smcmaintenancepartslist

6 @1 @8 End lock type Piston seal NBR Rod seal NBR 20 25 32 40 50 63 80 100 CBQ2B20-PS CBQ2B25-PS CBQ2B32-PS CBQ2B40-PS CBQ2B50-PS CBQ2B63-PS CBQ2B80-PS CBQ2B100-PS Tube gasket NBR Using 4 pcs. for 80, 100 Set of left nos. !0, !1, !2, !3, !6, @1, @8 and a grease pack.

NCQ2/CQ2

CQ2B160-PS CQ2B140-PS CQ2B125-PS !

1

New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Contents Contents Series 20 25 32 40 50 63 80 100 12 16 20 25 32 40 50 63 80 100 CQ2BH20-PS CQ2BH25-PS CQ2BH32-PS CQ2BH40-PS CQ2BH50-PS CQ2BH63-PS CQ2BH80-PS CQ2BH100-PS CQ2B12-PS CQ2B16-PS CQ2B20-PS CQ2B25-PS CQ2B32-PS CQ2B40-PS CQ2B50-PS CQ2B63-PS CQ2B80-PS CQ2B100-PS Set of nos. above i, o, !0. Pneumatic Air-hydro Set of nos. above i, o, !0. Seal kits includes i o !0.

CQ2

Bore size (mm) 12 16 20 25 32 40 50 63 80 100 Note Pneumatic (Non-lube) CQ2B12-PS CQ2B16-PS CQ2B20-PS CQ2B25-PS CQ2B32-PS CQ2B40-PS CQ2B50-PS CQ2B63-PS CQ2B80-PS CQ2B100-PS Air-hydro CQ2BH20-PS CQ2BH25-PS CQ2BH32-PS CQ2BH40-PS CQ2BH50-PS CQ2BH63-PS CQ2BH80-PS CQ2BH100-PS Piston rod e Collar A set of left nos. !2, !3 and !

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Contents Contents Series 20 25 32 40 50 63 80 100 12 16 20 25 32 40 50 63 80 100 CQ2BH20-PS CQ2BH25-PS CQ2BH32-PS CQ2BH40-PS CQ2BH50-PS CQ2BH63-PS CQ2BH80-PS CQ2BH100-PS CQ2B12-PS CQ2B16-PS CQ2B20-PS CQ2B25-PS CQ2B32-PS CQ2B40-PS CQ2B50-PS CQ2B63-PS CQ2B80-PS CQ2B100-PS Set of nos. above i, o, !0. Pneumatic Air-hydro Set of nos. above i, o, !0. Seal kits includes i o !0.

Table of Contents

1(PV)(PS PD) PD PE PS Table (2) PV Part no.

Table of Contents

CG5A63SR-PS CG5A63SV-PS CG5N80SR-PS CG5N80SV-PS CG5A80SR-PS CG5A80SV-PS CG5N100SR-PS CG5N100SV-PS CG5A100SR-PS CG5A100SV-PS Contents Nos. o and !

AC Servo Motor Driver (Pulse input type/Positioning type ）

POSITIONING MODE (Note 2) I/O signals in control modes Related parameter CP CL PS Pin No.

Vacuum Module Series ZX

Release flow rate adjusting needle + + SMC SMC PD (PS 1(PV) PD) (PS 1(PV) PD) (PS 3(PV) PD) 61.5 A 50.50 60 PD PD PD 50.5 A PD 50 PE PE PE EXH 28.5 33 PS PS 7.5 PS 21.5 20.5 0.5 PS P PV PV PV 10 PV 20 5 Common EXH port (EXH.)1 1/8 (Rc, NPTF, G) 2.5 3 37.4 22.5 Pitch = 21 44 Common air pressure SUP port (PV) 1/8 (Rc, NPTF, G) Common pilot pressure SUP port (PS) 2 x M5 Common vacuum pressure

Large Size Vacuum Module: Series ZR

PD PD PD PD PE PE PS PS PS PS PS PS PS PS PE PE PD PD PD PD PE PE 962 Large Size Vacuum Module: Ejector System Series ZR Manifold/System Circuit Example When not using individual spacer When using individual spacer Ejector 1 Ejector 2 ZA ZX (PE) (PE) ZR ZM ZMA ZQ ZH ZU Individual Spacer ZR1-R1-1 ZL ZY PV: Air pressure supply port PS: Pilot pressure supply port PD: Release pressure supply

Vacuum Unit

Common EXH port Common PS/PD ports Application ZZK2mA-Am1m Yes PS = PD Ejector common exhaust PV = PS = PD ZZK2mA-Am1m-D Yes PS PD Ejector common exhaust PV = PS PD Standard supply pressure 0 Ejector individual exhaust PV = PS = PD Supply pressure ZZK2mA-Am2m ZZK2mA-P2m None PS = PD Vacuum pump system PV PS = PD Operating Supply Pressure Caution Ejector individual exhaust PV = PS PD ZZK2mA-Am2m-D

Table of Contents

Description 12 MGQ12-PS 16 MGQ16-PS 20 MGQ20-PS 25 MGQ25-PS 32 MGQ32-PS 40 MGQ40-PS 50 MGQ50-PS 63 MGQ63-PS 80 MGQ80-PS 100 MGQ100-PS !9 Seal kit Seal kit includes !9 to @2.

11-cq2-e

0 Piston seal CQ2B20V-PS CQ2B20R-PS 20 25 32 40 50 63 80 100 CQ2B20R-PS CQ2B25R-PS CQ2B32R-PS CQ2B40R-PS CQ2B50R-PS CQ2B63R-PS CQ2B80R-PS CQ2B100R-PS CQ2B20V-PS CQ2B25V-PS CQ2B32V-PS CQ2B40V-PS CQ2B50V-PS CQ2B63V-PS CQ2B80V-PS CQ2B100V-PS CQ2B25V-PS CQ2B25R-PS !1 Rod seal CQ2B32V-PS CQ2B32R-PS CQ2B40V-PS CQ2B40R-PS Set of left nos. !0, !1, !2. !

Compact Cylinder/Standard Type: Double Acting, Single Rod Series CQ2

0 Piston seal CQ2B20V-PS CQ2B20R-PS 20 25 32 40 50 63 80 100 CQ2B20R-PS CQ2B25R-PS CQ2B32R-PS CQ2B40R-PS CQ2B50R-PS CQ2B63R-PS CQ2B80R-PS CQ2B100R-PS CQ2B20V-PS CQ2B25V-PS CQ2B32V-PS CQ2B40V-PS CQ2B50V-PS CQ2B63V-PS CQ2B80V-PS CQ2B100V-PS CQ2B25V-PS CQ2B25R-PS !1 Rod seal CQ2B32V-PS CQ2B32R-PS CQ2B40V-PS CQ2B40R-PS Set of left nos. !0, !1, !2. !

ZR

PS EXH PD PV PS EXH PD PV PE PS PE PS Sol.c Silencer Sol.c Silencer Sol.b Sol.a Sol.b Sol.a Vacuum switch PV PD Vacuum switch PV PD Ejector unit Ejector unit Release valve Supply valve V Release valve Supply valve V Suction filter Suction filter PE PS PE PS Sol.c Silencer Sol.b Sol.a Vacuum switch Sol.c Silencer PV PD Sol.b Sol.a Ejector unit

Compact Hydraulic Cylinder

CH2G50B-PS CH2H50C-PS CH2H50B-PS Nos. @1 through #0 from the chart at left CH2E63C-PS CH2E63B-PS CH2F63C-PS CH2F63B-PS 63 CH2G63C-PS CH2G63B-PS CH2H63C-PS CH2H63B-PS CH2E80C-PS CH2E80B-PS CH2F80C-PS CH2F80B-PS 80 CH2G80C-PS CH2G80B-PS CH2H80C-PS CH2H80B-PS CH2E100C-PS CH2E100B-PS CH2F100C-PS CH2F100B-PS 100 CH2G100C-PS CH2G100B-PS CH2H100C-PS CH2H100B-PS Seal kit consists of items @1 through

Table of Contents

SET button PS Use this button to switch the mode and set the set value.

Table of Contents

MHSL32-PS MHSL25-PS MHSL20-PS MHSL16-PS !

Hydraulic

tube gasket Holder gasket Cushion valve seal Cushion seal Piston gasket Magnet 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 CH2F50C-PS CH2F50B-PS 50 CH2G50C-PS CH2G50B-PS Nos. 21 through 30 from the chart at left CH2H50C-PS CH2H50B-PS CH2E63C-PS CH2E63B-PS CH2F63C-PS CH2F63B-PS 63 CH2G63C-PS CH2G63B-PS CH2H63C-PS CH2H63B-PS CH2E80C-PS CH2E80B-PS CH2F80C-PS CH2F80B-PS 80 CH2G80C-PS