2

Dimensions P.386 Spare Parts P.390 KQ2 Metric size P.383 KDM6 How to Order P.392 Variations P.393 Dimensions P.394 KDM Metric size P.391 How to Order P.404 Variations P.405 Dimensions P.406 Inch size P.403 How to Order P.414 Variations P.415 Dimensions P.416 Inch size P.413 Gasket Seal (Uni Thread) Connection thread Applicable tubing Rc G NPT NPTF How to Order P.420 Variations P.421 Dimensions

Table of Contents

AC DC Cv converted Av x 106 (m2) C.O. 0 2 4 0 2 4 0 2 4 0 2 4 0 2 4 0.6 0.3 0.2 0.6 0.3 0.6 1.0 0.2 0.3 0.6 0.15 0.3 0.6 1.0 0.3 0.6 0.15 0.3 1.5 1.0 0.5 0.3 1.0 0.5 1.9 3.8 5.8 1.9 3.8 0.08 0.16 0.24 0.08 0.16 VX311 -01 VX312 -01 VX313 -01 VX311 -02 R P 1/8 (6A) 2.2 3 1.5 N.O. 330 A VX312 -02 VX3224-02 550 700 330 550 700 550 700 550 700 550 700 550 700 2.2 R P 4.6 0.19 C.O. 0.3 VX3324

Battery-less

/Belt Drive LEFB Series Battery-less Absolute (Step Motor 24 VDC) p. 12 Model Selection p. 13 How to Order p. 43 Specifications p. 45 Weight p. 45 Construction p. 46 Dimensions p. 47 Rod Type LEY Series Battery-less Absolute (Step Motor 24 VDC) p. 54 Model Selection p. 55 How to Order p. 61 Specifications p. 63 Weight p. 64 Construction p. 65 Dimensions p. 67 Guide Rod Type

Table of Contents

P P1 or Step 2 Step 3 Model selection based on corrected outlet flow rate HA Review operating conditions or increase size. YES In the case of IDG30 and IDG30M (with the element in the initial state), P P1, therefore proceed to Step 7 .

LJ1H

P N Ground ball screw Rolled ball screw Specifications Combinations other than the above cannot be manufactured.

Thermo-chiller/Rack Mount Type

Mounted p. 34 Air-cooled Refrigeration (Single-phase 100/115 VAC) p. 13 With Feet/Without Rack Mounting Brackets p. 35 Water-cooled Refrigeration (Single-phase 100/115 VAC) p. 13 Removed Parts p. 35 HRR012/018/024/030 How to Order VOptional Accessories Air-cooled Refrigeration (Single-phase 200 to 230 VAC) p. 14 qConcentration Meter p. 36 Water-cooled Refrigeration (Single-phase

1

P.43 P.43 P.71 SY70 SY30 Manifold Top ported Bottom ported Top ported Type 51 SY50 From page 43 P.43 P.43 P.71 P.43 SY70 SY33 Type 52 SY53 From page 63 P.63 P.63 P.81 P.63 SY73 SY30 Type 10 SY50 From page 95 P.95 P.95 P.113 P.143 P.163 P.171 P.179 P.187 P.95 P.123 P.133 P.151 SY70 Type 11 SY50 From page 95 P.95 P.95 P.143 P.163 P.171 P.179 P.187 P.95 P.113 P.123 P.133 P.151 SY70 SY33 Type

CATALOG

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

Integrated Controller

p. 44 Construction p. 46 Dimensions p. 47 Auto Switch Mounting p. 29, 53 Solid State Auto Switch, Normally Closed Solid State Auto Switch, 2-Color Indicator Solid State Auto Switch p. 30, 54 e-Actuator Electric Specifications p. 59 Wiring Examples p. 60 Operation Data Setting p. 61 Options p. 62 Slider Type Specific Product Precautions p. 33 Rod Type Specific Product Precautions

Electric Actuator/Slider Type

LECSS2-T Front view example Main Circuit Power Supply Connector: CNP1 Accessory L1 Terminal name Function Details L2 L3 N() Control Circuit Power Supply Connector: CNP2 Accessory P3 Terminal name Function Details P(+) Regeneration option Connect between P(+) and D. (Connected at time of shipping.) If regeneration option is required for Model Selection, connect to this terminal.

2/3 Port Valve

R P A Energized closed (N.O.) R P A Common (C.O.)

LEH_C

/LEHZJ /P.17 3.1 /LEHF /P.20 4.1 /LEHS /P.10 2.1.1 /LEHZ /P.13 2.2.1 /LEHZJ /P.17 3.1 /LEHF /P.20 4.1 /LEHS 3) 4) /P.50 8.3 5) () /P.53 8.3 6) /P.39 6. 7) 8) () 0 /P.28,30 9) () /P.28,30 () 10) /P.28,30 INC/ () 29 - No. 2 / 1)() () () 2)IN* 15ms( No.

Proposals for Energy Saving

(P .E.)

A

I L O T O P E R AT E D P R E S S U R E R E G U L AT O R ACCESSORIES P I L O T O P E R AT E D P R E S S U R E R E G U L AT O R Mounting Bracket B24 NAR425 B25 NAR625 S Y M B O L S Bracket Dimensions Bracket No.

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Port size Rc1/4, NPT1/4, G1/4(ISO1179) U P DOWN U P DOWN U P DOWN SET SET SET Model with initial display settings of PSI is also available as standard.

IZx-OMT0049

Angle K 5 Z 10 M 10 P 0.5 DIN rail bracket Q 1 2 3 5 Symbol Type R Angle Nil None S T W Include Z 10 1-2-2.

Refrigerated Air Dryers Series IDF/IDU

254 R 1 IDFA37E R 11/2 347 273 382 P. 65 to 67 R407C (HFC) IDFA55E 432 390 510 R 2 IDFA75E 720 660 822 2.

15

LAT LZ LC3F2 Weight Model LEFS25 Stroke [mm] 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 Product weight [kg] 1.50 1.70 1.80 2.00 2.10 2.25 2.40 2.55 2.70 2.80 2.90 3.10 3.35 3.50 3.65 3.80 Model LEFS32 Stroke [mm] 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 Product weight [kg] 2.40 2.60 2.80 3.00 3.20 3.40 3.60 3.80 4.00 4.20 4.40 4.60

1.1

P. 195 Specified CFC P. 192 SV P. 196 T Temperature fuse P. 196 Thermal relay P. 198 Thermistor P. 196 Thermo couple P. 196 Thermoelectric device P. 193 Thermoelectric system P. 193 Thermo-module P. 193 Thermostat P. 196 Three-phase power supply P. 198 Time division proportional output P. 197 Turbine pump P. 194 U UL standards P. 199 V Vane pump P. 194 Vortex pump P. 194 W Water control

Hydraulic

Bore size (mm) NN P S X Y ZZ 20 M22 x 1.5 1/8 81 20 9 151 25 M24 x 1.5 1/8 81 20 9 156 32 M30 x 1.5 1/8 87 23 9 172 40 M33 x 2 1/4 108 25 11 198 49 Round Type Low Pressure Hydraulic Cylinder: 3.5MPa Series CHM Front flange type: CHMF Width across flats B2 Width across flats B1 N GA GB Rc P N Rc P 4-FD H1 H2 2-NN I IA D FY B MM Effective thread K F NB Width across flats NA NC FT A FX H S +