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Table of Contents

MIN. 1 2 ASQ430F-02-06S,-F20 ASQ430F-02-08S,-F20 ASQ430F-02-10S,-F20 ASQ530F-02-06S,-F20 ASQ530F-02-08S,-F20 ASQ530F-02-10S,-F20 ASQ530F-02-12S,-F20 ASQ530F-03-06S,-F20 ASQ530F-03-08S,-F20 ASQ530F-03-10S,-F20 ASQ530F-03-12S,-F20 ASQ630F-03-10S,-F20 ASQ630F-03-12S,-F20 ASQ630F-04-10S,-F20 ASQ630F-04-12S,-F20 114 136 17 34.9 61.6 6 117 139 18.5 35.9 20.3 44.4 62.6 20 19.5 49.4 8 R1/4 17 18.5

ASR

MIN. 1 2 ASQ430F-02-06S,-F20 ASQ430F-02-08S,-F20 ASQ430F-02-10S,-F20 ASQ530F-02-06S,-F20 ASQ530F-02-08S,-F20 ASQ530F-02-10S,-F20 ASQ530F-02-12S,-F20 ASQ530F-03-06S,-F20 ASQ530F-03-08S,-F20 ASQ530F-03-10S,-F20 ASQ530F-03-12S,-F20 ASQ630F-03-10S,-F20 ASQ630F-03-12S,-F20 ASQ630F-04-10S,-F20 ASQ630F-04-12S,-F20 114 136 17 34.9 61.6 6 117 139 18.5 35.9 20.3 44.4 62.6 20 19.5 49.4 8 R1/4 17 18.5

Table of Contents

AS2201F-01-06-X214 AS2301F-01-06-X214 RS H A AS2201F-01-06-X214 AS2301F-01-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214 RZQ 3. When disassembling to replace the seals and wear ring, refer to the separate disassembly instructions. AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 MI W S 4.

.: 06 (ø6mm), Option: F20 (Fixed set pressure type (0.2 MPa))

Model: Flow Valve, Size: 3/8 Standard, Port Size: 3/8, Applicable Tubing O.D.: ø6mm, Option: Fixed set pressure type (0.2 MPa), Lock Nut: -

VM

plunger VM220-02-05 VM230-02-05 Polyacetal roller Hard steel roller Roller plunger VM220-02-06 VM220-02-06S VM230-02-06 VM230-02-06S Cross roller plunger VM220-02-07 VM220-02-07S VM230-02-07 VM230-02-07S Polyacetal roller Hard steel roller Toggle lever VM220-02-08 VM230-02-08 VM230-02-30R VM230-02-30B VM230-02-30G VM230-02-30Y VM220-02-30R VM-30AR Red Push button (Mushroom) VM-30AB Black

VM

plunger VM220-02-05 VM230-02-05 Polyacetal roller Hard steel roller Roller plunger VM220-02-06 VM220-02-06S VM230-02-06 VM230-02-06S Cross roller plunger VM220-02-07 VM220-02-07S VM230-02-07 VM230-02-07S Polyacetal roller Hard steel roller Toggle lever VM220-02-08 VM230-02-08 VM230-02-30R VM230-02-30B VM230-02-30G VM230-02-30Y VM220-02-30R VM-30AR Red Push button (Mushroom) VM-30AB Black

VM

-02-01 VM220-02-01S VM230-02-01 VM230-02-01S Roller lever Mechanical operation Manual operation Hard steel roller Polyacetal roller VM220-02-02 VM220-02-02S VM230-02-02 VM230-02-02S One way roller lever Hard steel roller Straight plunger VM220-02-05 VM230-02-05 Polyacetal roller Hard steel roller VM220-02-06 VM220-02-06S VM230-02-06 VM230-02-06S Roller plunger Polyacetal roller Hard steel

VM

plunger VM220-02-05 VM230-02-05 Polyacetal roller Hard steel roller Roller plunger VM220-02-06 VM220-02-06S VM230-02-06 VM230-02-06S Cross roller plunger VM220-02-07 VM220-02-07S VM230-02-07 VM230-02-07S Polyacetal roller Hard steel roller Toggle lever VM220-02-08 VM230-02-08 VM230-02-30R VM230-02-30B VM230-02-30G VM230-02-30Y VM220-02-30R VM-30AR Red Push button (Mushroom) VM-30AB Black

Micro Mechanical Valve Series VM1000

roller Hard steel roller Roller plunger VFM350-02-06 VFM350-02-06S Toggle lever VFM350-02-08 VM-30CR VM-30CB VM-30CG VM-30CY VFM350-02-30R Red Black VFM350-02-30B Push button (Mushroom) 309 Green VFM350-02-30G Yellow VFM350-02-30Y VFM350-02-32R Red VM-32CR VM-32CB VM-32CG VM-32CY Yellow Black VFM350-02-32B 302 Push button (Extended) Green VFM350-02-32G With a set of red, black, green, yellow

Dual Speed Controller with One-touch Fitting Series ASD

1/4 28.2 46.5 ASD430FG-02-08S 15.2 11 34.4 29.4 18.5 19.7 10 31 49.3 ASD430FG-02-10S 18.5 21 6 25.2 48.3 ASD530FG-02-06S 12.8 17 20.3 28.2 8 51.3 ASD530FG-02-08S 15.2 18.5 23 19.8 46.9 41.9 48.8 43.8 19 R 1/4 15.4 42.8 37.8 32.6 10 54.1 ASD530FG-02-10S 18.5 21 23.1 34.4 12 55.9 ASD530FG-02-12S 20.9 22 25.2 48.3 6 17 ASD530FG-03-06S 12.8 20.3 28.2 51.3 8 18.5 ASD530FG-03-08S 15.2 23 19.8

ZP

ZP3-T13UM;-A12-02 ZP3-T16UM;-A12-02 Mounting Adapter Part No.

ZP

ZP3-T13UM;-A12-02 ZP3-T16UM;-A12-02 Mounting Adapter Part No.

ZP

Material ZQ Series ZPY Without buffer ZPY U N 02 N4 A5 ZF ZP Mounting thread (Refer to Table (2) for applications.) Pad diameter (mm) 02 04 2 4 ZCU Vacuum entry port (Refer to Table (2) for applications.) 06 6 AMJ 08 8 10 10 Misc. 13 13 Table (2) Vacuum Entry/Mounting Thread Diameter 16 16 Thread dia.

Vacuum Pad

ZP2-04S ZP2-06S ZP2-08S ZP2-10S ZP2-15S ZP2-04S ZP2-06S ZP2-08S ZP2-10S ZP2-15S Adapter part no. ZP2A-S01P ZP2A-S02P ZP2A-S03P ZP2A-S04P ZP2A-S05P ZP2A-S11 ZP2A-S12 ZP2A-S13 ZP2A-S14 ZP2A-S15 Pad type ZP2-T04S-A3 ZP2-T06S-A5 ZP2-T08S-A5 ZP2-T10S-A5 ZP2-T15S-A5 ZP2-T04S-B3 ZP2-T06S-B5 ZP2-T08S-B5 ZP2-T10S-B5 ZP2-T15S-B5 Type Sponge Symbol S Note) in the table indicates the pad material.