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1

Manifold overall length Manifold overall length Approx. 29% reduced SY5000 manifold SY5000 3 stations SY3000 manifold SY3000 4 stations Mixed manifold SY5000 3 stations SY3000 4 stations For serial transmission EX260 A B A B A B A B A B A B A B A B A B A 14 A B A 14 A B A 14 A B A 14 A B A 14 A B A 14 Installation space A A A A A A A A B B B B B B B B 12 B 12 B 12 B 12 B 12 B 12 B 136.7 mm

CJ2

B A B A B A B A 2 (8.5) B 2 (0.5) A 1 (7.5) B 1 (0) A 6 0 0.5 0 0.5 3 3.5 3 3.5 3.5 4 3.5 4 7.5 8 7.5 8 0.5 1 0.5 1 10 16 2.5 3 2.5 3 1.5 2 1.5 2 ( ) in the table: In case of double rod style, series CJ2W.

CJ2

B B A B A A B B A 1 (0) 1 (7.5) 2 (0.5) 2 (8.5) 6 CJ1 10 16 1.5 2 1.5 2 2.5 3 2.5 3 3 3.5 3 3.5 3.5 4 3.5 4 0.5 1 0.5 1 CJP Figures in parentheses for bore 6 are in the case of double rod type, (Series CJ2W).

7

set of a, b, c, d) BMA3-050 (A set of a, b, c, d) BMA3-063 (A set of a, b, c, d) CKQ D-M9ANote 2) BMA3-040S (A set of a, b, c, e) BMA3-050S (A set of a, b, c, e) BMA3-063S (A set of a, b, c, e) Auto switch Switch bracket (Resin) Transparent (Nylon)Note 1) d e White (PBT) c Switch holder b Auto switch mounting screw a * Band (a) is mounted so that the projected part is on the internal side

Table of Contents

L M9NL Refer to page 12-13-1 for further information on auto switches. Auto switches marked with a "" are made upon receipt of order.

High Vacuum Angle Valve

Example) -M9NL !

Free Mount Cylinder

Although a zener diode for surge protection is connected at the output side of a solid state auto switch, damage may still occur if a surge is applied repeatedly. When directly driving a load which generates a surge, such as a relay or solenoid valve, use a switch with a built-in surge absorbing element. 7.

Aluminum High Vacuum Angle Valve

Example) -M9NL !

NCG/CG1

D-M9 A/D-M9 AV (With indicator light) D-M9NAV V A B 9 M D A B 9 M D A N 9 M D D-M9PAV D-M9PA Auto switch part no.

MHZ

Use the table below as a guide when adjusting auto switch positions, etc.

MHZ

Use the table below as a guide when adjusting auto switch positions, etc.

NCQ8

B A HS 056 HS B A B A 075, 106 HS B A B A 150, 200, 250 Note 1) Figures in the table below are references for auto switch mounting positions in the stroke end detection.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

A B High precision type Basic type Port location Nil E Side ported Front ported Size 1 2 3 7 A With adjustment bolt Dimensions Clean series products do not have a hollow axis.

XM, XY

A (mm) Model A 110 120 171 B 38 48 66 C 1 1 2 D 30 40 55 Fn 34 70 Fc 17 26 41 G 40 39 63 H J P.C.D L1 6 x 4.4 6 x 6.6 L2 XMC-16 XMC-25 XMC-40 40 50 65 26 28 36 P.C.D 27 P.C.D 58.7 XMC-50 to 80/Angle type C L2 D Fd Fc L1 (KF flange) Fn C (K flange) (CF flange) H J K B G A A (mm) Model A 183 209 250 B 80 100 117 C 31 39 45.5 D 75 87 114 Fn 95 110 Fd 114 Fc 52 70 83 G 77 76.5 105 H J K

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-M9NL 7.

The number of the switches: N/A, Type of Auto Switch Mounting: Rail mounting, Head Cover Port Position: 90° to axis, Pivot Bracket: Without bracket, Rod End Bracket: Without bracket, Type of Mount Support: Basic type, Custom-made Specifications: None, Lock unit magnet: Built-in magnet