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3 2 B 2 B 2 B 2 B 2 B PCI BUS IN BUS OUT 8 7 1 2 3 4 5 Valve stations For N, sizes are in inches.

Table of Contents

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

High Vacuum Angle Valve

Example) -M9NL !

Free Mount Cylinder

Material NBR Silicon rubber Urethane rubber Fluoro rubber Conductive NBR (2 to 16 only) Conductive silicon rubber (2 to 16 only) N S U F GN GS Material N S U F GN NBR Silicon rubber Urethane rubber Fluoro rubber Conductive NBR (2 to 16 only) Conductive silicon rubber (2 to 16 only) Pad type Flat Flat with ribs Deep Bellows (Except -X11) U C D B Table (1) Pad Dia./Pad Type Dia.

NCG/CG1

D-M9 A/D-M9 AV (With indicator light) D-M9NAV V A B 9 M D A B 9 M D A N 9 M D D-M9PAV D-M9PA Auto switch part no.

Aluminum High Vacuum Angle Valve

Example) -M9NL !

MHZ

Model Opening/ Closing stroke (Both sides) (mm) Gripping force (1) Bore size (mm) Gripping force per finger Effective value (N) Weight (2) (g) Action Model External Internal MHZ2-6D MHZ2-10D (N) MHZ2-16D (N) MHZ2-20D (N) MHZ2-25D (N) MHZ2-32D MHZ2-40D MHZ2-6S MHZ2-10S (N) MHZ2-16S (N) MHZ2-20S (N) MHZ2-25S (N) MHZ2-32S MHZ2-40S MHZ2-6C MHZ2-10C (N) MHZ2-16C (N) MHZ2-20C (N) MHZ2-25C (N) MHZ2

MHZ

9@0@1 Seal kit MHZ2-(N) MHZ2-(N)1 MHZ2-(N)2 MHZ2-3 MHZ2-D MHZ2-S MHZ2-C MHZ2-DW MHZ2-K MHZ2-M MHZ2-E rty!1!3 Mounting screw MHZ-A1002(N)-1 MHZ-A1602(N)-1 MHZ-A2002(N)-1 MHZ-A2502(N)-1 Finger assembly MHZ-A1002(N)-2 MHZ-A1002-3 MHZ-A1602(N)-2 MHZ-A1602-3 MHZ-A2002(N)-2 MHZ-A2002-3 MHZ-A2502(N)-2 MHZ-A2502-3 MHZ-A4003 MHZ-A3203 MHZ-A1003 MHZ-A1603 MHZ-A2003 MHZ-A2503 Piston assembly wo!0!

NCQ8

switch Built-in magnet Number of auto switches Mounting Through-hole Both end tapped Rear clevis Front screw clearance hole Rear screw clearance hole Through screw clearance hole B A C E M N Nil S n 2 pcs. 1 pc. n pcs.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Positioning pin hole Counterclockwise 5 Adjustment bolt A 5 (For counterclockwise rotation end adjustment) 9 22 CRB2 e B port .5 g Adjustment bolt B n ra (For clockwise rotation end adjustment) nt CRBU2 e m e st is w u dj k CRB1 c a e o is d cl w C A port B port n k er c lo o e l Clockwise C a nt c n dj k u o w 0 MSU o u ti is C st ta e 19 m ro ro ta e ti o d n n e nt e ra ng n 5 g e 9 ra

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Contents 20 MGP20-B-PS Set of nos. above @4, @5, @6, @7, #5, $4, $5 50 MGP50-B-PS Set of nos. @4, @5, @6, @7, above #5, #6, $4, $5 63 MGP63-B-PS 80 MGP80-B-PS Set of nos. @4, @5, @6, @7, above $4, $5 100 MGP100-B-PS 25 MGP25-B-PS 32 MGP32-B-PS 40 MGP40-B-PS *: Each seal kit includes the parts listed above.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-M9NL 7.

Table of Contents

B Number of auto switches Mounting style Nil S n 2 pcs. 1 pc. n pcs.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

A B A B A B C D Normally closed (NC = b contact), solid state switch (D-F9G/F9H type) are also available.

Rotary Gripper Series MRHQ

"#$ " %# &'# D t D D t t c c e c e e u u u s s s d d d i i i Rotary Gripper g g g o o o n n n r r r P P P A A A 9 9 9 MRHQ 10/16/20/25 w w w 9 9 m 9 I m I 1 1 n 9 9 9 9 n 9 9 d u d u r u a a a r u 9 o 9 9 s o s F tr F ie tr ie r r r 1 1 1 Modular construction D r D r d d d e e e e v v s s o o i i n g n g n n n n a a H H n P n P g g r r Gripper section is unitized for simple replacement.