TABLE OF CONTENTS

COIL NO. 6 7.8 8.5 12 14 5.4 7 7.7 11 13 3 3.8 4.4 6 7 5C-103-A24 5C-104-A24 5C-105-A24 5C-106-A24 5C-107-A24 5C-3-K24 5C-4-K24 5C-5-K24 5C-6-K24 5C-7-K24 18.5 24 32 39 45 17 22 29 35 41 9 12 16 20 23 5C-108-A24 5C-109-A24 5C-110A24 5C-111-A24 5C-112-A24 5C-8-K24 5C-9-K24 5C-10-K24 5C-11-K24 5C-12-K24 48 54 94 120 153 43 48 85 110 138 24 28 47 60 76 5C-113-A24 5C-114-A24 5C-115-A24 5C-116

1.1

The unit used is [S/m], incorporating [S] (Siemens), the opposite of [] (resistance). At 25C, the electrical conductivity of theoretically 100% deionized water is 0.055 [S/m].

Table of Contents

S L, Z S L, Z 1 1 1 1 4 1 2 PB AC 2 Ordering example (Example) Series VXR22, Rc 1 1/4, 200 VAC, Conduit terminal (Part no.)

Thermo-chiller/Rack Mount Type

Applicable model HRR010/012/018/024/030/050-mm-m-DM Measurement range of electric conductivity 0.1 to 48.0 S/cm Set range of target electric conductivity 0.5 to 45.0 S/cm1 Set range of electric conductivity hysteresis 0.1 to 10.0 S/cm 1 Default setting is set to Electric conductivity set value: 25.0 S/cm and Hysteresis: 5.0 S/cm.

2/3 Port Valve

1) _ S L, Z _ S L, Z T Manifold base Mark Applicable valve VX21l1-00 VVX21 VVX22 VVX23 Port size VX22l1-00 VX23l1-00 1 2 Rc(PT) Rc(PT) 1 8 1 4 AC All common ports are 3/8.

HRX-OM-Y098

Configuration One thermo-chiller for one controller. 2 2 R D R D 3 3 S D S D 5 5 S G S G Controller Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C 3.3.10 Ethernet Modbus/TCP Communication wiring This product can operate the following by Ethernet Modbus/TCP communication.

HRX-OM-X037

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-14 Connection of RS-232C 3.3.10 Ethernet Modbus/TCP Communication wiring This product can operate the following by Ethernet Modbus/TCP communication.

53

20 s Max.

Table of Contents

Fixed 4% F .S.

Proposals for Energy Saving

S S Effective area ratio 3.2 : 1 Pressure loss: Small Filter regulator S coupler Coil tube 2 Nozzle 2 Upstream side S: 9 Nozzle side S: 2.8 Effective area (mm) Effective area ratio Nozzle size (mm) Number of nozzles Supply pressure S: S = 3.2 : 1 2 1 0.5MPa 0.35MPa 0.33MPa Regulator pressure Outlet pressure Effect of Energy Saving Improvement 50 to 75% Reduction 50 to 75% Reduction 100%

HRS100/150

Operating time 20 s 30 s HRZ 10 s Voltage HRZD 5 s Min. 2 s HRW 1 s 0.5 s dV dt HECR = Voltage increase ratio 0.2 s 0.1 s dV HEC 0.05 s 0.02 s Time HEB 0.01 s 100 125 200 300 500 400 600 700 1000 2000 3000 4000 1500 dt HED Current (% for chiller main breaker volume) < For option B [With earth leakage breaker]> 3.

Lightweight and Compact

20 s Max.

DOC1001322

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-27 DOC1001322 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

Thermo-dryer

Data Maximum Settable Temperature Graph 1: IDH4 Graph 2: IDH6 F 50F (10C) 44.6F (7C) 41F (5C) Pressure dew point 37.4F (3C) 50F (10C) 44.6F (7C) 41F (5C) Pressure dew point 37.4F (3C) Air flow capacity scfm (L/min [ANR]) 17.6 (500) 28.3 (800) Air flow capacity scfm (L/min [ANR]) 15.9 (450) Selection example 24.7 (700) 14.1 (400) 21.2 (600) 12.4 (350) Selection example Selection example 10.6

energy saving effect

L Required facility water system 10 s 5 s 2 s Min. 1 s 0.5 s 0.2 s 0.1 s Model Heat radiation [kW] Facility water specifications HRSH100-Wl-l Approx. 20 Refer to "Facility water system" in the specifications on pages 167 and 169. 0.05 s HRSH150-Wl-l Approx. 27 HRSH200-Wl-l Approx. 34 HRSH250-Wl-l Approx. 40 0.02 s 0.01 s 100 135 200 300

Thermo-chiller

Operating time 20 s 30 s Voltage 10 s 5 s Min. 2 s dV dt 1 s = Voltage increase ratio 0.5 s dV 0.2 s 0.1 s Time 0.05 s 0.02 s dt 0.01 s 100 125 200 300 500 400 600 700 1000 2000 3000 4000 1500 < For option B [With earth leakage breaker]> 3. This product is installed with a breaker with the following operating characteristics.

Thermo-chiller

(Fe) [mg/L] 0.3 or less v v Copper (Cu) [mg/L] 0.1 or less v Sulfide ion (S2) [mg/L] Should not be detected v Ammonium ion (NH4+) [mg/L] 0.1 or less v Residual chlorine (Cl) [mg/L] 0.3 or less v Free carbon (CO2) [mg/L] 4.0 or less v Reference item 5 s 2 s 1 s Min. 0.5 s 0.2 s 0.1 s *1 In the case of [Mcm], it will be 0.003 to 0.01.

2/3 Port Valve for Various

PAX Non-leak (10 6 Pam 3/s) V Note 1) If using for other fluids, please contact SMC. Note 1) The leakage amount (10 6 Pam 3/s) is value when differential pressure is 0.1 MPa. PB 17-3-13 The VX series will be revised shortly. Series VX Applicable Fluids Check List 3 Port Direct Air Operated Series VXA31/32 Common (C.O.) Refer to pages 17-3-54 and 17-3-55 for specifications and models.

Information

Ambient 5C 0 5 10 15 20 25 30 35 40 45 0 5 10 15 20 25 30 35 40 45 [50 Hz] Circulating fluid temperature [C] [60 Hz] Circulating fluid temperature [C] 012 018 024 A W HRS -20 (Single-phase 200 to 230 VAC) 1000 1000 Ambient 40C Ambient 32C Ambient 25C Ambient 40C 800 800 600 600 Ambient 32C 400 400 Ambient 5C Ambient 20C Ambient 25C Ambient 5C Ambient 20C 200 200 0 5 10 15 20 25 30 35 40

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

C S S Motor Type S AC Servo motor Cable Content AC Cable Length (L) [m] SSCNET Cable S 0.15m L 0.3m K 0.5m J 1m 1 3m 3 c I/O Connector (For LECSS-S/LECSS2-T)-CS Driver Type LECSS S *LE-CSNS is 10126-3000PE (Connector)/ 10320-52F0-008 Shell kit of Sumitomo 3M Limited or equivalent goods.