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Table of Contents

to 100 MGPL32 to 100 i !

CATALOG

-080-24A 80 36 11 72 85 45 110 CG-100-24A 100 50 12 93 100 60 130 Courtesy of Steven Engineering, Inc. !

A

-080-24A 80 36 11 72 85 45 110 CG-100-24A 100 50 12 93 100 60 130 Courtesy of Steven Engineering, Inc. !

CQS

Rubber bumper is standard equipment for long stroke type. 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 Action 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 D Double acting 25 For "Manufacture of Intermediate Strokes", refer to page 7-4-5. Applicable Auto Switch/Refer to page 7-9-1 for further information on auto switches.

CQS

Thus, it can be used in a Class 100 clean room.

Magnet: D (Built-in), Series: BA2 (with End Lock), Mounting: F (Front Flange), Tube Material: Aluminum Tube, Bore Size: 40mm, Port Thread: Rc, Stroke: 100mm, Rod Boot: w/o Gaiter w/Cushion Both Sides, Cushion: Air Cushion, Lock Position: H (Rear Locking), Release Type: N (Non-locking Type)

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Cushion: Air cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Built-in magnet, Port

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Cushion: Air cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Built-in magnet, Port

Table of Contents

Caution 5 150 100 200 300 1.

Hydraulic

Refer to page 100.

MXS

MXS12-75 MXS12-50 MXS12-75 Table deflection (mm) Table deflection (mm) Table deflection (mm) 0.03 0.025 MXS12-30 MXS12-40 MXS12-50 MXS12-75 MXS12-20 MXS12-10 MXS12-100 MXS12-40 MXS12-30 MXS12-20 0.06 0.020 0.02 MXS12-100 MXS12-10 0.015 0.04 MXS12-50 MXS12-40 MXS12-30 0.010 0.01 MXS12-20 MXS12-10 0.02 0.005 20 40 60 80 100 120 0 0 0 20 40 60 80 100 120 60 20 40 80 100 120 Load (N) Load (N

MXS Series Air Slide Table

MXS12-75 MXS12-50 MXS12-75 0.03 0.025 MXS12-30 MXS12-40 MXS12-50 MXS12-75 MXS12-20 MXS12-10 MXS12-100 MXS12-40 MXS12-30 MXS12-20 Table deflection mm Table deflection mm Table deflection mm 0.06 0.020 0.02 MXS12-100 MXS12-10 0.015 0.04 MXS12-50 MXS12-40 MXS12-30 0.010 0.01 MXS12-20 MXS12-10 0.02 0.005 20 40 60 80 100 120 0 0 0 20 40 60 80 100 120 60 20 40 80 100 120 Load N 1N = 0.2248 lbf

Rotary Table/

type) 300 100 Displacement m Displacement m 250 90 200 80 50 130 150 MSQA30 (High precision type) 70 60 0 0 10 20 30 40 50 60 70 12 10 8 6 4 2 Load N Load N MSQ50 MSQB7A MSQB50 (Basic type) 100 200 Displacement m Displacement m 90 150 80 120 50 MSQA50 (High precision type) 70 60 0 0 20 40 60 80 100 120 6 8 10 14 12 2 4 Load N Load N 5 Rotary Table Air Consumption Air consumption is the volume

Microspeed Cylinder

The chamber is set up on a Class 100 clean bench.

1

dual 3-port valve Operating pressure range Internal pilot operating pressure range (MPa) 0.1 to 0.7 (High pressure type: 0.1 to 1) 100 kPa to 0.7 (4-position: 100 kPa to 0.6) 100 kPa to 0.7 (High pressure type: 100 kPa to 1) 2-position single 2-position double 3-position External pilot operating pressure range (MPa) Pilot pressure range 0.25 to 0.7 0.1 to 0.7 (High pressure type: 0.1 to

24

32, 40 5 10 30 51 50 100 101 300 200 5 10 30 51 50 100 101 300 200 Stroke [mm] Stroke [mm] MGPL80/100, MGPA80/100 MGPL80/100, MGPA80/100 50 50 100 100 100 80 100 100 Load mass m [kg] Load mass m [kg] 80 80 80 100 80 10 10 80 5 10 29 30 51 50 300 200 100 5 10 29 30 51 50 300 200 100 Stroke [mm] Stroke [mm] 444 Model Selection MGP Series L L m m Horizontal Mounting Ball Bushing (19) L = 50

MG

to 100 MGPL32 to 100 i !

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

153 85 304 280 Rc 1/2 M14 x 2 depth 30 Bore size (mm) Rod end lock Head end lock Bore size (mm) Bore size (mm) For lock type For non-lock type Z X W HR HN Y R Y Q Q R 63 63 63 45 59 29 14 (16) 147 15 142 (154) 63 308 54 86 80 80 80 53.5 68 40 19 (23) 182 17 175 (189) 82 355 66 104 100 100 100 79 64.5 40 19 (23) 188 23 180 (194) 85 410 66 128 Note) ( ): Denotes the dimensions for long stroke

MGG

Bore size (mm) Stroke range (mm) Bore size (mm) Bracket mounting stroke 63 80 100 63 80 100 350 to 1100 300mm or more 350 to 1200 400mm or more 350 to 1300 500mm or more 26 Series MGG Dimensions Front mounting flange type/MGGF 20 to 50 M N HR HN (max.)