Nominal Size: 63mm, Stroke: 200mm, Size: S (Small Flow Style), Control Valve: 2 (Metering Valve), Combination Valve: 0 (None), Voltage: 0 (Air Operated Style)

Nominal Size: 63mm, Stroke: 200mm, Size: Small Flow Style, Control Valve: Metering Valve, Combination Valve: None, Voltage: Air Operated Style, Electrical Entry: -

Air-hydro Unit

Control valve Suffix 0 None Flow control valve (With pressure compensation) Throttle valve Timid flow control valve (CCVS series only) S Single valve 1 Unit for CC63 (Unit mounted to CCT63) U1 2 Unit for CC100 and CC160 (Unit mounted to CCT100 and 160) U2 3 CCVS/CCVL Valve Unit Part No.

CC

CC63-100S10 Level gauge Lube-plug Baffle Prevents condensation when air enters, thus minimizing the formation of drainage. Also prevents oil from splashing out during exhaust. Float Prevents the contact of air and oil, and the intermixing of air and oil, thus stabilizing the operation speed.

Table of Contents

CC63-100S10 Level gauge Lube-plug Baffle Prevents condensation when air enters, thus minimizing the formation of drainage. Also prevents oil from splashing out during exhaust. Float Prevents the contact of air and oil, and the intermixing of air and oil, thus stabilizing the operation speed.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Model C Mounting bolt CDQP2B12-5D -10D -15D -20D -25D -30D CDQP2B16-5D -10D -15D -20D -25D -30D CDQP2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQP2B25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D Model C Mounting bolt CDQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B50-

CQ2

Mounting bolt Mounting bolt CDQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D Mounting bolt CDQP2B12-5D -10D -15D -20D -25D -30D CDQP2B16-5D -10D -15D -20D -25D -30D CDQP2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQP2B25-5D -10D -

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Model C Mounting bolt CDQP2B12-5D -10D -15D -20D -25D -30D CDQP2B16-5D -10D -15D -20D -25D -30D CDQP2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQP2B25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D Mounting bolt CDQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B50-10D -15D

NCQ2/CQ2

CDQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B12-5D -10D -15D -20D -25D -30D CDQP2B16-5D -10D -15D -20D -25D -30D CDQP2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQP2B25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D 40

Compact Cylinder

CQP2B12-5D -10D -15D -20D -25D -30D CQP2B16-5D -10D -15D -20D -25D -30D CQP2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQP2B25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQP2B50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQP2B63-10D

CC

-lSl1-lG 228.5 278.5 378.5 503.5 603.5 728.5 CC63-lSl1-lG s s s 7 13 2 32 120 5 33 82.5 CC100-lSl1-lG CC100-lll1-lG 286 386 511 611 836 736 s s s CC100-lLl1-lG 7 13 2 32 120 5 33 92 CC160-lLl1-lG 399 524 624 949 849 749 1049 s s CC160-lLl1-lG 7 20 2.5 46 185 0 29 120 * Hexagon socket head cap screw is used for mounting hole.

Compact Cylinder Series CQS

C D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 C D 55 60 65 70 75 80 35 40 45 50 55 60 65 70 75 80 Cylinder model Mounting bolt size Cylinder model Mounting bolt size CQSWB12-5D -10D -15D -20D -25D -30D CQSWB16-5D -10D -15D -20D -25D -30D CQSWB20-5D -10D -15D -20D CQSWB20-25D -30D -35D -40D -45D -50D CQSWB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D M3 x 30L x 35L x 40L x 45L x

CQS

Mounting bolt Mounting bolt D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 Model C Model C D 55 60 65 70 75 80 35 40 45 50 55 60 65 70 75 80 CQSWB12-5D -10D -15D -20D -25D -30D CQSWB16-5D -10D -15D -20D -25D -30D CQSWB20-5D -10D -15D -20D CQSWB20-25D -30D -35D -40D -45D -50D CQSWB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D M3 x 30l x 35l x 40l x 45l x 50l x 55l M3 x 30l x 35l x

Table of Contents

VFR2110-5D 5 sets (2 position single part no.) VFR2410-5D 1 set (3 position exhaust part no.) VVFS2000-R-01-2 1 set (Individual EXH spacer part no.) VV5FR2-01T1-061-02 1 set (Manifold base part no.) VFR2100-5FZ 3 sets (2 position single part no.) VFR2200-5FZ 2 sets (2 position double part no.) VVFS2000-10A 1 set (Blanking plate assembly part no.)

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Rod side mounting/Without auto switch Head side mounting/Without auto switch C D Mounting bolt Model C D Mounting bolt Model CQSB12-5D -10D -15D -20D -25D -30D CQSB16-5D -10D -15D -20D -25D -30D CQSB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSB12-5D -10D -15D -20D -25D -30D CQSB16-5D -10D -15D -20D -25D -30D CQSB20-5D -10D -

VFS

Non plug-in type VV5FS3-10 VFS310-D VFS310-E Plug-in type with terminal block: 6 stations (Manifold base) VV5FS3-01T-061-02 1 (2 position single) VFS3100-5FZ 3 (2 position double) VFS3200-5FZ 2 (Blanking plate) VVFS3000-10A 1 Non plug-in type: 6 stations (Manifold base) VV5FS3-10-061-03 1 (2 position single) VFS3110-5D 5 (3 position exhaust center) VFS3410-5D

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

VFR2110-5D 5 sets (2 position single part no.) VFR2410-5D 1 set (3 position exhaust part no.) VVFS2000-R-01-2 1 set (Individual EXH spacer part no.) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc. The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

F 3 8 Option VV5FS4-10-061-03-A VFS4110-5D 1 4 The asterisk denotes the symbol for assembly.

VFR

VFR2110-5D 5 sets (2 position single part no.) VFR2410-5D 1 set (3 position exhaust part no.) VVFS2000-R-01-2 1 set (Individual EXH spacer part no.) VV5FR2-01T1-061-02 1 set (Manifold base part no.) VFR2100-5FZ 3 sets (2 position single part no.) VFR2200-5FZ 2 sets (2 position double part no.) VVFS2000-10A 1 set (Blanking plate assembly part no.)

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New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2