Table of Contents

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

Table of Contents

MGPM (Slide bearing) A, DB, E Dimensions MGPL (Ball bushing bearing) A, DB, E Dimensions A E DB A E DB Bore size (mm) Bore size (mm) 50 st 75 to 200 st 250 to 400 st 250 to 400 st 75 to 200 st 50 st 75 to 200 st 250 to 400 st 75 to 200 st 250 to 400 st 50 st 50 st 80 100 168.5 80 100 193 71.5 160 193 25 47 38.5 71.5 167 142 30 45.5 20.5 203 62 178.5 180 203 30 37.5 39 62 187 162 36 46 21

Table of Contents

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

Air Cylinder Series CM2

CD-S02 CD-S03 20, 25 32, 40 8 19.5 0.9 1.6 24.5 7.6 Type C 8 for axis B 10 29 1.15 1.35 34 9.6 Type C 10 for axis C D d Applicable bore size d H C B D Part no.

ISO Cylinder

set of a, b, c, e) (Screw: Stainless steel) BJ6-010S (A set of a, b, c, e) (Screw: Stainless steel) BJ6-012S (A set of a, b, c, e) (Screw: Stainless steel) BJ6-016S (A set of a, b, c, e) (Screw: Stainless steel) BM5-020S (A set of a, b, c, e) (Screw: Stainless steel) BM5-025S (A set of a, b, c, e) (Screw: Stainless steel) BM5-032S (A set of a, b, c, e) (Screw: Stainless steel) BM5-040S (A

Electric Actuator/Slider Type

5 A-A t y @2 C B e @1 !0 C B r w C-C B-B !4 !2 Body Table !3 Component Parts No. Description Material Note No.

NCQ8

Mounting bolt C D Mounting Bolt Size for NCQ8B056 to 250(Without Auto Switch) (Inch) Model C D Bolt size Model C D Bolt size NCQ8B056-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B075-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B106-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B150-012 025 037 050 062 075 087 100 125 150

Air Cylinder Series MB

Individual -X Technical data 293 Series MB Without Mounting Bracket Cushion valve Basic: (B) WV Port G 2 x P MM G With rod boot E E D e C B d H1 MB Effective thread 2 x 4 x J C B A K F N MA 10.2 10.2 f l N S + Stroke H h ZZ + Stroke Width across flats Stroke range (mm) Bore size (mm) Effective thread length S ZZ A C B D Ee11 F G H1 H MA MB J K MM N P V W 32 40 50 63 80 100 125 22 30 35 35

Air Cylinder

3 o e i !0 r !5 @0 !6 !4 @ A !7 !9 !8 @ B @ C Boss-cut Integrated clevis Spring extend t !2 u @1 y q !3 r !5 @0 !6 !0 i e o !4 !1 @ A !9 !8 @ B @ C !7 Boss-cut Integrated clevis Component Parts No.

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

[mm] Model L A B n C D E Without lock With lock LEJS63V-300656.5 696.5 306 370 6 1 200 180 LEJS63V-400756.5 796.5 406 470 8 2 400 80 LEJS63V-500856.5 896.5 506 570 8 2 400 180 LEJS63V-600956.5 996.5 606 670 10 3 600 80 LEJS63V-7001056.5 1096.5 706 770 10 3 600 180 LEJS63V-8001156.5 1196.5 806 870 12 4 800 80 LEJS63V-9001256.5 1296.5 906 970 12 4 800 180 LEJS63V-10001356.5 1396.5 1006 1070

NCQ8

(4") For 075, 106 For 300, 400 P-port 2 places 4 places Z Q Q N-through hole C-depth J E H-thread M2 bolt circle W M1 D-rod dia.

Magnetically Coupled Rodless Cylinder

Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e i t n 1 r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

15

(Recommended height 6 mm) Motor Mounting Dimensions [mm] Dimensions [mm] Model n C D E LEJS40N-200 6 1 200 80 LEJS40N-300 6 1 200 180 LEJS40N-400 8 2 400 80 LEJS40N-500 8 2 400 180 LEJS40N-600 10 3 600 80 LEJS40N-700 10 3 600 180 LEJS40N-800 12 4 800 80 LEJS40N-900 12 4 800 180 LEJS40N-1000 14 5 1000 80 LEJS40N-1200 16 6 1200 80 Motor type n FA FB FD NZ/Mounting type Z 2 M4 x 0.7 7 46 NY/

Made to Order

(C) (C) (C) (C) (C) (C) Cushion valve CL1 1.

NCG/CG1

0 0.05 0 0.05 I E AL TE 2-TC K F TA DL2 TF TG A F S + Stroke H NA ZZ + Stroke TA cross section Manual release (Non-lock type): Suffix N Manual release (Lock type): Suffix L HN HR MO RF WL WL KA 0.1 C 8-J NA Stroke range Bore size (mm) A AL B1 C D DL2 E F GA GB H H1 HR HN (Max.)

Integrated Controller

Weight [g] JX-CIS-E-1-S 88 JX-CIS-E-3-S 164 JX-CIS-E-5-S 265 JX-CIS-E-10-S 517 JX-CIA-E-1-S 88 JX-CIA-E-3-S 164 JX-CIA-E-5-S 265 JX-CIA-E-10-S 517 Power supply cable JX CD E S S 1 Connector type Cable length 1 1.5 m 3 3 m 5 5 m 10 10 m Symbol Specifications S Straight A Right angled Connector type: Straight Pin no.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

C D depth E F F (B) MHZ MHF D MHL MHR (E) MHK F-F MHS MHC MHT (mm) MHY D E 0.5 A Model MHS3-16D MHS3-20D MHS3-25D MHS3-32D MHS3-40D MHS3-50D MHS3-63D MHS3-80D MHS3-100D MHS3-125D B C 12.5 15 17 21 22 26 33 40 54 62 +0.027 0 21H8 +0.033 0 23H8 +0.033 0 27H8 +0.033 0 31H8 +0.039 0 35H8 +0.039 0 42H8 +0.039 0 52H8 +0.046 0 70H8 +0.046 0 82H8 +0.054 0 5.5 18H8 MHW 0.6 M2 x 0.4 5.4 -X 5.2 0.8

Air Cylinder Series CA2

E B C CJ1 H1 H1 AL AL K A N F B1 K F A N H + Stroke S + Stroke Air release CJP B C H ZZ + 2 Strokes CJ2 With rod boot (One side) With rod boot (Both sides) CM2 e e e d d CG1 f 10.2 10.2 l MB f l f l + Stroke h + l + Stroke 10.2 h + l S + Stroke h + l ZZ + l + 2 strokes ZZ + 2l + 2 strokes MB1 (mm) Stroke range (mm) A Bore size (mm) AL B B1 C D E F G H1 J K KA M MM N Without rod boot With

Mechanically Jointed Rodless Cylinder Series MY1

. 25) 5.5 22 87 12 82 15 31 100 8 73.2 15 RB2015 4 57 22 74 970 Series MY1B Mechanically Jointed Rodless Cylinder Basic Type Side Support Side support A MY-SA 2 x G 2 x H F MY1B E C D A B MY1M Side support B MY-SB MY1C MY1H 2 x J MY1HT MY1W E A B C D MY2C (mm) MY2H B C D 21 E 3.6 F 1.8 G 6.5 H 3.4 J A 35 Model Applicable bore size MY1B 10 MY1B 16 MY1B 20 MY1B 25 MY1B 32 MY1B 40 MY1B 50 MY1B