Smooth Cylinder/Low Speed Cylinder

ND hole H10 Axis d9 MM NX2 H A L R2 U2 Z (Min.)

42

External pilot supply port Indicator light Connector entry direction D side U side Connector entry direction D side U side D0 D1 D2 D3 Type of connection IP65 compatible U0 U1 U2 U3 Without cable Cable length 1.5 m Cable length 3 m Cable length 5 m F Kit F Kit L Kit L Kit Cable length 0.6 m Cable length 1.5 m Cable length 3 m D0 D1 D2 U0 U1 U2 1 to 12 stations 1 to 12 stations S T Kit (Terminal

VQ5000

U3 U0 U1 U2 D0 D1 D2 D3 D0 D1 D2 12 12 stations F 1 to 12 Manifold is 12 stations max.

VQ4000

R1 port A, B port D side U side P port Port R2 0 A Without SI unit With general type SI unit (Series EX300) Mitsubishi Electric Corp.: MELSECNET/MINI-S3 Data Link System Electrical entry D side U side IP65 compatible B Cable length 0.6 m Cable length 1.5 m Cable length 3 m U0 U1 U2 D0 D1 D2 Note) Shown VV5Q41-05C12FD0 Mitsubishi Electric Corp.: MELSECNET/MINI-S3 Data Link System (2 power

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Connector entry direction D side U side Electrical entry External pilot supply port Indicator light IP65 available Without cable Cable length 1.5m Cable length 3m Cable length 5m U0 U1 U2 U3 U side D0 D1 D2 D3 D side 2 to 12 stations 2 to 12 stations Cable length 0.6m Cable length 1.5m Cable length 3m U0 U1 U2 D0 D1 D2 Kit F Kit F Kit L Kit L Type of connection T1 S Kit (Individual terminal

Plug-in/Plug Lead: Single Unit

Connector entry direction D side U side Electrical entry External pilot supply port Indicator light IP65 compatible U0 U1 U2 U3 U side D0 D1 D2 D3 D side Without cable Cable length 1.5 m Cable length 3 m Cable length 5 m Kit F Kit F U0 U1 U2 D0 D1 D2 1 to 12 stations Cable length 0.6 m Cable length 1.5 m Cable length 3 m Kit L Kit L 1 to 12 stations Type of connection T1 S kit (Serial transmission

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Model C Mounting bolt CDQP2B12-5D -10D -15D -20D -25D -30D CDQP2B16-5D -10D -15D -20D -25D -30D CDQP2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQP2B25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D Model C Mounting bolt CDQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B50-

CQ2

Mounting bolt Mounting bolt CDQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D Mounting bolt CDQP2B12-5D -10D -15D -20D -25D -30D CDQP2B16-5D -10D -15D -20D -25D -30D CDQP2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQP2B25-5D -10D -

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Model C Mounting bolt CDQP2B12-5D -10D -15D -20D -25D -30D CDQP2B16-5D -10D -15D -20D -25D -30D CDQP2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQP2B25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D Mounting bolt CDQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B50-10D -15D

NCQ2/CQ2

CDQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B12-5D -10D -15D -20D -25D -30D CDQP2B16-5D -10D -15D -20D -25D -30D CDQP2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQP2B25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D 40

Compact Cylinder

CQP2B12-5D -10D -15D -20D -25D -30D CQP2B16-5D -10D -15D -20D -25D -30D CQP2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQP2B25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQP2B50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQP2B63-10D

Compact Cylinder Series CQS

C D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 C D 55 60 65 70 75 80 35 40 45 50 55 60 65 70 75 80 Cylinder model Mounting bolt size Cylinder model Mounting bolt size CQSWB12-5D -10D -15D -20D -25D -30D CQSWB16-5D -10D -15D -20D -25D -30D CQSWB20-5D -10D -15D -20D CQSWB20-25D -30D -35D -40D -45D -50D CQSWB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D M3 x 30L x 35L x 40L x 45L x

CQS

Mounting bolt Mounting bolt D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 Model C Model C D 55 60 65 70 75 80 35 40 45 50 55 60 65 70 75 80 CQSWB12-5D -10D -15D -20D -25D -30D CQSWB16-5D -10D -15D -20D -25D -30D CQSWB20-5D -10D -15D -20D CQSWB20-25D -30D -35D -40D -45D -50D CQSWB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D M3 x 30l x 35l x 40l x 45l x 50l x 55l M3 x 30l x 35l x

Table of Contents

VFR2110-5D 5 sets (2 position single part no.) VFR2410-5D 1 set (3 position exhaust part no.) VVFS2000-R-01-2 1 set (Individual EXH spacer part no.) VV5FR2-01T1-061-02 1 set (Manifold base part no.) VFR2100-5FZ 3 sets (2 position single part no.) VFR2200-5FZ 2 sets (2 position double part no.) VVFS2000-10A 1 set (Blanking plate assembly part no.)

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Rod side mounting/Without auto switch Head side mounting/Without auto switch C D Mounting bolt Model C D Mounting bolt Model CQSB12-5D -10D -15D -20D -25D -30D CQSB16-5D -10D -15D -20D -25D -30D CQSB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSB12-5D -10D -15D -20D -25D -30D CQSB16-5D -10D -15D -20D -25D -30D CQSB20-5D -10D -

Size: S (Small Flow Style), Control Valve: 2 (Metering Valve), Combination Valve: 3 (Skip Valve), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Suffix: U1 (Convertor Unit/for CC63 (To be Integrated in CCT63))

Size: Small Flow Style, Control Valve: Metering Valve, Combination Valve: Skip Valve, Voltage: 24VDC, Electrical Entry: DIN Terminal, Suffix: Convertor Unit/for CC63 (To be Integrated in CCT63)

VFS

Non plug-in type VV5FS3-10 VFS310-D VFS310-E Plug-in type with terminal block: 6 stations (Manifold base) VV5FS3-01T-061-02 1 (2 position single) VFS3100-5FZ 3 (2 position double) VFS3200-5FZ 2 (Blanking plate) VVFS3000-10A 1 Non plug-in type: 6 stations (Manifold base) VV5FS3-10-061-03 1 (2 position single) VFS3110-5D 5 (3 position exhaust center) VFS3410-5D

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

VFR2110-5D 5 sets (2 position single part no.) VFR2410-5D 1 set (3 position exhaust part no.) VVFS2000-R-01-2 1 set (Individual EXH spacer part no.) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc. The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

F 3 8 Option VV5FS4-10-061-03-A VFS4110-5D 1 4 The asterisk denotes the symbol for assembly.