VM

Output 1 Output 2 A B C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Dimensions D3 D2 L5 M2 IN L3 L2 L4 OUT IN D1 M1 M1 Applicable tube dia. d L1 Metric Size Weight (g) Model d D1 D2 L3 L2 D3 L1 L4 L5 M1 M2 VR1211F-23 3.2 11.4 8.4 52 6.2 25.7 36.1 17.5 12.7 12.9

Tamper Proof and Flat Head Screw

(mm) 1in=25.4mm L4 D3 H (width across flats) T2 A L2 D1 L3 D2 T1 L1 Dimensions A Model T2 H D1 T1 D2 D3 L3 L1 L4 L2 AS120-M5-D M5 x 0.8 8 9 M5 x 0.8 9 4.7 10 31 10.3 0.7 28.4 AS120-U10/32-D 10-32UNF 10-32UNF AS220-01-SD Rc 1/8 12 14.3 R 1/8 AS220-F01-SD PF1/8 14.6 7.2 18 35.6 14.1 1.2 32 AS220-N01-SD NPT1/8 12.7 NPT1/8 AS220-02-SD Rc 1/4 17 18 R 1/4 AS220-F02-SD PF1/4 19.5 7.2 27.2 40.7

PFxx-OMJ0005CN

--C/E 50(25) PFM750--D/F 50(25) PFM711--C/E 100(50) PFM711--D/F 100(50) ( )CO2 ( ) CO2 () 25[L/min] 10[L/min] [L/min] [L/min] 50[L/min] 100[L/min] [L/min] [L/min] -57No.PF-OMJ0005CN-I (350[kPa]) 25[L/min] 10[L/min] [kPa] [kPa] [L/min] [L/min] 100[L/min] 50[L/min] [kPa] [kPa] [L/min] [L/min] -58No.PF-OMJ0005CN-I PFM7-(N)01/(N)02/F01 17 2 -59No.PF-OMJ0005CN-I PFM7-(N)01L/(N)02L/F01L 2

Size: 2 (1/8, 1/4 Basis), Style: 2 (Elbow), Control Method: 1 (Meter-in), Thread: F (G), Port Size: 01 (1/8)

Type: Speed Controller, Body Material: Zinc Alloy, Control Method: Meter-In, Format: [Elbows] Cylinder direct-connected flat elbow type, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Standard, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: Male thread + female thread, Connection Dia.: 1/8, Option: None, Types of

REGULATOR

G ARP20P-320AS-01 Plug assembly Rc ARP20P-320AS-N01 NPT ARP20P-320AS-F01 G AR20P-370AS-01 Plug Rc AR20P-370AS-N01 PBT RESIN NPT AR20P-370AS-01 G AR23KP-020AS Check valve assembly Check valve plug assembly AR20KP-090AS Note 1 Bracket and Set nut assembly.

VR4151/4152

D-DN This catalog is printed on recycled paper with concern for the global environment.

Digital Flow Switch (Integrated display type)

Model Max. rated flow Model Max. rated flow [L/min] [L/min] PFM710--C/E 10 (5) PFM710--D/F 10 (5) PFM725--C/E 25 (12.5) PFM725--D/F 25 (12.5) PFM750--C/E 50 (25) PFM750--D/F 50 (25) PFM711--C/E 100 (50) PFM711--D/F 100 (50) : ( ): Fluid: CO2 : ( ): Fluid: CO2 Flow adjustment needle revolution Flow characteristics (reference value) -57No.PF-OMJ0006-J Pressure loss (at 350 [kPa]) -58No.PF-OMJ0006

Digital Flow Switch (Remote type sensor unit)

Bracket (ZS-33-M) Bracket (ZS-33-MS) -37No.PF-OMJ0016-J Lead wire and connector (ZS-33-D) Connector cover (ZS-33-F) -38No.PF-OMJ0016-J Revision history A: Contents revised in several places. B: Contents revised in several places. C: Modified errors in text. D: Contents are added. E: Contents revised in several places. F: Contents revised in several places.

Table of Contents

DZ/Y/YZ VFS3320-D/DZ/Y/YZ VFS3420-D/DZ/Y/YZ VFS3520-D/DZ/Y/YZ Lead wire O.D.

VFR

U side mounting D U 1 2 8 stations Option D side 3 4 3 4 Max: 8 stations Refer to page 3-5-8.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

AS1001F-23D-X214 AS AS-FE KE AS-FG AS-FP AS-FM AS-D AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ 743 Dual Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting ASDF-D Series RoHS Model Applicable tubing O.D.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

Note 2) 3/16", 3/8", 1/2" are made of brass (Electroless nickel plated). 15-9-95 5 Dimensions L5 Elbow type D3 H Applicable tubing O.D. d (Hexagon width across flats) L4 L3 A D1 M1 L1 L2 D2 T Metric Size Inch Size d T H D2 D3 L1 L2 L3 L4 L5 A M1 d T H D1 D2 D3 L1 L2 L3 L4 L5 A M1 D1 Model Model AS121F-M5-23T AS121F-U10/32-01T 1/8" 8.4 17.3 22.1 12.3 3.2 8.4 5/32" 9.3 12.7 17.3 22.1 12.3

FILTER REGULATOR

AW-OMS0038-C PRODUCT NAME FILTER REGULATOR MODEL/ Series AW20-(F,N)01(F,N)02(B,C,E,G,H,M)(-1,2,6,C,J,N,R,Z)-B AW30-(F,N)02(F,N)03(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40-(F,N)02(F,N)04(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40-(F,N)06(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW60-(F,N)06(F,N)10(B,C,D,E,G,M)(-1,2,6,8,J,N,R,W,Z)-B Contents PAGE 1. SAFETY INSTRUCTIONS 16 2. APPLICATION 7 3.

FILTER REGULATOR

AW-OMT0013-B PRODUCT NAME FILTER REGULATOR MODEL/ Series AW20K-(F,N)01(F,N)02(B,C,E,G,H,M)(-1,2,6,C,J,N,R,Z)-B AW30K-(F,N)02(F,N)03(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40K-(F,N)02(F,N)04(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40K-(F,N)06(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW60K-(F,N)06(F,N)10(B,C,D,E,G,M)(-1,2,6,8,J,N,R,W,Z)-B Contents PAGE 1. SAFETY INSTRUCTIONS 16 2.

PFM7

(2 m) Z Without lead wire with connector W With lead wire with connector (2 m) + Rubber cover for connector (silicon rubber) ZS-33-F S 1 2 ZS-33-D S 1 2 ZS-33-D IN IN Lead wire length 2 m Lead wire length 2 m Option 2 T Panel mount adapter (For without flow adjustment valve) R Bracket (For without flow adjustment valve) S Bracket (For with flow adjustment valve) Nil None ZS-33-J ZS-33-M

IR1000/2000/3000

Note) X465 AMR Note) Except symbol G ITV IC Switch specifications Output specifications NPN output PNP output 1 to 5 V output 4 to 20 mA output Symbol A B C D VBA VE VY1 With digital pressure switch G PPA Note 1) Please contact SMC separately for details about the external dimensions, etc.

Size: 2 (1/8, 1/4 Basis), Style: 2 (Elbow), Control Method: 1 (Meter-in), Thread: F (G), Port Size: 01 (1/8), Option: S (Sealant)

Size: 2 (1/8, 1/4 Basis), Style: 2 (Elbow), Control Method: 1 (Meter-in), Thread: F (G), Port Size: 01 (1/8), Option: None, Lock Nut: J (Round)

Body Size: 2 (1/8, 1/4 Basis), Control Method: 1 (Meter-in), Thread: F [G(PF)], Port Size: 01 (1/8), Sealant: S (Sealant)