contact side with the tube).

Air Cylinder Series MB

Individual -X Technical data 293 Series MB Without Mounting Bracket Cushion valve Basic: (B) WV Port G 2 x P MM G With rod boot E E D e C B d H1 MB Effective thread 2 x 4 x J C B A K F N MA 10.2 10.2 f l N S + Stroke H h ZZ + Stroke Width across flats Stroke range (mm) Bore size (mm) Effective thread length S ZZ A C B D Ee11 F G H1 H MA MB J K MM N P V W 32 40 50 63 80 100 125 22 30 35 35

NCG/CG1

0 0.05 0 0.05 I E AL TE 2-TC K F TA DL2 TF TG A F S + Stroke H NA ZZ + Stroke TA cross section Manual release (Non-lock type): Suffix N Manual release (Lock type): Suffix L HN HR MO RF WL WL KA 0.1 C 8-J NA Stroke range Bore size (mm) A AL B1 C D DL2 E F GA GB H H1 HR HN (Max.)

Free Mount Cylinder

(g) Stroke (mm) Model 15 10 5 C(D)U6-S,T C(D)U10-S,T C(D)U16-S,T C(D)U20-S,T C(D)U25-S,T C(D)U32-S,T 28(38) 25(35) 22(27) 48(58) 40(50) 36(41) 71(101) 56(86) 50(75) 133(170) 106(143) 95(128) 235(294) 193(252) 176(230) 347(425) 286(364) 262(335) For the weight of auto switch, refer to page 68 to 72.

Electric Actuator/Slider Type

5 A-A t y @2 C B e @1 !0 C B r w C-C B-B !4 !2 Body Table !3 Component Parts No. Description Material Note No.