Vacuum Pad

3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06 04 06 04 06 04 06 Model 04 06 04 06 04 06 04 06 ZP2-T4020WK ZP2-T5020WK ZP2-T6020WK ZP2-T8020WK ZP2-T3507WK ZP2-T4010WK ZP2-T5010WK ZP2-T6010WK 2 x 1.5 0.5 0.5 10 11 2.5 0.8 04 06 ZP2-T 30 WK H Width across flat J (Hexagon) (G) (F) Width across flat 8 (Hexagon) M5 x 0.8 Width across flat 14 (Hexagon) E 13 3 3 M10 x 1 D M5 x 0.8 6 8 Y A

Vacuum Pad

3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06 04 06 04 06 04 06 Model 04 06 04 06 04 06 04 06 ZP2-T4020WK ZP2-T5020WK ZP2-T6020WK ZP2-T8020WK ZP2-T3507WK ZP2-T4010WK ZP2-T5010WK ZP2-T6010WK 2 x 1.5 0.5 0.5 10 11 2.5 0.8 04 06 ZP2-T 30 WK H Width across flat J (Hexagon) (G) (F) Width across flat 8 (Hexagon) M5 x 0.8 Width across flat 14 (Hexagon) E 13 3 3 M10 x 1 D M5 x 0.8 6 8 Y A

Dual Speed Controller with One-touch Fitting Series ASD

15.2 51.3 28.2 41.9 46.9 46.5 41.5 19.8 14 23 R 3/8 19 40 35 10 ASD530F-03-10S 98 21 54.1 32.6 18.5 23.1 12 ASD530F-03-12S 101 22 55.9 34.4 20.9 10 ASD630F-04-10S 177 21 64.3 32.6 18.5 57.3 64.8 57.6 50.1 18.6 R 1/2 49.6 42.1 26.5 28.6 25.9 24 12 ASD630F-04-12S 179 22 66.1 34.4 20.9 Reference dimensions of M5 x 0.8, R threads after installation. 15-9-16 Dual Speed Controller with One-touch

Table of Contents

type: White color L type: Black color (Mounting hole) B C D E F G H Model A 3 8 Rc3 8 Rc3 8 Rc3 8 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL

1

Symbol Stations Note Symbol Stations Note 02 02 2 stations 2 stations All double wiring All double wiring 04 02 08 02 8 stations 4 stations The asterisk denotes the symbol for assembly. Prefix it to the part numbers of the valve etc. 2 stations 2 stations All single wiring All single wiring 08 12 The valve arrangement is numbered as the 1st station from the D side.

CG5-S

(mm) Connection threads Connection threads Universal type Universal type ASD230FG-M5-04 ASD230FG-M5-06 ASD330FG-01-06S ASD430FG-02-06S ASD530FG-02-06S -03-06S ASD330FG-01-08S ASD430FG-02-08S ASD530FG-02-08S -03-08S ASD430FG-02-10S ASD530FG-02-10S -03-10S ASD630FG-04-10S ASD530FG-02-12S -03-12S ASD630FG-04-12S M5 x 0.8 R 1/4 M5 x 0.8 JIS symbol 10 R 3/8 R 1/8 R 1/2 6 R 1/4 R 1/4 12 R 3/8 R

CG5-S

(mm) Connection threads Connection threads Universal type Universal type ASD230FG-M5-04 ASD230FG-M5-06 ASD330FG-01-06S ASD430FG-02-06S ASD530FG-02-06S -03-06S ASD330FG-01-08S ASD430FG-02-08S ASD530FG-02-08S -03-08S ASD430FG-02-10S ASD530FG-02-10S -03-10S ASD630FG-04-10S ASD530FG-02-12S -03-12S ASD630FG-04-12S M5 x 0.8 R 1/4 M5 x 0.8 JIS symbol 10 R 3/8 R 1/8 R 1/2 6 R 1/4 R 1/4 12 R 3/8 R

ZP

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

M1 M2 Weight (g) ASV310F-01-06S ASV310F-01-08S ASV310F-02-06S ASV310F-02-08S ASV410F-01-08S ASV410F-01-10S ASV410F-02-08S ASV410F-02-10S ASV410F-03-08S ASV410F-03-10S ASV510F-02-10S ASV510F-02-12S ASV510F-03-10S ASV510F-03-12S ASV510F-04-10S ASV510F-04-12S 16.8 19.3 16.8 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3 25.7 23.3 25.7 23.3 25.7 71.9 73.8 71.9 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

93 28.2 51.3 8 ASD530FG-03-08S 15.2 46.9 41.9 45.4 40.4 23 19.8 19 R 3/8 40 35 14 21 98 32.6 54.1 10 ASD530FG-03-10S 18.5 23.1 22 101 34.4 55.9 12 ASD530FG-03-12S 20.9 21 177 32.6 64.3 10 ASD630FG-04-10S 18.5 64.8 57.3 56.7 49.2 28.6 26.5 25.9 24 R 1/2 49.6 42.1 18.6 22 179 34.4 66.1 12 ASD630FG-04-12S 20.9 Note 1) Reference dimensions Note 2) Reference dimensions of M5 x 0.8, R threads

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

46.9 41.9 48.8 43.8 19 R 3/8 14 40 35 32.6 54.1 10 21 18.5 ASD530FG-03-10S 23.1 34.4 55.9 12 22 20.9 ASD530FG-03-12S 32.6 64.3 10 21 18.5 ASD630FG-04-10S 28.6 26.5 25.9 64.8 57.3 57.6 50.1 24 R 1/2 18.6 49.6 42.1 34.4 66.1 12 22 20.9 ASD630FG-04-12S Reference dimensions of M5 x 0.8, R threads after installation. 15-9-55 14 Series ASD-FG Dimensions: Inch Size ASD230FG ASD330FG/430FG ASD530FG

AS-FG/ASD-FG

19.8 46.9 41.9 48.8 43.8 19 R(PT) 3/8 40 14 35 32.6 54.1 10 21 18.5 ASD530FG-03-10S 23.1 34.4 55.9 12 22 20.9 ASD530FG-03-12S 32.6 64.3 10 21 18.5 ASD630FG-04-10S 28.6 26.5 64.8 57.3 57.6 50.1 24 R(PT) 1/2 25.9 49.6 18.6 42.1 34.4 66.1 12 22 20.9 ASD630FG-04-12S Reference dimensions for M5 x 0.8 and R(PT) threads after installation. 13 Series ASD-FG Dimensions/Inch Size Applicable tube O.D

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

M1 M2 Weight (g) ASV310F-01-06S ASV310F-01-08S ASV310F-02-06S ASV310F-02-08S ASV410F-01-08S ASV410F-01-10S ASV410F-02-08S ASV410F-02-10S ASV410F-03-08S ASV410F-03-10S ASV510F-02-10S ASV510F-02-12S ASV510F-03-10S ASV510F-03-12S ASV510F-04-10S ASV510F-04-12S 71.9 73.8 71.9 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2 91.8 90.2 91.8 90.2 91.8 16.8 19.3 16.8 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3

5-Port Solenoid Valve

SY Type 10/Side Ported Plug-in Connector Connecting Base: EX500 Gateway Decentralized System 2 (128 Points) p. 97 SS5Y-10S SY Type 10/Side Ported Plug-in Connector Connecting Base: EX500 Gateway Decentralized System (64 Points) p. 103 SS5Y-10S SY Type 10/Side Ported Plug-in Connector Connecting Base: EX250 p. 125 SS5Y-10S SY Type 10/Side Ported Plug-in Connector Connecting Base: EX260 p.

HRX-OM-S004

When the ambient temperature is out of the range between the temperatures set for AS.04 and AS.06, AL.03 or AL.04 may be generated at the same time when the product is turned ON.

Dual Speed Controller with One-touch Fitting Series ASD 1

15.2 51.3 28.2 41.9 46.9 46.5 41.5 19.8 23 14 R 3/8 19 40 35 10 ASD530F-03-10S 98 21 54.1 32.6 18.5 23.1 12 ASD530F-03-12S 101 22 55.9 34.4 20.9 10 ASD630F-04-10S 177 21 64.3 32.6 18.5 57.3 64.8 57.6 50.1 18.6 R 1/2 49.6 42.1 26.5 28.6 25.9 24 12 ASD630F-04-12S 179 22 66.1 34.4 20.9 Reference dimensions of M5 x 0.8, R threads after installation. 15-9-16 4 Dual Speed Controller with One-touch

ASD

18.5 93 28.2 51.3 15.2 41.9 46.9 46.5 41.5 23 19.8 14 R(PT)3/8 19 40 35 10 ASD530F-03-10S 21 98 32.6 54.1 18.5 23.1 12 22 ASD530F-03-12S 101 34.4 55.9 20.9 10 21 177 ASD630F-04-10S 32.6 64.3 18.5 57.3 64.8 57.6 50.1 18.6 R(PT)1/2 49.6 42.1 28.6 26.5 25.9 24 12 22 179 ASD630F-04-12S 34.4 66.1 20.9 Reference dimensions of M5 X 0.8, R(PT) thread after being screwed in. 4.1-15 Dual Speed Controller

Compact 5-Port Solenoid Valve

Internal Pilot How to Order Manifolds JJ5SY 3 10S QA 05 D C6 Made to Order (Refer to page 135 for details.)

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Mounting bolt Spring Return Spring Extend D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 Model C Mounting bolt Model C Mounting bolt CQ2B12-5S -10S CQ2B16-5S -10S CQ2B20-5S -10S CQ2B25-5S -10S CQ2B32-5S -10S CQ2B40-5S -10S CQ2B50-10S -20S CQ2B12-5T -10T CQ2B16-5T -10T CQ2B20-5T -10T CQ2B25-5T -10T CQ2B32-5T -10T CQ2B40-5T -10T CQ2B50-

Body Size/Type: 42 (Elbow Size 04 Standard), Control Type: 0 (Meter-out), 1: 1, Thread Type: (R Thread or In-Line Type), Port Size: 04 (1/2), Applicable Tubing O.D: 12 (ø12), Sealant: S (w/Sealant)