High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

Aluminum High Vacuum Angle Valve

XLS-16XLS16-20-G, C, T, D XLS-16-P XLS16-20-PG XLS-25XLS25-20-G, C, T, D XLS-25-P XLS25-20-PG Description Construction No. w y r e-1 e-2 Coil assembly Core assembly Armature assembly O-ring O-ring XLS25-30-1 XLS25-30-2 AS568-018V AS568-030V XLS16-30-1 XLS16-30-2 AS568-018V AS568-025V 465 b

Free Mount Cylinder

(g) Stroke (mm) Model 60 40 30 25 20 15 10 5 50 70 80 90 100 27 (32) 30 (40) 34 (44) 37 (47) 40 (50) 44 (54) 51 (61) 58 (68) 65 (75) C(D)UW6-D 44 (49) 49 (59) 53 (63) 58 (68) 62 (72) 67 (77) 76 (86) 85 (95) 94 (104) C(D)UW10-D 74 (99) 81 (111) 88 (118) 95 (125) 102 (132) 109 (139) 123 (153) 137 (167) 151 (181) C(D)UW16-D 132 (165) 145 (182) 158 (195) 171 (208) 184 (221) 197 (234) 223 (260

NCG/CG1

A MM A1 E1 L1 NX NDH10 Type C 12 for axis 0.050 0.093 Type C 14 for axis 0.050 0.093 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 16 20 22 28 38 44 20 25, 32 40 50, 63 80 100 8.5 10.5 14 18 21 21 25 30 30 40 50 55 M8 x 1.25 34 41 42 56 71 79 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 18 22 28 32 8 10 10 14 18 22 +0.058 0 0.2 0.4 Type C 16 for axis 0.050 0.093 M10 x 1.25 +0.058 0 0.2 0.4 Type C

MHZ

K 7 12f8 40 11 15 D2 0.016 0.043 MHZJ2-16S C K 10 16f8 43.5 15 20 0.020 0.053 MHZJ2-20S C K 12 20f8 51.7 19 22 D1 0.020 0.053 MHZJ2-25S C K 15 25f8 61.3 24 25 Other dimensions and specifications correspond to the standard type.

MHZ

K 7 12f8 40 11 15 D2 0.016 0.043 MHZJ2-16S C K 10 16f8 43.5 15 20 0.020 0.053 MHZJ2-20S C K 12 20f8 51.7 19 22 D1 0.020 0.053 MHZJ2-25S C K 15 25f8 61.3 24 25 Other dimensions and specifications correspond to the standard type.

XM, XY

Valve side exhaust 493 XMH, XYH Series Dimensions XMH/Angle type C D L2 (KF flange) Fn Fc C (Fc) L1 (CF flange) H J B G A A (mm) Model A 100.5 114 162.5 179.5 B 38 48 66 79 C 1 1 2 2 D 30 40 55 75 Fn 34 70 Fc 17 26 41 52 G 35 40.5 57 70 H 18 21.5 30 35 J P.C.D L1 6 x 4.4 6 x 6.6 L2 XMH-16 XMH-25 XMH-40 XMH-50 40 50 65 70 P.C.D 27 P.C.D 58.7 XYH/In-line type D C G C H B J E A Fn (KF

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Positioning pin hole Counterclockwise 5 Adjustment bolt A 5 (For counterclockwise rotation end adjustment) 9 22 CRB2 e B port .5 g Adjustment bolt B n ra (For clockwise rotation end adjustment) nt CRBU2 e m e st is w u dj k CRB1 c a e o is d cl w C A port B port n k er c lo o e l Clockwise C a nt c n dj k u o w 0 MSU o u ti is C st ta e 19 m ro ro ta e ti o d n n e nt e ra ng n 5 g e 9 ra

NCQ8

L M9NL 197in (5 m) .

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-M9NL 7.

Table of Contents

Q G C 22 30 35 37 0.5 Graph (2) Applicable Max.

Rotary Actuated Air Gripper MHR2, MDHR2/MHR3, MDHR3

, when both fingers and attachments are in full contact with the workpiece as shown in the figure below. 50 50 Pressure Pressure 0.6 MPa 0.6 MPa 40 40 Gripping force (N) Gripping force (N) 0.5 MPa 0.5 MPa 30 30 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 20 20 0.2 MPa 0.2 MPa 10 10 0 10 20 30 40 50 0 10 20 30 40 50 60 70 60 70 Gripping point L (mm) Gripping point L (mm) MHR2-30/MDHR2-30 MHR2-30/MDHR2

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

30 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 20 20 0.2 MPa 0.2 MPa 10 10 0 10 20 30 40 50 0 10 20 30 40 50 60 70 60 70 Gripping point L (mm) Gripping point L (mm) MHR2-30/MDHR2-30 MHR2-30/MDHR2-30 80 80 Pressure 0.6 MPa 0.6 MPa Pressure 70 70 F F 0.5 MPa 0.5 MPa Gripping force (N) Gripping force (N) 60 60 50 50 0.4 MPa 0.4 MPa 40 40 0.3 MPa 0.3 MPa 30 30 0.2 MPa 0.2 MPa 20 20 10 10 0 10 30 50 0 10

Table of Contents

(g) Stroke (mm) Model 60 40 30 25 20 15 10 5 50 70 80 90 100 27 (32) 30 (40) 34 (44) 37 (47) 40 (50) 44 (54) 51 (61) 58 (68) 65 (75) C(D)UW6-D 44 (49) 49 (59) 53 (63) 58 (68) 62 (72) 67 (77) 76 (86) 85 (95) 94 (104) C(D)UW10-D 74 (99) 81 (111) 88 (118) 95 (125) 102 (132) 109 (139) 123 (153) 137 (167) 151 (181) C(D)UW16-D 132 (165) 145 (182) 158 (195) 171 (208) 184 (221) 197 (234) 223 (260

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

For detailed specifications, refer to page 8-30-1.

Rotary Gripper Series MRHQ

40 50 0 10 20 30 40 50 60 Gripping point L mm Gripping point L mm MRHQ16S MRHQ16C 60 Pressure 0.7MPa 40 Pressure 0.7MPa 50 0.6MPa 0.6MPa 40 30 Gripping force N Gripping force N 0.5MPa 0.5MPa 30 0.4MPa 20 0.4MPa 20 0.3MPa 0.3MPa 10 10 MHZ 0.25MPa 0.25MPa 0 10 20 30 40 50 60 0 10 20 30 40 50 60 MHF Gripping point L mm Gripping point L mm MHL MRHQ20S MRHQ20C 50 100 Pressure 0.7MPa Pressure

XLAQ/XLDQ

Example) -M9NL Symbol Nil A B C Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

Shock Absorbers and Rate Controls

-l klerded (Nl (rn?

Title not found

*{b-40-**+-'o.or 1 : rN)c0r 80 1oo tlnJ' -*--*-*--33 13 = cQ2L:s 5 s'F ."-"c" :^''^" *'."' -.t;^'."d;-:.df o,r's!.4 d.!

CJ2

Applicable bore (mm) B H C d Part no.