This is a legacy product, and replaced byVFR3310-3DZB
This is a legacy product, and replaced byVFS5110-3DZB
ZP Applicable pad 4020W/5020W/6020W/8020W Applicable pad 3507W/4010W/5010W/6010W Applicable pad 4030W/5030W/6030W/8030W A-A A-A A-A (5) (5) (5) 14.8 8.8 6 1.5 A A A A A A 2 0.8 2 3.5 4 4 15 15 30 3 5 5 3 5 3 0.8 0.8 8.4 12.8 20.4 Note) R part has to be smooth with no corners.
Applicable pad 4020W/5020W/6020W/8020W Applicable pad 3507W/4010W/5010W/6010W Applicable pad 4030W/5030W/6030W/8030W A-A A-A A-A (5) (5) (5) 14.8 8.8 6 1.5 A A A A A A 2 0.8 2 3.5 4 4 15 15 30 3 5 5 3 5 3 0.8 0.8 8.4 12.8 20.4 Note) R part has to be smooth with no corners.
Applicable pad 4020W/5020W/6020W/8020W Applicable pad 3507W/4010W/5010W/6010W Applicable pad 4030W/5030W/6030W/8030W A-A A-A A-A (5) (5) (5) 14.8 8.8 6 1.5 A A A A A A 2 0.8 2 3.5 4 4 15 15 30 3 5 5 3 5 3 0.8 0.8 8.4 12.8 20.4 Note) R part has to be smooth with no corners.
P P For the release valve, select a 2/3 port valve with a low vacuum specification. Also, use a needle valve to regulate the release flow rate. During the adsorption and transfer of a workpiece, verification of the vacuum switch is recommended. In addition, visually verify the vacuum gauge when handling a heavy or a hazardous item.
P P For the release valve, select a 2/3 port valve with a low vacuum specification. Also, use a needle valve to regulate the release flow rate. During the adsorption and transfer of a workpiece, verification of the vacuum switch is recommended. In addition, visually verify the vacuum gauge when handling a heavy or a hazardous item.
P P For the release valve, select a 2/3 port valve with a low vacuum specification. Also, use a needle valve to regulate the release flow rate. During the adsorption and transfer of a workpiece, verification of the vacuum switch is recommended. In addition, visually verify the vacuum gauge when handling a heavy or a hazardous item.
Body Size: 5000, Thread: Rc, Port Size: 10 (1), Option: None, Voltage: 3 [110 VAC (115 VAC)], Lead Wire: D (Type D, DIN Terminal w/Connector), Surge Suppressor: Z (with Light/Surge Voltage Suppressor), Manual Override: B (Push-turn Locking Slotted Type), Flow Direction/Pressure Unit: Flow Direction: Left to Right
Body Size: 5000, Thread: Rc, Port Size: 06 (3/4), Option: None, Voltage: 3 [110 VAC (115 VAC)], Lead Wire: D (Type D, DIN Terminal w/Connector), Surge Suppressor: Z (with Light/Surge Voltage Suppressor), Manual Override: B (Push-turn Locking Slotted Type), Flow Direction/Pressure Unit: Flow Direction: Left to Right
Body Size: 5000, Thread: Rc, Port Size: 1, Option: None, Voltage: 3 [110 VAC (115 VAC)], Lead Wire: Type D, DIN Terminal w/Connector, Surge Suppressor: with Light/Surge Voltage Suppressor, Manual Override: Push-turn Locking Slotted Type, Flow Direction/Pressure Unit: Flow Direction: Left to Right
Body Size: 5000, Thread: Rc, Port Size: 3/4, Option: None, Voltage: 3 [110 VAC (115 VAC)], Lead Wire: Type D, DIN Terminal w/Connector, Surge Suppressor: with Light/Surge Voltage Suppressor, Manual Override: Push-turn Locking Slotted Type, Flow Direction/Pressure Unit: Flow Direction: Left to Right
(DeviceStatus : Failure) Valve has a short circuit. Pressure sensor has a short circuit. Pressure sensor has a failure or a disconnection. No connection or a disconnection between the SI Unit and vacuum manifold. There is a firmware error. Red ON ST One of the following may have occurred.
Description Material AV2000-A AV3000-A AV4000-A AV5000-A 4 Pilot valve assembly*1 See below.
CAT.ES40-39 B Soft Start-up Valve A V2000/3000/4000/5000 New New Series AV5000 introduced!
To release residual pressure, select a model with a back flow mechanism.
Soft Start-up Valve A V2000/3000/4000/5000 New New Series AV5000 introduced!
Using a regulator in the outlet side When mounting a regulator in the outlet side (A port side), use a residual pressure relief regulator (AR25K to 40K) or a check type regulator. With a standard regulator (AR10 to 60), the outlet side pressure may not be released when this valve is exhausted. 5.
A 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B COM 10A 9A 8A 7A 6A 5A 4A 3A 2A 1A (+) () 2A 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B Station 2 SOL. B (+) () 2B SOL. A (+) () 3A Station 3 SOL. B (+) 3B () SOL. A (+) 4A () Station 4 SOL. B 4B (+) () SOL. A (+) () 5A Station 5 SOL. B (+) 5B () SOL. A (+) () 6A Station 6 SOL. B 6B (+) () SOL. A 7A (+) () Station 7 SOL. B 7B (+) () SOL. A (+) () 8A Station 8 SOL.