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Table of Contents

MIN. 1 2 ASQ430F-02-06S,-F20 ASQ430F-02-08S,-F20 ASQ430F-02-10S,-F20 ASQ530F-02-06S,-F20 ASQ530F-02-08S,-F20 ASQ530F-02-10S,-F20 ASQ530F-02-12S,-F20 ASQ530F-03-06S,-F20 ASQ530F-03-08S,-F20 ASQ530F-03-10S,-F20 ASQ530F-03-12S,-F20 ASQ630F-03-10S,-F20 ASQ630F-03-12S,-F20 ASQ630F-04-10S,-F20 ASQ630F-04-12S,-F20 114 136 17 34.9 61.6 6 117 139 18.5 35.9 20.3 44.4 62.6 20 19.5 49.4 8 R1/4 17 18.5

ASR

MIN. 1 2 ASQ430F-02-06S,-F20 ASQ430F-02-08S,-F20 ASQ430F-02-10S,-F20 ASQ530F-02-06S,-F20 ASQ530F-02-08S,-F20 ASQ530F-02-10S,-F20 ASQ530F-02-12S,-F20 ASQ530F-03-06S,-F20 ASQ530F-03-08S,-F20 ASQ530F-03-10S,-F20 ASQ530F-03-12S,-F20 ASQ630F-03-10S,-F20 ASQ630F-03-12S,-F20 ASQ630F-04-10S,-F20 ASQ630F-04-12S,-F20 114 136 17 34.9 61.6 6 117 139 18.5 35.9 20.3 44.4 20 19.5 62.6 49.4 8 R1/4 17 18.5

ASR

MIN. 1 2 ASQ430F-02-06S,-F20 ASQ430F-02-08S,-F20 ASQ430F-02-10S,-F20 ASQ530F-02-06S,-F20 ASQ530F-02-08S,-F20 ASQ530F-02-10S,-F20 ASQ530F-02-12S,-F20 ASQ530F-03-06S,-F20 ASQ530F-03-08S,-F20 ASQ530F-03-10S,-F20 ASQ530F-03-12S,-F20 ASQ630F-03-10S,-F20 ASQ630F-03-12S,-F20 ASQ630F-04-10S,-F20 ASQ630F-04-12S,-F20 114 136 17 34.9 61.6 6 117 139 18.5 35.9 20.3 44.4 62.6 20 19.5 49.4 8 R1/4 17 18.5

LEC-OM07605CN

PA02] 0 0 00: 100W 200W, 400W, 750W 02:LEC-MR-RB-032 03:LEC-MR-RB-12 11.2.3 11.5 100 5m 11 9 11. (1) LECSS2-T P+DP+CG3G4 G3G4 P+D P+D P P+ C C G3 D (3) (1) G4 5m 5 m (12) 1.

Table of Contents

AS2201F-01-06-X214 AS2301F-01-06-X214 RS H A AS2201F-01-06-X214 AS2301F-01-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214 RZQ 3. When disassembling to replace the seals and wear ring, refer to the separate disassembly instructions. AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 MI W S 4.

.: 10 (ø10mm), Option: F20 (Fixed set pressure type (0.2 MPa))

Model: Flow Valve, Size: 3/8 Standard, Port Size: 3/8, Applicable Tubing O.D.: ø10mm, Option: Fixed set pressure type (0.2 MPa), Lock Nut: -

PFxx-OMO0004CN

[inP] [inP][] [F20] GND 30 msec.

Digital Flow Switch (Integrated display type)

Press the UP or DOWN button in function selection mode to display [F20]. Press the SET button. [F20] and [inP] are displayed in turn. Press the SET button to set. Move on to setting of external input. Setting of external input [inP] and [the current set value] are displayed in turn. Press the UP or DOWN button to select. Press the SET button to set.

Digital Flow Switch

Press the or button in function selection mode to display [F20]. [F20] and [inP] are displayed in turn. Press the button. External input [inP] and [the current set value] are displayed in turn. Press the or button to select. Press the button to set. [F 20] Setting of external input completed. Return to function selection mode.

Digital Flow Switch ( compatible)

Press the UP or DOWN button in function selection mode to display [F20]. Press the SET button. Move on to setting of external input. Setting of external input Press the UP or DOWN button to select the external input equipment. Press the SET button to set. Return to function selection mode. [F20] Setting of external input completed.

Digital Flow Switch ( compatible)

Press the UP or DOWN button in function selection mode to display [F20]. Press the SET button. Move on to setting of external input. Setting of external input Press the UP or DOWN button to select the external input equipment. Press the SET button to set. Return to function selection mode. [F20] Setting of external input completed.

Model: ASQ (Flow Valve), Size: 5 (3/8 Standard), Port Size: 02 (1/4), Applicable Tubing O.D.: 08 (ø8mm), Option: F20 (Fixed set pressure type (0.2 MPa))

Model: ASQ (Flow Valve), Size: 5 (3/8 Standard), Port Size: 02 (1/4), Applicable Tubing O.D.: 06 (ø6mm), Option: F20 (Fixed set pressure type (0.2 MPa))

Model: ASQ (Flow Valve), Size: 5 (3/8 Standard), Port Size: 02 (1/4), Applicable Tubing O.D.: 12 (ø12mm), Option: F20 (Fixed set pressure type (0.2 MPa))