SMC Corporation of America
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Individual -X Technical data 293 Series MB Without Mounting Bracket Cushion valve Basic: (B) WV Port G 2 x P MM G With rod boot E E D e C B d H1 MB Effective thread 2 x 4 x J C B A K F N MA 10.2 10.2 f l N S + Stroke H h ZZ + Stroke Width across flats Stroke range (mm) Bore size (mm) Effective thread length S ZZ A C B D Ee11 F G H1 H MA MB J K MM N P V W 32 40 50 63 80 100 125 22 30 35 35

How to Order LEFS 25 H R B E 200 C N K R1 CD17T q w e r t u y i o !0 !1 !

+ Stroke B + Stroke A + Stroke WA Z JB 6H7 depth 10 FB FA S K E G With head end lock 7 6H7 HN 10 5 6H7 DM 23 b a Detailed figure of section XX T-slot dimensions e c d End lock mechanism (Manual release lock type) 30 Bore size (mm) e d c a b With rod end lock 80 22.5 8 12 13.3 20.3 100 30 10 13.5 15.3 23.3 Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA J JA JB K L 80 146.5

10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o o g g 1 O-ring seals separate vacuum and atmosphere. t Employs a magnetically coupled rodless cylinder with no air leakage from moving parts. n 1 r a L L e e e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and low particulate

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

inlet (D) Port size (B) Port size (E) (A) (A) (B) (D) IDG (C) (C) Dimensions (mm) Applicable air dryer Port size Rc A B C Weight (kg) D E Part no.

www.stevenengineering.com A C T U AT O R S P R O D U C T S E L E C T O R PA G E 1.1 VA LV E S P R O D U C T S E L E C T O R PA G E 2.1 F L O W C O N T R O L E Q U I P M E N T P R O D U C T S E L E C T O R PA G E 3.1 F I T T I N G S A N D T U B I N G P R O D U C T S E L E C T O R PA G E 4.1 A I R P R E PA R AT I O N P R O D U C T S E L E C T O R PA G E 5.1 VA C U U M P R O D U C T S E L E

(Recommended height 5 mm) Dimensions [mm] Stroke L A B n D E 150 389 156 328 4 150 200 439 206 378 6 2 300 250 489 256 428 6 2 300 300 539 306 478 6 2 300 350 589 356 528 8 3 450 400 639 406 578 8 3 450 450 689 456 628 8 3 450 500 739 506 678 10 4 600 550 789 556 728 10 4 600 600 839 606 778 10 4 600 650 889 656 828 12 5 750 700 939 706 878 12 5 750 750 989 756 928 12 5 750 800 1039 806

connector CN6B MECHATROLINK-3communication connector CN7 PC connector CN8 Safety connector 140 (For LECYU-V5,V7) 170 (For LECYU-V8) B A D C q e CN6 A/B CN3 Note) Digital operator is JUSP-OP05A-1-E manufactured by YASKAWA Electric Corporation.

Weight [g] JX-CIS-E-1-S 88 JX-CIS-E-3-S 164 JX-CIS-E-5-S 265 JX-CIS-E-10-S 517 JX-CIA-E-1-S 88 JX-CIA-E-3-S 164 JX-CIA-E-5-S 265 JX-CIA-E-10-S 517 Power supply cable JX CD E S S 1 Connector type Cable length 1 1.5 m 3 3 m 5 5 m 10 10 m Symbol Specifications S Straight A Right angled Connector type: Straight Pin no.

Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e i t n 1 r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

Connector for unit (Plug) 6 y t y t EX600-DXlB EX600-DYlB EX600-DXlCl q w q w e q w er e y t y t y t EX600-DXlD EX600-DXlE EX600-DYlE EX600-DMlE EX600-DXlF EX600-DYlF EX600-DMlF Analog Unit q w e q w e No.

motor Symbol [mm] 30 50 100 150 200 250 300 350 400 450 500 A B C 12 900 450 225 600 300 150 LEY25; 100 W 6 3 Motor mounting position: /;40 Top mounting/In-line (4500 rpm) (3000 rpm) (Motor rotation speed) A B C 20 10 1200 800 400 200 LEY32 200 W 600 300 Motor mounting position: /;60 5 Top mounting (3600 rpm) (2400 rpm) (Motor rotation speed) A B C 16 1000 640 320 160 LEY32D 200 W 8 4 500

E B C CJ1 H1 H1 AL AL K A N F B1 K F A N H + Stroke S + Stroke Air release CJP B C H ZZ + 2 Strokes CJ2 With rod boot (One side) With rod boot (Both sides) CM2 e e e d d CG1 f 10.2 10.2 l MB f l f l + Stroke h + l + Stroke 10.2 h + l S + Stroke h + l ZZ + l + 2 strokes ZZ + 2l + 2 strokes MB1 (mm) Stroke range (mm) A Bore size (mm) AL B B1 C D E F G H1 J K KA M MM N Without rod boot With

boot 2-P (Rc, NPT, G) 4-LD G G 4-J 2-cushion valve MM B1 Width across flats KA FV FY E D B e H1 AL B C f h + l l H A F N K N 9 FT S + Stroke FZ FX ZZ + l + Stroke ZZ + Stroke Stroke range (mm) A Bore size (mm) B B FV FD FX FY C AL B1 D E F FT FZ G H1 J Without rod boot With rod boot Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588

I L S C R A P E R X C 3 5 O P T I O N A C C E S S O R I E S S E R I E S N C Q 2 / C Q 2 C O I L S C R A P E R X C 3 5 O P T I O N Air XC35 D (N)CQ2 Bore Size 32, 40, 50, 63, 80, 100 Fluid S T R O K E M O U N T I N G B O R E S I Z E Thread Pitch M3 0.5 A C C E S S O R I E S M O U N T I N G K I T S S E R I E S N C Q 2 / C Q 2 A C C E S S O R I E S M O U N T I N G B O L T F O R S E R I E S

6. 6-6-19 19 Series MBW With Mounting Bracket Basic: (B) 2-P G MM MM G VW Cushion valve Port E D D e A K F N MA MB Effective thread Effective thread 2 x 4-J C 13 B N F A K f 9 l S + Stroke H H + Stroke h ZZ + 2 Stroke 2-RcP G G MM MM With rod boot D e e Effective thread Effective thread Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650