Free Mount Cylinder Series CU

12 15.5 19.5 10 10 11.5 12.5 13 12.5 12.5 14 18 22 13 16 16 19 23 27 13 15 20 26 32 40 10 11 14 16 20 24 22 24 32 40 50 62 17 18 25 30 38 48 3 4 6 8 10 12 5 6 8 10 7 7 7 9 10 11 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 15 16.5 M3 x 0.5 depth 5 M3 x 0.5 depth 5 M4 x 0.7 depth 6 M5 x 0.8 depth 8 M5 x 0.8 depth 8 M6 x 1.0 depth 9 3.2 3.2 4.5 5.5 5.5 6.6 4 9 9 13.5 2

CJ2X/CUX/CQSX/CQ2X/CM2X

Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 RE A B 3.2, 4, 6 3.2, 4 6, 8 4 6 8, 10 Metric size Tubing O.D.

CJ2X/CUX/CQSX/CQ2X/CM2X

Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 RE A B 3.2, 4, 6 3.2, 4 6, 8 4 6 8, 10 Metric size Tubing O.D.

CJ2X/CUX/CQSX/CQ2X/CM2X

Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 RE A B 3.2, 4, 6 3.2, 4 6, 8 4 6 8, 10 Metric size Tubing O.D.

Microspeed Cylinder

to 7.9 in/s) Piston speed Piston rod diameter 1 to 200mm/s (0.04 to 7.9 in/s) 12 M6 x 1.0 M10 x 1.25 6 M3 x 0.5 M5 x 0.8 8 M4 x 0.7 M6 x 1.0 10 M5 x 0.8 M8 x 1.25 Female threads Rod end threads Male threads Rod end thread tolerance Stroke tolerance Port size Vacuum port, relief port JIS class 2 +1.0 0 mm M5 x 0.8 (10-32 nominal) M5 x 0.8 (10-32 nominal) 11 Clean Room Series Microspeed Cylinder

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

x 0.8 8 M4 x 0.7 M6 x 1.0 10 M5 x 0.8 M8 x 1.25 12 M6 x 1.0 M10 x 1.25 32 40 32 40 Rod end threads Female threads Male threads Air 1.5MPa 1.0MPa Fluid Proof pressure Maximum operating pressure Minimum operating pressure Rod end thread tolerance Stroke tolerance Port size Vacuum port, relief port Ambient and fluid temperature JIS class 2 +1.0 0 mm 0.035MPa 0.025MPa M5 x 0.8 M5 x 0.8 Without

STANDARD (PT), .04898 lb, ModelTubing O.D.Controlled flow (Free flow)Metric sizeInch sizeAir flow (l/min (ANR))Effective area (mm2)ASD230FM-M5?

Body Size: 2 (M5 Basis), Thread: Metric Thread (M5)/R(PT)/Unified Thread (10-32UNF), Port Size: M5X0.8, Applicable Tube OD: 06 (Ø6 mm)

.: 5 × 0.8, Types of Screw: M, Applicable Tube O.D. mm(mm): 6, Applicable Tube O.D. inch size(inch): -, Body Size: M5 Standard, Sealing Method: No Seal, Made-to-order specifications: None

.: 5 × 0.8, Types of Screw: M, Applicable Tube O.D. mm(mm): 6, Applicable Tube O.D. inch size(inch): -, Body Size: M5 Standard, Sealing Method: No Seal, Made-to-order specifications: None

ZP

Suffix of how to order () U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 Pad diameter: 4 to 8 Model Pad unit part no. Adapter part no. ZP3-Y(04/06/08)UM;-B5-@ ZP3-Y(04/06/08)B;-B5-@ ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet.

ZP

Suffix of how to order () U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 Pad diameter: 4 to 8 Model Pad unit part no. Adapter part no. ZP3-Y(04/06/08)UM;-B5-@ ZP3-Y(04/06/08)B;-B5-@ ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet.

2

Thread type Nil R N NPT G G Port size 01 1/8 02 1/4 03 3/8 04 1/2 INDEX 474 Series AS-FG Needle Valve/Flow-rate Characteristics AS1201FG-M5, AS1211FG-M5 AS1301FG-M5, AS1311FG-M5 AS2201FG-01, AS2211FG-01 AS2301FG-01, AS2311FG-01 AS2201FG-02, AS2211FG-02 AS2301FG-02, AS2311FG-02 600 300 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 100 01, 23, 03, 04, 06, 07 01, 23

Table of Contents

(mm) 4 L Weight (g) Application Model D1 D2 KQ2C-04 0.1 KQH, KQ2H04-M5, M6 KQS, KQ2S04-M5, M6 2.9 10.1 5.2 Applicable tubing 4 KQ2C-04A8.5 5 2.2 0.1 KQL, KQ2L04-M5, M6 KQT, KQ2T04-M5, M6 KQY, KQ2Y04-M5, M6 4 KQ2C-04B9.7 5 2.2 0.1 KQ2C-06 0.1 6 2.9 12.1 7.2 KQH, KQ2H06-M5, M6 KQS, KQ2S06-M5, M6 2.2 6 KQ2C-06A10.5 7 0.1 KQL, KQ2L06-M5, M6 KQT, KQ2T06-M5, M6 KQY, KQ2Y06-M5, M6 6 KQ2C-06B12.0

ZP

D 02 1.2 M4 x 0.7 4 04 1.6 06 08 2.5 28.4 N S U F GN GS B4 M5 x 0.8 19.5 04 06 ZP R U 02 1.2 M5 x 0.8 5 04 1.6 06 08 2.5 B5 A2 Dimensions Per Vacuum Inlet Construction p. 115 Model Adapter Assembly p. 122 D E F Fitting part min. hole size Vacuum inlet direction q Pad dia.

AS

7 12.7 12.3 28.6 25.8 25 22.2 9.6 8 AS121F-M5-23 AS121F-M5-03 5/32" M5 x 0.8 M5 x 0.8 3.2 9.3 22.1 17.3 8.4 22.1 17.3 AS121F-U10/32-23 AS121F-U10/32-03 10-32UNF 5/32" 10-32UNF 12.7 12.3 AS121F-M5-04 AS121F-M5-05 M5 x 0.8 M5 x 0.8 3/16" 4 7 16.5 7 8 11.4 21.3 26.1 9.3 22.2 9.6 25 25.8 28.6 22.1 17.3 AS121F-U10/32-04 AS121F-U10/32-05 10-32UNF 3/16" 10-32UNF 11.7 28.6 25.8 25 22.2 9.6 8 AS121F-M5

CATALOG

N)AS4200-04 M3 M3x0.5 M5 M5x0.8 01 18 02 14 03 38 04 12 Courtesy of Steven Engineering, Inc. !

ZP

Suffix of how to order () U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 Pad diameter: 4 to 8 Model Pad unit part no. Adapter part no. ZP3-Y(04/06/08)UM;-B5-@ ZP3-Y(04/06/08)B;-B5-@ ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet.

Vacuum Pad

Suffix of how to order () U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 Pad diameter: 4 to 8 Model Pad unit part no. Adapter part no. ZP3-Y(04/06/08)UM;-B5-@ ZP3-Y(04/06/08)B;-B5-@ ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet.

Vacuum Pad

Suffix of how to order () U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 Pad diameter: 4 to 8 Model Pad unit part no. Adapter part no. ZP3-Y(04/06/08)UM;-B5-@ ZP3-Y(04/06/08)B;-B5-@ ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet.