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Table of Contents

ASR430F-02-08S(-F20) ASR430F-02-10S(-F20) ASR530F-02-06S(-F20) ASR530F-02-08S(-F20) ASR530F-02-10S(-F20) ASR530F-02-12S(-F20) ASR530F-03-06S(-F20) ASR530F-03-08S(-F20) ASR530F-03-10S(-F20) ASR530F-03-12S(-F20) ASR630F-03-10S(-F20) ASR630F-03-12S(-F20) ASR630F-04-10S(-F20) ASR630F-04-12S(-F20) ASQ430F-02-06S(-F20) ASQ430F-02-08S(-F20) ASQ430F-02-10S(-F20) ASQ530F-02-06S(-F20) ASQ530F-02-08S

ASR

MIN. 1 2 Note 1) d Note 2) L3 Note 3) L4 ASR430F-02-06S,-F20 ASR430F-02-08S,-F20 ASR430F-02-10S,-F20 ASR530F-02-06S,-F20 ASR530F-02-08S,-F20 ASR530F-02-10S,-F20 ASR530F-02-12S,-F20 ASR530F-03-06S,-F20 ASR530F-03-08S,-F20 ASR530F-03-10S,-F20 ASR530F-03-12S,-F20 ASR630F-03-10S,-F20 ASR630F-03-12S,-F20 ASR630F-04-10S,-F20 ASR630F-04-12S,-F20 89 111 17 34.9 57.7 6 63.7 21.5 20 17 R1/4 93 18.5

ASR

ASR430F-02-08S(-F20) ASR430F-02-10S(-F20) ASR530F-02-06S(-F20) ASR530F-02-08S(-F20) ASR530F-02-10S(-F20) ASR530F-02-12S(-F20) ASR530F-03-06S(-F20) ASR530F-03-08S(-F20) ASR530F-03-10S(-F20) ASR530F-03-12S(-F20) ASR630F-03-10S(-F20) ASR630F-03-12S(-F20) ASR630F-04-10S(-F20) ASR630F-04-12S(-F20) ASQ430F-02-06S(-F20) ASQ430F-02-08S(-F20) ASQ430F-02-10S(-F20) ASQ530F-02-06S(-F20) ASQ530F-02-08S

LEC-OM07605CN

PA02] 0 0 00: 100W 200W, 400W, 750W 02:LEC-MR-RB-032 03:LEC-MR-RB-12 11.2.3 11.5 100 5m 11 9 11. (1) LECSS2-T P+DP+CG3G4 G3G4 P+D P+D P P+ C C G3 D (3) (1) G4 5m 5 m (12) 1.

Table of Contents

AS2201F-01-06-X214 AS2301F-01-06-X214 RS H A AS2201F-01-06-X214 AS2301F-01-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214 RZQ 3. When disassembling to replace the seals and wear ring, refer to the separate disassembly instructions. AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 MI W S 4.

PFxx-OMO0004CN

[inP] [inP][] [F20] GND 30 msec.

Digital Flow Switch (Integrated display type)

Press the UP or DOWN button in function selection mode to display [F20]. Press the SET button. [F20] and [inP] are displayed in turn. Press the SET button to set. Move on to setting of external input. Setting of external input [inP] and [the current set value] are displayed in turn. Press the UP or DOWN button to select. Press the SET button to set.

Digital Flow Switch

Press the or button in function selection mode to display [F20]. [F20] and [inP] are displayed in turn. Press the button. External input [inP] and [the current set value] are displayed in turn. Press the or button to select. Press the button to set. [F 20] Setting of external input completed. Return to function selection mode.

Model: ASR (Pressure Valve), Size: 4 (1/4 Standard), Port Size: 02 (1/4), Applicable Tubing O.D.: 08 (ø8mm), Option: F20 (Fixed set pressure type (0.2 MPa))

Model: ASR (Pressure Valve), Size: 4 (1/4 Standard), Port Size: 02 (1/4), Applicable Tubing O.D.: 06 (ø6mm), Option: F20 (Fixed set pressure type (0.2 MPa))

Type: Throttle Valves, Body Material: [Resin] PBT, Control Method: Meter Out / In, Format: [Elbows] Dual, Environment, Applications: Standard, Ambient Temperature and Working Fluid Temperature(°C): -5～60, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Operating Pressure Range(MPa): null～1.0, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: Male

Type: Throttle Valves, Body Material: [Resin] PBT, Control Method: Meter Out / In, Format: [Elbows] Dual, Environment, Applications: Standard, Ambient Temperature and Working Fluid Temperature(°C): -5～60, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Operating Pressure Range(MPa): null～1.0, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: Male

Digital Flow Switch ( compatible)

Press the UP or DOWN button in function selection mode to display [F20]. Press the SET button. Move on to setting of external input. Setting of external input Press the UP or DOWN button to select the external input equipment. Press the SET button to set. Return to function selection mode. [F20] Setting of external input completed.

Digital Flow Switch ( compatible)

Press the UP or DOWN button in function selection mode to display [F20]. Press the SET button. Move on to setting of external input. Setting of external input Press the UP or DOWN button to select the external input equipment. Press the SET button to set. Return to function selection mode. [F20] Setting of external input completed.

Model: ASR (Pressure Valve), Size: 4 (1/4 Standard), Port Size: 02 (1/4), Applicable Tubing O.D.: 10 (ø10mm)