Table of Contents 10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o o g g 1 O-ring seals separate vacuum and atmosphere. t Employs a magnetically coupled rodless cylinder with no air leakage from moving parts. n 1 r a L L e e e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and low particulate
M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C
set of a, b, c, e) (Screw: Stainless steel) BJ6-010S (A set of a, b, c, e) (Screw: Stainless steel) BJ6-012S (A set of a, b, c, e) (Screw: Stainless steel) BJ6-016S (A set of a, b, c, e) (Screw: Stainless steel) BM5-020S (A set of a, b, c, e) (Screw: Stainless steel) BM5-025S (A set of a, b, c, e) (Screw: Stainless steel) BM5-032S (A set of a, b, c, e) (Screw: Stainless steel) BM5-040S (A
D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,
Dimensions CHmKDBm-m-XC61m CHQ F with effective thread depth G CHKm Width across flats f CHN C CHM D d CHSm a CH2m Width across flats E b e g H CHA h + Stroke X with thread depth Y Note) J Related B + Stroke C Equipment Rod end male thread A + Stroke D-m A B C D d E F G H J X Y Bore size (mm) 20 53 43 10 12 11 10 M6 x 1 8 5.5 6.5 M6 x 1 12 25 56 45 11 14 13 12 M8 x 1.25 10 6.5 7.5 M6 x 1
250-S (Refer to page 44 for both ends tapped and male thread dimensions.) 150 (1-1/2"), 200 (2"), 250 (2-1/2") P-port H-thread C-depth 4 places N-through hole Z Q J M2 bolt circle W M1 E I dia.
CD-S02 CD-S03 20, 25 32, 40 8 19.5 0.9 1.6 24.5 7.6 Type C 8 for axis B 10 29 1.15 1.35 34 9.6 Type C 10 for axis C D d Applicable bore size d H C B D Part no.
Applicable Cylinder Series: (N)CDQ2, (N)CDQ2W, (N)CDQ2www-wS/wT (Single acting), (N)CDQ2, (N)CDQ2W (Large bore size), (N)CDQ2K, (N)CDQ2KW, (Non-rotating rod), (N)CDQ2 (Long stroke), CDQ2wS (High lateral load) Auto switch type s e r u t a e F l e d o M e z i s e r o b e l b a c i l p p A y r t n e l a c i r t c e l E D-A72 D-A73 Grommet (Perpendicular) D-A80 Without indicator light D-A79W
5 A-A t y @2 C B e @1 !0 C B r w C-C B-B !4 !2 Body Table !3 Component Parts No. Description Material Note No.
(C) (C) (C) (C) (C) (C) Cushion valve CL1 1.
Individual -X Technical data 293 Series MB Without Mounting Bracket Cushion valve Basic: (B) WV Port G 2 x P MM G With rod boot E E D e C B d H1 MB Effective thread 2 x 4 x J C B A K F N MA 10.2 10.2 f l N S + Stroke H h ZZ + Stroke Width across flats Stroke range (mm) Bore size (mm) Effective thread length S ZZ A C B D Ee11 F G H1 H MA MB J K MM N P V W 32 40 50 63 80 100 125 22 30 35 35
(F dimension=0.51") D Rod clevis C B A E J K L G F H (inch) Part no.
3 o e i !0 r !5 @0 !6 !4 @ A !7 !9 !8 @ B @ C Boss-cut Integrated clevis Spring extend t !2 u @1 y q !3 r !5 @0 !6 !0 i e o !4 !1 @ A !9 !8 @ B @ C !7 Boss-cut Integrated clevis Component Parts No.
250(2 1/2") N-through hole P-port Z H-thread C-depth 4 places Q J E M2 bolt circle W M1 I dia.
Water Resistant Auto Switch With Auto Switch Made to Order -XA1 to XA23/-XA26 to XA30 Symbol: A13 Symbol: A14 Symbol: A16 Symbol: A15 C1 DA H H DA C1 DA C 30 30 C DA 30 30 X L X L X L X L C C Symbol: A17 Symbol: A18 Symbol: A19 Symbol: A20 30 30 H1 H1 30 30 H1 H1 X X L X L X K L F L Symbol: A21 Symbol: A22 Symbol: A26 Symbol: A23 RD DA 30 30 30 H1 30 DA H1 DA E H1 DB DB B C T T X W X
Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e i t n 1 r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and
connector CN6B MECHATROLINK-3communication connector CN7 PC connector CN8 Safety connector 140 (For LECYU-V5,V7) 170 (For LECYU-V8) B A D C q e CN6 A/B CN3 Note) Digital operator is JUSP-OP05A-1-E manufactured by YASKAWA Electric Corporation.
E B C CJ1 H1 H1 AL AL K A N F B1 K F A N H + Stroke S + Stroke Air release CJP B C H ZZ + 2 Strokes CJ2 With rod boot (One side) With rod boot (Both sides) CM2 e e e d d CG1 f 10.2 10.2 l MB f l f l + Stroke h + l + Stroke 10.2 h + l S + Stroke h + l ZZ + l + 2 strokes ZZ + 2l + 2 strokes MB1 (mm) Stroke range (mm) A Bore size (mm) AL B B1 C D E F G H1 J K KA M MM N Without rod boot With
Lx = 250 mm, Ly = 180 mm, Lz = 1000 mm 4.
Weight [g] JX-CIS-E-1-S 88 JX-CIS-E-3-S 164 JX-CIS-E-5-S 265 JX-CIS-E-10-S 517 JX-CIA-E-1-S 88 JX-CIA-E-3-S 164 JX-CIA-E-5-S 265 JX-CIA-E-10-S 517 Power supply cable JX CD E S S 1 Connector type Cable length 1 1.5 m 3 3 m 5 5 m 10 10 m Symbol Specifications S Straight A Right angled Connector type: Straight Pin no.