Size: 3/4, 1, Thread: G, Port Size: 1-AV5000 Only, Option: None, Voltage: 24VDC, Lead Wire: DIN Terminal, Surge Suppressor: -, Manual Override: -

Regulator Unit Combination: [Other FRL Combination Devices] Soft Start Up Valve, Port Size: G1, Filter Rating: 5μm, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: Presence, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

to a human body or peripheral equipment, as a snap ring may be flown out of the tip of a plier (tool for installing a type C snap ring).

CQ2

A RR1 Part No.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

A Dimensions except A, L and L1 are the same as rod side flange style.

CQS

For installation and removal, use an appropriate pair of pliers (tool for installing a type C snap ring). 2. Even if a proper plier (tool for installing type C snap ring) is used, it is likely to inflict damage to a human body or peripheral equipment, as a snap ring may be flown out of the tip of a plier (tool for installing a type C snap ring).

Table of Contents

wire electrical entry) P EB EA 31 50 67 81 37 37 43 6-Rc 3/4 61 103 (P , EA, EB port) 72 [ ] = A, B port Rc 3/4 Formula for manifold weight M = 0.911n + 1.621 (kg) n: Station 144 (72) 60 11 60 Non plug-in type: VV5FR5-10Station 1Bore size U side 2.3 (Electrical entry) Manual override (Non-locking) 21 R5.5 B B B B A A A A B B B n A A A B B B B A A A A 3 L2 L1 P = 51 11 11 71.5 (Pitch) P =

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Rod side mounting/Without auto switch Head side mounting/Without auto switch C D Mounting bolt Model C D Mounting bolt Model CQSB12-5D -10D -15D -20D -25D -30D CQSB16-5D -10D -15D -20D -25D -30D CQSB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSB12-5D -10D -15D -20D -25D -30D CQSB16-5D -10D -15D -20D -25D -30D CQSB20-5D -10D -

VFS

Tightening torque for terminal: 0.6 Nm Series VFS4000/5000 Model Terminal block marking A + A side A side A A side A side B + B VFS 100 VFS 200 VFS4 00 VFS5 00 4 5 4 5 B side B side 3 4 3 4 A side A side B side B side Applicable terminal: 1.25-3.5M, 1.25Y-3L, 1.25Y-3M There is no polarity.

Smooth Cylinder/Low Speed Cylinder

A B A B A B B A B A B A B B A B A B A 10 16 2 2 6 6 2.5 2.5 1.5 1.5 0.5 0.5 4.5 4.5 3 3 3.5 3.5 8.5 8.5 0.5 0.5 2.5 2.5 6.5 6.5 3 3 2 2 1 1 5 5 3.5 3.5 4 4 9 9 1 1 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

VFR

wire electrical entry) P EB EA 31 50 67 81 37 37 43 6-Rc 3/4 61 103 (P , EA, EB port) 72 [ ] = A, B port Rc 3/4 Formula for manifold weight M = 0.911n + 1.621 (kg) n: Station 144 (72) 60 11 60 Non plug-in type: VV5FR5-10Station 1Bore size U side 2.3 (Electrical entry) Manual override (Non-locking) 21 R5.5 B B B B A A A A B B B n A A A B B B B A A A A 3 L2 L1 P = 51 11 11 71.5 (Pitch) P =

2

AD17-A AD27-A AD37-A AD47-A Spacer Y100-A Y200-A Y300-A Y400-A Y500-A Y600-A Spacer with bracket Y100T-A Y200T-A Y300T-A Y400T-A Y500T-A Y600T-A Check valve Note 5) Note 6) AKM2000-01-A (02)-A AKM3000-(01)-A 02-A AKM4000-(02)-A 03-A Pressure switch Note 6) IS10M-20-A IS10M-30-A IS10M-40-A IS10M-50-A IS10M-60-A T-spacer Note 5) Note 6) Y110-M5-A Y210-01-A (02)-A Y310-(01)-A 02-A Y410-(02

Free Mount Cylinder

Although a zener diode for surge protection is connected at the output side of a solid state auto switch, damage may still occur if a surge is applied repeatedly. When directly driving a load which generates a surge, such as a relay or solenoid valve, use a switch with a built-in surge absorbing element. 7.

Hydraulic

MA a A MA a Air release R (max.)

Compact Hydraulic Cylinder

28.5 30 32.5 B 9.5 20.5 23.5 25 29 30.5 33 B 6.5 17.5 20.5 22 26 27.5 30 A 23.5 27.5 26.5 34 34 41.5 45 A 28.5 32.5 31.5 39 39 46.5 50 A 20.5 26 25 32.5 32.5 40 43.5 A 23 27 26 33.5 33.5 41 44.5 A 23.5 27.5 26.5 34 34 41.5 45 A 20.5 24.5 23.5 31 31 38.5 42 A 24.5 30 29 36.5 36.5 44 47.5 20 32 40 50 63 80 100 Note) Adjust the auto switch after confirming the operating conditions in the actual

PSxx-OMU0002CN

[F 6] 5R.D. <> [F 6] [F 6] -41No.PS-OMU0002CN-D [F10] <> [F10] OFF OUT1 OUT2 [dUAL] () () [dUAL] 44 () () () 44 () [F10] -42No.PS-OMU0002CN-D <> () OUT1 OUT1 OUT2 OUT2 n_1 n_2 [F10 ] () OUT1 OUT1 OUT1 OUT2 OUT2 OUT2 n1L n1H n2L n2H [F10 ] -43No.PS-OMU0002CN-D ( ) OUT1 OUT1 ( ) OUT1() ( ) OUT1() OUT1 ( ) OUT2 OUT2 ( ) OUT2() ( ) OUT2() OUT2 OUT1 OUT2 OFF -44No.PS-OMU0002CN-D

PSxx-OMU0005CN

[F 6] 5R.D. <> [F 6] [F 6] -42No.PS-OMU0005CN-C [F10] <> [F10] 2 OUT1 OFF OUT2 [dUAL]2 () () [dUAL]2 45 () () () 45 () [F10] -43No.PS-OMU0005CN-C <> (OFF) OUT1 n_1 OUT1 OFF OUT2 OUT2 OFF n_2 [F10 ] () OUT2 n2H OUT1 OUT2 n2L OUT1 n1L OUT1 OUT2 n1H [F10 ] -44No.PS-OMU0005CN-C 2 2 ( ) OUT1 OUT1 ( ) OUT1 () ( ) OUT1 () OUT1 ( ) OUT2 OUT2 ( ) OUT2 () ( ) OUT2

PSxx-OMU0008CN

MPa 10.0-105.0 kPa -115.0115.0 kPa -42No.PS-OMU0008CN-D [F 6] 5R.D. <> [F 6] [F 6] -43No.PS-OMU0008CN-D [F10] <> [F10] OFF OUT1 OUT2 [dUAL] () () [dUAL] 46 () () () 46 () [F10] -44No.PS-OMU0008CN-D <> () OUT1 OUT1 OUT2 OUT2 n_1 n_2 [F10 ] () OUT1 OUT1 OUT1 OUT2 OUT2 OUT2 n1L n1H n2L n2H [F10 ] -45No.PS-OMU0008CN-D ( ) OUT1 OUT1 ( ) OUT1() ( ) OUT1() OUT1 ( ) OUT2

PSxx-OMS0006CN

(A-B)/4 n_1=B+(A-B)/4 A= H_1=(A-B)/2 H_1=(A-B)/2 B= 1 -34No.PS-OMS0006CN-G [F 6] 5R.D. <> [F 6] [F 6] -35No.PS-OMS0006CN-G [F10] <> [F10] OFF 2 OUT1 [dUAL]2 [dUAL]2 () () 37 () () () 37 () [F10] -36No.PS-OMS0006CN-G <> (OFF) [F10 ] OUT1 OUT1 OFF n_1 () [F10 ] OUT1 OUT1 OUT1 n1H n1L 2 2 ( ) OUT1 OUT1 ( ) OUT1 () ( ) OUT1 () OUT1 OUT1 OFF -37No.PS-OMS0006CN-G RAnG

42

Connector location on U side (FU) 3.5 163 10.7 47 106 71.7 9 9 U side 27 Manual override n X 12 12 2 B 4 A 8 2 B 4 A A A B A B A B A B A B A 7 SMC SMC SMC SMC SMC SMC SMC A A A A A A A B B B 2 B 4 A Indicator light 6 2 B 4 A 5 L2 L1 2 B 4 A 4 B B 2 B 4 A 3 2 B 4 A 2 P = 25 2 B 4 A 1 50.5 44 X Stations 38 27 Connector location on D side (FD) 11.7 16.2 139.9 (Single) 43.2 49.7 D side 148.9