High Vacuum Angle Valve

The initial exhaust rate is adjusted by turning the adjustment nut counterclockwise. x Opening of the initial exhaust valve (valve S) When the pilot pressure is applied to the pilot port S, the valve S is removed from the valve S seal assembly, and the valve opens the adjusted amount.

2

03(S)A 5/32" 8.2 AS221F-02-07(S)A 1/4" 11.2 23.4 32.7 (32.8) 19 (19) AS221F-02-09(S)A 5/16" 13.2 23.9 33.2 (33.3) 14.2 19 (20) AS221F-02-11(S)A 3/8" 15.5 26.4 35.7 (35.8) 15.6 20 (21) AS321F-02-07(S)A 1/4" 1/4 19 11.2 16.6 21.8 32.1 36.4 50 48.4 44.5 42.9 13.3 40 (40) AS321F-02-09(S)A 5/16" 13.2 22.7 33 14.2 41 (41) AS321F-02-11(S)A 3/8" 15.5 26.7 37 35.9 15.6 AS321F-03-07(S)A 1/4" 3/8 19

3 Port Solenoid Valve Metal Seal Series VZ200 1

VZ22 20 Rc 1/8 VZ22 30 Rc 1/8 (Example) VV3Z2-20-081 (8 stations) VV3Z2-50081-C6 (8 stations) VZ212-1G-M5 5 pcs. VZ215-5M5 pcs. VZ212-1G-M5 2 pcs. VZ215-5M3 pcs. VVZ200-32A-1 1 pc.

Aluminum High Vacuum Angle Valve

The initial exhaust rate is adjusted by turning the adjustment nut counterclockwise. x Opening of the initial exhaust valve (valve S) When the pilot pressure is applied to the pilot port S, the valve S is removed from the valve S seal assembly, and the valve opens the adjusted amount.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

(Manifold base) VF5120-1G-032 pcs. (Valve) VF5220-1G-032 pcs. (Valve) DXT156-19-1A1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly.

CV/MVGQ

of surge voltage, there is no type S.

CV/MVGQ

L 16 60 S 5 L CVJ3 Without auto switch L S 5 L J79W 16 60 CDVJ3 With auto switch Number of auto switches Action S T Single acting, Spring return Single acting, Spring extend Built-in magnet 2 pcs. 1 pc. n pcs.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

0.43 0.73 0.63 0.73 0.2 JSX21-S Cm503 320 360 7.1 3.15 0.44 0.88 0.76 0.88 0.1 JSX21-S Cm703 320 360 3/8 1/4 4.0 2.02 0.48 0.52 0.45 0.52 1.0 JSX31-S Cm402 450 490 5.6 2.62 0.43 0.73 0.63 0.73 0.5 JSX31-S Cm502 450 490 7.1 3.15 0.44 0.88 0.76 0.88 0.2 JSX31-S Cm702 450 490 30 3/8 4.0 2.02 0.48 0.52 0.45 0.52 1.0 JSX31-S Cm403 450 520 5.6 2.62 0.43 0.73 0.63 0.73 0.5 JSX31-S Cm503 450 520

7ND9071en

or 3/8" 67.0 67.0 60 121 7380 1 10 mm or 3/8" 75 189 11500 1 10 mm or 3/8" 502 195 11900 1 10 mm or 3/8" 130.0 130.0 602 282 17200 1 10 mm or 3/8" 752 441 26900 1 10 mm or 3/8" B1J B1JA Stroke volume dm3 / in3 NPT Piping Air (s) Spring (s) Piping Air (s) Spring (s) Piping Air (s) Spring (s) 6 0.47 28.7 3/8 10 mm or 3/8" [6 mm or 1/4" (x)] 10 mm or 3/8" [6 mm or 1/4" (x)] 8 0.9 55

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

"S" option is not available.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

S ... ...

Table of Contents

S L, Z S L, Z 1 1 1 1 4 1 2 PB AC 2 Ordering example (Example) Series VXR22, Rc 1 1/4, 200 VAC, Conduit terminal (Part no.)

New

Use a fluid with a kinematic viscosity of 50 mm2/s or less.

IP8101 Series

Fork lever-type fitting M P368010-24 Fork lever-type fitting S P368010-25 Example of side mounting using fork lever-type fitting M Example of back mounting using fork lever-type fitting S. Fig. 8 For side mounting, the mounting dimensions of fork lever-type fitting M can be adjusted to be interchangeable with IP610.

High Vacuum Angle Valve

M M type plug connector U With light/surge voltage suppressor (Non-polar type) * S type: Not available for AC * U type: DC only o Body surface treatment/Seal material and changed parts Body surface treatment Part with changed seal material and leakage Symbol Changed part *2 Leakage [Pam3/s or less] *1 Symbol Surface treatment Nil External: Hard anodized Internal: Raw material A External

IP8001 Series

No.IP8S-OM09 38 The following can be performed: angle check for a feedback lever (AnGL), balance current adjustment (0AdJ), automatic calibration (CAL), input current adjustment (S-0) & (S-F), confirmation of balance current (bAL), span adjustment (SPn), and initialize of parameter (dFLt). (C10) Angle check Confirm rotation angle of the feedback lever.

AKH/AKB Series

Note: 1in = 25.4mm 8mm2 = 1Cv 1g = 0.0353oz 5 Series AKH/AKB Check Valve with One-Touch Fitting Construction Straight type: AKH 4, 6 5/32, 1/4 8, 10, 12 5/16, 3/8, 1/2 Description Material Note Parts list No.

AKH/AKB Series Check Valve with One-touch Fitting

Note: 1in = 25.4mm 8mm2 = 1Cv 1g = 0.0353oz 5 Series AKH/AKB Check Valve with One-Touch Fitting Construction Straight type: AKH 4, 6 5/32, 1/4 8, 10, 12 5/16, 3/8, 1/2 Description Material Note Parts list No.

CATALOG

I f a p re s s u re g re a t e r t h a n t h e s e t p re s s u re i s re a c h e d , t h e u n i t w i l l o p e n , c l o s i n g w h e n p re s s u re i s l e s s t h a n s e t pressure.

V

P D I M E N S I O N S (N)VM1000 T O G G L E D I M E N S I O N S (N)VM1000 P U S H B U T T O N PT= Pre-travel OT= Over travel TT= Total travel S Y M B O L S (N)VM1000 T O G G L E S Y M B O L S (N)VM1000 P U S H B U T T O N S Y M B O L S (N)VM1000 O N E W AY Courtesy of Steven Engineering, Inc. !