Body Size: 3 (3/8 Basis), Control Method: 0 (Meter Out), Material: G (Stainless Steel (SUS304)), Port Size: 03 (3/8), Applicable Tube OD: Ø10

Body Size: 3 (3/8 Basis), Control Method: 0 (Meter Out), Material: G (Stainless Steel (SUS304)), Port Size: 03 (3/8), Applicable Tube OD: Ø6

Type: Speed Controller, Body Material: [Resin] PP, Control Method: Meter-Out, Format: [Elbows] Cylinder direct-connected elbow type, Environment, Applications: Standard / Clean circumstance, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Standard, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: Male thread + One-Touch Couplings, Connection Dia.: 3/8,

Type: Speed Controller, Body Material: [Resin] PP, Control Method: Meter-Out, Format: [Elbows] Cylinder direct-connected elbow type, Environment, Applications: Standard / Clean circumstance, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Standard, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: Male thread + One-Touch Couplings, Connection Dia.: 3/8,

Type: Speed Controller, Body Material: [Resin] PP, Control Method: Meter-Out, Format: [Elbows] Cylinder direct-connected elbow type, Environment, Applications: Standard / Clean circumstance, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Standard, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: Male thread + One-Touch Couplings, Connection Dia.: 3/8,

Nozzle Diameter: ø1.8, Body Style: Body Ported, Vacuum Pressure: -48KPa{-360mmHg}, SUP: One-touch Fitting Ø12, VAC: Screw-in Rc(PT) 3/8, EXH: One-touch Fitting Ø12

Nozzle Diameter: ø1.8, Body Style: Body Ported, Vacuum Pressure: -660mmHg, SUP: One-touch Fitting Ø12, VAC: Screw-in Rc(PT) 3/8, EXH: One-touch Fitting Ø12

2

) AS331F-02-10(S)A 10 15.9 17.4 23 41.2 26.1 62.5 15.6 46 (46) AS331F-02-12(S)A 12 18.5 42.5 28.3 64.7 17 48 (48) AS331F-03-06(S)A 6 11.2 12.9 16.6 20.2 36 21.4 57.8 1/4 19 50 48.4 44.5 42.9 13.3 34 (35) AS331F-03-08(S)A 8 13.2 37.1 23.5 52.2 14.2 35 (36) AS331F-03-10(S)A 10 15.9 17.4 23 41.2 26.1 54.8 15.6 38 (39) AS331F-03-12(S)A 12 18.5 42.5 28.3 57 17 40 (41) AS431F-04-10(S)A 10 1/2 24

Table of Contents

A Note 1) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

CATALOG

M14x1 19 17 33.5 17 15 17 13.1 1/2 3/8 KQE13-36 1-12 28.57 28.57 36.5 14.5 26 22 9.6 8 14 KQE08-02 M16x1 17 19 33 12 17 18.5 26.1/18 1/2 1/2 KQE13-37 1-12 28.57 28.57 40.5 18.5 26 22 9.6 8 38 KQE08-03 M16x1 19 19 35 15 17 18.5 26.1/18 10 14 KEQ10-02 M20x1 22 24 35 12 21 21 41.5/29.5 10 38 KQE10-03 M20x1 24 24 34.5 15 21 21 41.5/29.5 12 38 KQE12-03 M22x1 24 27 37 15 23 22 58.3/46.1 12 12

Table of Contents

O.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFV04-01 KFV04-02 KFV06-01 KFV06-02 KFV06-03 KFV08U-01 KFV08U-02 KFV08U-03 KFV08N-01 KFV08N-02 KFV08N-03 KFV10U-02 KFV10U-03 KFV10U-04 KFV10N-02 KFV10N-03 KFV10N-04 KFV12U-02 KFV12U-03 KFV12U-04 KFV12N-02 KFV12N-03 KFV12N-04 14 10 14 10 14 17 12 14 17 12 14 17 19.3 33.7 35.5 37.5 35.5 37.5 38.2

Table of Contents

VX2322-03 VX2232-03 VX2332-03 VX2242-03 VX2342-03 VX2110-01 VX2120-01 VX2130-01 VX2110-02 VX2120-02 VX2220-02 VX2320-02 VX2130-02 VX2230-02 VX2330-02 VX2240-02 VX2340-02 VX2250-02 VX2350-02 VX2260-02 VX2360-02 VX2220-03 VX2320-03 VX2230-03 VX2330-03 VX2240-03 VX2340-03 VX2250-03 VX2350-03 VX2260-03 VX2360-03 VX2260-04 VX2360-04 2 3 4.5 2 0.59 1.2 2.4 0.59 1.2 1.5 0.6 0.2 1.5 0.6 1.5 3.0

5 Port Solenoid Valve Series SY3000/5000/7000/9000

In the case of complex arrangement, specify them on the manifold specification sheet. 42P SS5Y 05 5 C8 10 Clean series Manifold series Stations 03 3 stations 3 10-SY3000 5 10-SY5000 12 7 10-SY7000 12 stations 4 to 12 stations in the case of 10-SS5Y3.

Table of Contents

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% VS4 VQ7 EVS Conditions VFN Base mounted Series MB Series CS1 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 Base mounted Series MB Series CS1 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 SGP (Steel

AS

AS321F-02-11 67 69 12 43.3 21 31.8 17.9 20.9 3/8" 22 44.3 32.8 19 19 AS321F-03-06 AS321F-03-07 55 55 6 39.3 17 27.8 13.2 12.8 1/4" 17 39.3 27.8 AS321F-03-08 AS321F-03-09 57 57 8 41 18.5 29.5 3/8 19.8 45.4 40.4 40.2 35.2 23 15.2 5/16" 15.2 18.5 29.5 41 3/8 23 35.2 19.8 40.2 40.4 45.4 AS321F-03-10 AS321F-03-11 59 59 10 43.3 21 31.8 17.9 18.5 21 31.8 43.3 3/8" AS321F-03-12 AS421F-04-11 100

M-E05-1-LQ1

LQ1-5N12 LQ1-5B12 LQ1T41-R24 4 4-12 LQ1-4N12 LQ1-4B12 2-04 LQ1-2N04 LQ1-2B04 4-10 LQ1-4N10 LQ1-4B10 LQ1T41-R26 4 4-12 LQ1-4N12 LQ1-4B12 2-03 LQ1-2N03 LQ1-2B03 4-12 LQ1-4N12 LQ1-4B12 LQ1T41-R32 4 2-06 LQ1-2N06 LQ1-2B06 4-12 LQ1-4N12 LQ1-4B12 2-06 LQ1-2N06 LQ1-2B06 LQ1T41-R34 4 2-03 LQ1-2N03 LQ1-2B03 4-12 LQ1-4N12 LQ1-4B12 2-03 LQ1-2N03 LQ1-2B03 LQ1T51-R2 5 5-19 LQ1-5N19 LQ1-5B19 3-10 LQ1-

KJ

O.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFV04-01 KFV04-02 KFV06-01 KFV06-02 KFV06-03 KFV08U-01 KFV08U-02 KFV08U-03 KFV08N-01 KFV08N-02 KFV08N-03 KFV10U-02 KFV10U-03 KFV10U-04 KFV10N-02 KFV10N-03 KFV10N-04 KFV12U-02 KFV12U-03 KFV12U-04 KFV12N-02 KFV12N-03 KFV12N-04 14 10 14 10 14 17 12 14 17 12 14 17 19.3 33.7 35.5 37.5 35.5 37.5 38.2

SY

Cable Type20P How to Order Manifold Assemblies (Example) How to Order Manifolds 20P SS5Y 05 5 Manifold series Stations 3 stations 03 3 SY3000 5 SY5000 ... ... 12 stations 7 SY7000 12 Note) SS5Y3 has 4 to 12 stations.

Table of Contents

IS1000M-50 IS1000M-60 IS1000M-60 IS1000M-60 Y21001 (02) Y310-(01) 02 Y310-(01) 02 Y410-(02) 03 Y510-(02) 03 Y61003 (04) 06 (10) Y610(03) 04 (03) 04 Y610(5) (6) VHS40-06 02 03 04 E600(6) VHS2001 02 02 03 02 03 VHS30VHS30VHS40VHS50E30002 03 04 E30002 03 04 E40002 03 04 06 E500-06 E20001 02 03 (6) 06 10 06 10 E60006 10 E600E100-M5 (6) 02 03 04 06 IS1000E-30 IS1000E-30 02 03 04 IS1000E-20 01

AC

04 Without sub-plate D M5 Without sub-plate B M5 1 8 Base mounted style Without sub-plate 1 8 1 4 2 Without sub-plate 1 4 3 8 1 2 4 JIS Symbol M5 01 02 02 03 04 04 06 10 10 12 14 20 A M5 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 3 Body ported style 5 1 1 1 1 4 7 1 4 1 1 2 1 9 2 2 1.15-2 E-P HYREG Series VY1 Standard Specifications 02 03 04 0 1 VY140 02 03 04 0 1 VY150 04 06 10 0 1 VY170 0 1 10 12 01